JPH0448300A - Air shield particle beam irradiation processor - Google Patents

Abstract

PURPOSE:To shorten an irradiation time by composing the device of a beam irradiation container part which irradiates an object body with a particle beam in an airtight state and a stabilization processing container part for stabilizing the irradiated body in the airtight state. CONSTITUTION:The irradiation of a beam irradiating container part is performed while the object body to be irradiated is driven in the front-rear direction by running liquid nitrogen through a radiator in an inert gas running state after a sample is charged and deaeration is performed with an airtight shutter 1 closed. Consequently, the object can be irradiated uniformly with a sample which is relatively large in amount. After the irradiation in the beam irradiation container part, the airtight shutter 1 of the beam irradiation container part and the irradiated body are taken out and the airtight shutter 15 of the container part is connected; after shutters 1 and 15 of the both are opened, a manual rod 17 is operated to move a palette 2 containing the irradiated sample to the stabilization processing part and the airtight shutters 1 and 15 are closed. Thus, the stabilization processing is performed while the airtight state is maintained.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention is an air-blocking particle beam irradiation treatment device, that is, a particle beam irradiation treatment device that irradiates materials with relatively high heat resistance such as organic materials with electron beams and ion beams. For the purpose of causing physical, chemical, or biological changes, a relatively large amount of material is uniformly irradiated with a particle beam in a state where air is completely blocked, and heat treatment or chemical treatment is applied to the material, resulting in a stable state. It relates to a device that can be removed into the air after being exposed to air.

(Prior art) Conventionally, when irradiating an irradiated object with a particle beam such as an electron beam without exposing it to air, the method of setting the irradiated object in a vacuum and directly irradiating the beam, or The method used was to irradiate the object by placing it in an irradiation container with a thin film window that allows the beam to enter and allows air to be replaced. However, in these methods, the size of the object that can be uniformly irradiated is limited by the size of the beam irradiation field, so that the irradiation is limited to a small amount of material and a small area. Therefore, in the conventional method, it has not been possible to perform irradiation treatment for manufacturing a large amount of materials or evaluating materials over a large area by using beam irradiation. Also, when using conventional methods to irradiate materials that cannot withstand high temperatures, such as organic materials or living organisms, it is not possible to increase the beam output and shorten the irradiation time due to the heat generated by the beam irradiation. Ta.

(Problems to be Solved by the Invention) In view of the above, an object of the present invention is to provide a particle beam irradiation device that can uniformly irradiate a large amount of material or a large area of material in an air-blocked state.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides a beam irradiation container section for irradiating a particle beam onto an irradiated object in an airtight state, and a beam irradiation container part for irradiating a particle beam onto an irradiated object in an airtight state. A particle beam irradiation processing apparatus is constituted by a stabilization processing container section for carrying out chemical processing.

The beam irradiation container section is equipped with an airtight shutter that allows the object to be irradiated to be taken in and taken out and to keep the inside of the container airtight. A radiator is provided to cool the container itself and the object to be irradiated, and the stabilization processing container section is connected to an airtight shutter of the beam irradiation container section. An airtight shutter that can be connected in an airtight manner is provided, an operating means that allows the object to be irradiated to be moved from the outside is provided, and a water cooling section is provided adjacent to the airtight shutter.

Furthermore, it is often desirable in terms of the process to provide an irradiated object removal container section for temporarily storing the irradiated sample in an airtight state between the beam irradiation container section and the stabilization treatment container section.

The irradiation object extraction container section is provided with an airtight shutter that can be connected in an airtight manner to the airtight shutter of the beam irradiation container section and the airtight shutter of the stabilization processing container section, and is operable to move the irradiation object from the outside. means are provided.

(Function) To explain in more detail, in the apparatus of the present invention, the object to be irradiated, which is relatively unstable to heat, has a length of about 10 to 500 cm, a width of about 10 to 200 cm, and a maximum thickness of 50 cm.
Place it in a particle beam irradiation container with a size of m, and completely remove the air from I.
The particle beam is uniformly irradiated with this blocked state. This makes it possible to give the necessary dose in a way that does not cause thermal decomposition of the irradiated object during irradiation, and without exposing it to air after irradiation, by heating it to about 200 to 2000 degrees Celsius or introducing chemicals. By performing the chemical reaction treatment while oxidizing, it is possible to maintain a relatively stable state against oxidation.

Each component of the device of the invention will be described in further detail below.

Particle Beam Irradiation Container In order to uniformly irradiate a large-sized material to be irradiated, a mechanism is provided inside the air-blocked irradiation container to repeatedly drive the material to be irradiated in a direction perpendicular to the beam during beam irradiation. The particle beam is emitted through a beam entrance window attached to a portion of the container.

The object to be irradiated is cooled by passing or circulating an inert gas or gaseous reactive molecules through the container. Furthermore, in order to promote this cooling, a radiator through which a coolant such as water or liquid nitrogen is passed may be installed in the irradiation container.

In order to prevent heat generation in the container due to the beam penetrating the irradiated object or the beam directly hitting the irradiation container, a water-cooled plate was used to cool the container.

By using a gas cooling mechanism in conjunction with the drive mechanism for non-irradiated objects, beam irradiation becomes intermittent for the entire irradiated object.
Even if the beam output is increased, the temperature rise of the irradiated material due to beam heating can be suppressed. Therefore, a large amount of material can be irradiated in a relatively short time while preventing material decomposition due to heat.

Stabilization Treatment Container Part Since the material irradiated with the beam contains active species that cause chemical reactions, it may be necessary to perform stabilization treatment. For such materials, a stabilization treatment device is provided that can perform heat treatment or chemical reaction in an inert gas or vacuum. When heating or chemical reactions are carried out in this container, decomposition products or reaction products are produced, so a gas distribution system is installed to treat these products. Furthermore, in order to exclude oxygen, it is necessary to withstand vacuum, heat resistance, and chemical resistance. For heating, an electric heater is attached to the outside or inside of the container to control the temperature and temperature increase rate.

By providing this processing device, air oxidation of the irradiated object can be completely prevented, and it is extremely effective for manufacturing and evaluating materials.

Irradiated object removal container section In order to transfer the irradiated material to the stabilization treatment equipment for heat treatment or chemical reaction treatment, the irradiation object is removed from the irradiation container without being exposed to air and stabilized. Provide a container to be introduced into the device. This container is large enough to accommodate the object to be irradiated, has a door that blocks air, and has a mechanism for moving the material from the outside.

By providing this container, the material after irradiation can be held for a relatively long time, and the irradiation container can be designed and manufactured without using special materials such as heat resistance and chemical resistance.

The beam irradiation processing apparatus of the present invention can, for example, treat organic or inorganic polymers and fibers made of them with ionizing radiation to cause a crosslinking reaction, and perform infusibility treatment to produce ceramic coatings and fibers. It can also be used to evaluate the radiation resistance of polymer films or fiber-reinforced resins under conditions that do not involve oxidation.

(Example) In order to carry out radiation crosslinking of fine polymer fibers or relatively thin films of organic polymers and to evaluate the radiation resistance of these materials under conditions in which oxygen is not involved, the present invention was applied. A C-beam irradiation processing apparatus was manufactured according to the following.

1a and 1b are respectively a front view and a side sectional view of the beam irradiation container section in the beam irradiation processing apparatus of this embodiment, and FIG. 1c is a detailed view of the pallet drive mechanism in the beam irradiation processing apparatus. It is.

The beam irradiation container is equipped with an airtight shutter (size: 60 mm x
400ma+) 1 is provided. In this embodiment, two airtight shutters are provided, and two types of objects to be irradiated can be individually irradiated. Usually, the object to be irradiated is placed on a pallet 2 and placed in an irradiation container. A sample stage 3 on which a pallet 2 containing objects to be irradiated is placed is provided inside the irradiation container. The sample stage 3 also serves as a water cooling plate to suppress heat generation of the irradiated object. Further, a radiator 4 is provided in the upper part of the irradiation container to allow gas to flow therethrough and to cool the gas. In this way, the radiator 4 and the sample stage 3 which also serves as a water cooling plate can suppress the heat generation of the object to be irradiated due to beam irradiation and the heat generation of the irradiation container itself.

Further, the pallet 2 can be driven back and forth on the sample stage 3 while its speed is controlled by a drive mechanism 5. FIG. 1c omits the details of the drive mechanism 5, and as is not clear from the figure, the chain lO is driven by the drive motor 9. The chain IO is provided with two bars 11, and the bars 11 move the pallet 2 to the sample stage 3.
being slid over.

By alternately rotating the drive motor 9 in forward and reverse directions, the pallet 2 is moved back and forth.

Further, a beam irradiation window 6 provided with a metal thin film for airtightness is provided at the center of the upper surface of the irradiation container, and a particle beam is irradiated through this beam irradiation window 6. Furthermore, a vacuum exhaust valve 13 and a gas introduction valve 14 are provided to bring the inside of the container into a vacuum or air-blocking state.

Irradiation is carried out by loading a sample, closing the airtight shutter to deair it, and then passing liquid nitrogen through a radiator with an inert gas flowing through it, and driving the object back and forth to be irradiated.

As a result, a relatively large amount of sample can be uniformly irradiated.

FIGS. 2a and 2b are a front view and a side view, respectively, of the stabilization processing container section in the beam irradiation processing apparatus of this embodiment.

Similar to the beam irradiation container section, the stabilization processing container section includes:
An airtight shutter 15 for blocking air is provided to allow the irradiated object to be taken in and taken out. The airtight shutter 15 is connected to the airtight shutter 1 of the beam irradiation container section via a gasket so that the pallet can be moved into the stabilization processing container in an airtight state. Furthermore, the container has a structure that allows it to be inserted into a heating device as it is, and a water cooling section 16 is provided adjacent to the airtight shutter to protect the packing from high temperatures. Further, a manual rod 17 is provided at the rear of the container, which allows the pallet to be moved from outside the container.With this manual rod, the pallet can be moved while maintaining airtightness by operating from outside the container. Furthermore, a vacuum exhaust valve 18 and a gas introduction valve 19 are provided for creating a vacuum or air-blocking condition in the container and for removing reaction products or decomposition products.

When irradiation is completed in the beam irradiation container section, the airtight shutter 1 of the beam irradiation container section and the airtight shutter 15 of the irradiation object removal container section are connected via a gasket, and after opening both shutters, the manual rod 17 is opened. By operating the pallet containing the irradiated sample, the pallet containing the irradiated sample is moved to the stabilization processing container section, and the airtight shutter is closed. In this way, the stabilization process can be performed while maintaining airtightness.

3A and 3B are a front view and a side sectional view of a heating device for heat-treating the stabilization treatment container portion of FIGS. 3a and 3b; FIG. The stabilization treatment container shown in FIGS. 2a and 2b is inserted as is through the insertion port 21 provided on the front of the heating device @ 20, and heated to room temperature to 1200° C. in an airtight state by the heater 22.
It can be heated up to.

Figures 4a and 4b are a front view and a side view, respectively, of an embodiment of an optional irradiation object removal container section according to the present invention.

Similar to the beam irradiation container section and the stabilization processing container section, the irradiation object extraction container section is provided with an airtight shutter Z3 for blocking air for taking in and out the irradiation object.

The airtight shutter 23 is the airtight shutter 1 of the beam irradiation section.
It has been made possible to connect via Patsukin. The take-out container has a size that accommodates the pallet. Further, a manual rod 24 is provided at the rear of the container to allow the pallet to be moved from outside the container, and this manual rod allows the pallet to be moved while maintaining airtightness by operating from outside the container. Furthermore, a vacuum exhaust valve 25 and a gas introduction valve 26 are provided to bring the inside of the container into a vacuum or air-blocking state.

When irradiation is completed in the beam irradiation container section, the airtight shutter of the beam irradiation container section and the airtight shutter of the irradiation object removal container section are connected via a gasket, and after opening both shutters, the manual rod 24 is operated. As a result, the pallet containing the irradiated sample is removed and moved into the container, and the airtight shutter is closed. In this way, the irradiated sample can be temporarily taken out and held while maintaining airtightness.

(Effects of the Invention) As described above, according to the beam irradiation processing apparatus of the present invention, it is possible to uniformly irradiate a large amount of material or a large area of material in an air-blocked state. Furthermore, by using both the drive and cooling mechanism for the object to be irradiated, heat generation due to beam irradiation is prevented, so the beam output can be increased and the irradiation time can be shortened, which is extremely effective.

[Brief explanation of the drawing]

1a and 1b are respectively a front view and a side sectional view of a beam irradiation container section in a beam irradiation processing apparatus according to an embodiment of the present invention, and FIG. 1c is a FIG. 2A is a detailed view of a pallet drive mechanism in a beam irradiation container section, and FIG. 2A and FIG. , FIGS. 3a and 3b are a front view and a side sectional view, respectively, of a heating device for heat-treating the stabilization treatment container portion shown in FIGS. 2a and 2b, and FIG. and FIG. 4b are a front view and a side view, respectively, of the irradiation object take-out container section in one embodiment of the apparatus of the present invention. 1, Is, 23--airtight shutter 2-m-pallet, 3-m-sample stage, 4--radiator 5-
-1 drive mechanism, 6-m-irradiation window, 9--1 drive motor IO---chain, 11-11 bar H, 1J25
---Vacuum exhaust valve, 19.26--Gas introduction valve, 17.24-m
- Manual rod, 16---Water cooling section, 20-m-Heating device,
21-m-insertion port, 22--1 heater patent applicant Japan Atomic Energy Research Institute (4 others) 2nd rho concave

Claims (1)

[Claims] 1. An airtight shutter is provided to allow the object to be irradiated to be taken out and taken out and to keep the inside of the container airtight. and can be driven back and forth in the vertical direction,
a beam irradiation container section for irradiating the object to be irradiated with a particle beam in an airtight state, in which a radiator for cooling the container itself and the object to be irradiated is disposed, and an airtight shutter of the beam irradiation container section and A connectable airtight shutter is provided, an operating means for moving the irradiated object from the outside is provided, and a water cooling section is provided in proximity to the airtight shutter, so that the irradiated object is kept in an airtight state. A beam irradiation processing device comprising: a stabilization processing container section for stabilization processing; 2. An airtight shutter that can be airtightly connected to the airtight shutter of the beam irradiation container section and the airtight shutter of the stabilization processing container section is provided, and an operating means that can move the object to be irradiated from the outside is provided. The apparatus according to claim 1, further comprising an irradiated object removal container section for temporarily storing the irradiated sample in an airtight state.