JPH0448630U - - Google Patents
Info
- Publication number
- JPH0448630U JPH0448630U JP8992490U JP8992490U JPH0448630U JP H0448630 U JPH0448630 U JP H0448630U JP 8992490 U JP8992490 U JP 8992490U JP 8992490 U JP8992490 U JP 8992490U JP H0448630 U JPH0448630 U JP H0448630U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- holding device
- working arm
- holder
- card holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 14
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案のプローブカード保持装置の分
解断面図、第２図は本考案のプローブカード保持
装置を構成するスプリングポストの側断面図、第
３図Ａ，Ｂは本考案のプローブカード保持装置の
動作を説明するための分解断面図、第４図は第３
図Ａの動作を説明するためのスプリングポストの
側断面図、第５図は従来のプローブカードの取り
付けのようすを示すウエハープローバの構成断面
図である。
２１……プローブカード、４０……スプリング
ポスト、４１……作用腕、４２……分割溝、４３
……外向突縁、５０……係止穴。
Fig. 1 is an exploded cross-sectional view of the probe card holding device of the present invention, Fig. 2 is a side cross-sectional view of a spring post that constitutes the probe card holding device of the present invention, and Fig. 3 A and B are probe card holding devices of the present invention. An exploded cross-sectional view for explaining the operation of the device, Figure 4 is the third
FIG. 5 is a sectional side view of a spring post for explaining the operation of FIG. A, and FIG. 5 is a sectional view of a wafer prober structure showing how a conventional probe card is attached. 21...Probe card, 40...Spring post, 41...Working arm, 42...Division groove, 43
...Outward protrusion, 50...Lock hole.
Claims (1)
にホルダーにプローブカードを一時的に保持する
プローブカード保持装置であつて、 前記プローブカードに、先端から垂設方向に分
割されてばね弾性が付与された作用腕と、この作
用腕の先端に外向突縁とを有するスプリングポス
トを設け、 前記ホルダーに設けられた係止穴に前記スプリ
ングポストの作用腕をばね弾性に抗して挿入し、
前記外向突縁を係合することを特徴としたプロー
ブカード保持装置。[Claims for Utility Model Registration] A probe card holding device that temporarily holds a probe card in a holder when the probe card is fixed to the holder when the probe card is attached or removed, the probe card holding device having a probe card that is divided in the vertical direction from the tip of the probe card. A spring post having a working arm imparted with spring elasticity and an outwardly directed edge at the tip of the working arm is provided, and the working arm of the spring post is inserted into a locking hole provided in the holder against the spring elasticity. Insert
A probe card holding device, characterized in that the probe card holding device engages the outward projecting edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8992490U JPH0448630U (en) | 1990-08-28 | 1990-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8992490U JPH0448630U (en) | 1990-08-28 | 1990-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448630U true JPH0448630U (en) | 1992-04-24 |
Family
ID=31824251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8992490U Pending JPH0448630U (en) | 1990-08-28 | 1990-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448630U (en) |
-
1990
- 1990-08-28 JP JP8992490U patent/JPH0448630U/ja active Pending
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