JPH0449853U - - Google Patents
Info
- Publication number
- JPH0449853U JPH0449853U JP9179890U JP9179890U JPH0449853U JP H0449853 U JPH0449853 U JP H0449853U JP 9179890 U JP9179890 U JP 9179890U JP 9179890 U JP9179890 U JP 9179890U JP H0449853 U JPH0449853 U JP H0449853U
- Authority
- JP
- Japan
- Prior art keywords
- rail
- ball
- inspected
- shaped member
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011179 visual inspection Methods 0.000 claims description 3
- 238000007373 indentation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Description
第１図は、本考案の１実施例に係わる２次元ピ
ツチ移動式目視検査装置の外観を示す斜視図、第
２図は、第１図の装置に用いられているＸレール
およびＸテーブルの構造を示す部分断面説明図、
そして、第３図は、第１図の装置に用いられてい
るＹレールおよびＹテーブルの構造を示す部分断
面説明図である。
１……Ｘレール、１ａ，１ｂ……レール部材、
３……Ｘテーブル、５……Ｙレール、７……Ｙテ
ーブル、９……基板台、１１，１３……管状部材
、１５，１７……角形部材、１９……実体顕微鏡
、２１……顕微鏡台、２３……棒状部材、２５…
…観察穴、２７，３５……くぼみ、２９，３７…
…ボール状部材、３１，３９……バネ、３３，４
１……収納穴。
FIG. 1 is a perspective view showing the appearance of a two-dimensional pitch moving visual inspection device according to an embodiment of the present invention, and FIG. 2 is a structure of the X-rail and X-table used in the device shown in FIG. A partial cross-sectional explanatory diagram showing
FIG. 3 is a partial cross-sectional explanatory diagram showing the structure of the Y rail and Y table used in the apparatus of FIG. 1. 1...X rail, 1a, 1b...rail member,
3...X table, 5...Y rail, 7...Y table, 9...substrate stand, 11, 13... tubular member, 15, 17... square member, 19... stereoscopic microscope, 21... microscope Base, 23... Rod-shaped member, 25...
...Observation hole, 27,35...Indentation, 29,37...
... Ball-shaped member, 31, 39 ... Spring, 33, 4
1...Storage hole.
Claims (1)
検査するための２次元ピツチ移動式目視検査装置
であつて、 一方向に沿つて配設され長さ方向に沿つて所定
間隔でくぼみを有する第１のレール手段と、 該第１のレール手段に沿つて移動可能であり、
かつ該第１のレール手段の前記くぼみに浅くはま
り込むボール状部材と該ボール状部材を前記くぼ
みに押圧するバネ手段とを備えた第１のテーブル
手段と、 前記第１のレール手段と異なる方向に前記第１
のテーブル手段に取付けられかつ長さ方向に沿つ
て所定間隔でくぼみを有する第２のレール手段と
、 前記被検査物を載置および前記第２のレールに
沿つて移動可能であり、かつ前記第２のレール手
段の前記くぼみに浅くはまり込むボール状部材と
該ボール状部材を前記くぼみに押圧するバネ手段
とを備えた第２のテーブル手段と、 該第２のテーブル手段に載置された被検査物を
観察可能な顕微鏡手段と、 を具備し、前記第２のテーブル手段に載置された
被検査物を前記第１および第２のレール手段に設
けられたくぼみにより規定されるピツチごとに２
次元的に移動可能としたことを特徴とする２次元
ピツチ移動式目視検査装置。[Claims for Utility Model Registration] A two-dimensional pitch moving visual inspection device for moving an object to be inspected two-dimensionally and visually inspecting one side of the object, which is disposed along one direction and extends in the longitudinal direction. a first rail means having indentations at predetermined intervals along the first rail means; movable along the first rail means;
and a first table means including a ball-shaped member that fits shallowly into the recess of the first rail means and a spring means that presses the ball-shaped member into the recess; said first
a second rail means attached to the table means and having recesses at predetermined intervals along the length thereof; and a second rail means on which the object to be inspected can be placed and moved along the second rail; a second table means comprising a ball-shaped member that fits shallowly into the recess of the second rail means and a spring means that presses the ball-shaped member into the recess; a microscope means capable of observing an object to be inspected; and a microscope means capable of observing an object to be inspected; 2
A two-dimensional pitch movable visual inspection device characterized by being dimensionally movable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9179890U JPH0449853U (en) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9179890U JPH0449853U (en) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0449853U true JPH0449853U (en) | 1992-04-27 |
Family
ID=31827748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9179890U Pending JPH0449853U (en) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449853U (en) |
-
1990
- 1990-08-31 JP JP9179890U patent/JPH0449853U/ja active Pending
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