JPH0450394U - - Google Patents
Info
- Publication number
- JPH0450394U JPH0450394U JP9183690U JP9183690U JPH0450394U JP H0450394 U JPH0450394 U JP H0450394U JP 9183690 U JP9183690 U JP 9183690U JP 9183690 U JP9183690 U JP 9183690U JP H0450394 U JPH0450394 U JP H0450394U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- column
- lower flange
- heat treatment
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
Landscapes
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Charging Or Discharging (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Description
第１図は本考案ボートの一実施例を使用した縦
型熱処理装置の一例の構成を示す縦断面図、第２
図は本考案ボートの一実施例の構成を示す斜視図
、第３図ａ，ｂはそれぞれ本考案ボートの他の実
施例の構成を示す斜視図、第４図は従来ボートを
使用した縦型熱処理装置の一例の構成を示す縦断
面図、第５図は従来ボートの一例の構成を示す斜
視図である。
１……ヒータ、２……アウターチユーブ（反応
管）、３……インナーチユーブ（反応管）、４…
…本考案ボート、５……ウエーハ、６……キヤツ
プ、１１……ガス導入ノズル、１２……真空引き
口、１３……ガス導入口、１６……ウエーハ保持
溝、１７……柱、１８……上方フランジ部、１９
……下方フランジ部、２０……ガス流れ抵抗とな
る（中間）フランジ部。
Fig. 1 is a vertical sectional view showing the configuration of an example of a vertical heat treatment apparatus using an embodiment of the boat of the present invention;
The figure is a perspective view showing the configuration of one embodiment of the boat of the present invention, Figures 3a and 3b are perspective views showing the configuration of other embodiments of the boat of the present invention, and Figure 4 is a vertical type using a conventional boat. FIG. 5 is a longitudinal sectional view showing the structure of an example of a heat treatment apparatus, and FIG. 5 is a perspective view showing the structure of an example of a conventional boat. 1... Heater, 2... Outer tube (reaction tube), 3... Inner tube (reaction tube), 4...
... Boat of the present invention, 5 ... Wafer, 6 ... Cap, 11 ... Gas introduction nozzle, 12 ... Vacuum suction port, 13 ... Gas introduction port, 16 ... Wafer holding groove, 17 ... Pillar, 18 ... ...Upper flange section, 19
... lower flange portion, 20 ... (middle) flange portion that acts as gas flow resistance.
Claims (1)
置されるウエーハ保持溝１６を有する柱１７と、
この柱１７の上、下方フランジ部１８，１９とよ
りなるボートにおいて、上、下方フランジ部１８
，１９間の途中の柱部分に少なくとも１枚のガス
流れ抵抗となるフランジ部２０を設けてなる縦型
熱処理装置用ボート。 (2) 下方フランジ部１９に代えて柱１７の下部
にキヤツプ６を一体に設けてなる請求項第１記載
の縦型熱処理装置用ボート。[Claims for Utility Model Registration] (1) A pillar 17 used in a vertical heat treatment apparatus and having a wafer holding groove 16 on which a wafer 5 is placed;
In a boat consisting of the upper and lower flange parts 18 and 19 of this column 17, the upper and lower flange parts 18
, 19 is provided with at least one flange portion 20 serving as a gas flow resistance at a column portion midway between the columns. (2) A boat for a vertical heat treatment apparatus according to claim 1, wherein a cap 6 is integrally provided at the lower part of the column 17 in place of the lower flange portion 19.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9183690U JPH0450394U (en) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9183690U JPH0450394U (en) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0450394U true JPH0450394U (en) | 1992-04-28 |
Family
ID=31827813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9183690U Pending JPH0450394U (en) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450394U (en) |
-
1990
- 1990-08-31 JP JP9183690U patent/JPH0450394U/ja active Pending