JPH0450562A - Cylinder main valve emergency shutoff device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a cylinder main valve emergency shutoff device, and more particularly to a cylinder main valve emergency shutoff device for closing the main valve of a cylinder storing harmful gas.

Conventional technology For example, semiconductor material gases used in the semiconductor manufacturing process may be highly toxic or strong, flammable, self-combustible, combustible, or have a combination of these properties. Is there something like that?

For this reason, cylinders that store these harmful gases are stored in cylinder storage boxes equipped with exhaust ducts, and a main valve is installed on the top of the cylinder to open and close the cylinder to supply the gas inside the cylinder to the outside. was. For this reason, a cylinder main valve emergency shutoff device is being developed that automatically closes the main valve for opening and closing the cylinder as described above by remote control.

The conventional cylinder main valve emergency shutoff device that closes the cylinder main valve in this way has an actuator installed above the cylinder main valve, and when the valve close switch is operated, an operation signal is supplied to the actuator to close the main valve. It was designed to be operated by a valve. Further, the drive shaft of the actuator was provided with a chuck that was coupled to the outer periphery of the operating handle of the main valve.

Problems to be Solved by the Invention In the cylinder main valve emergency shutoff device configured as described above, for example, the chuck connected to the drive shaft of the actuator is connected to the operating handle of the main valve so as to correspond to the operating position of the actuator or the open/closed state of the main valve. It was combined with However, if the fastening of the chuck to the operating handle becomes loose, the chuck may slip around the outer periphery of the operating handle, resulting in transmission loss.

In such a case, the main valve does not open or close normally in response to actuator operation, for example, if the actuator moves to the closed position even though the main valve is not closed, it will appear as if the main valve had closed. The closed position of the valve is detected.

Therefore, conventionally, the operating procedure when replacing a cylinder with a new one was to attach a chuck to the handle of the main valve attached to the top of the cylinder, and then press the valve open switch on the control box to temporarily open the main valve. It was decided to open the valve and then press the valve close switch to close the main valve.

In this way, conventionally, as a chuck attachment confirmation operation after cylinder replacement, the open/close switch for normally opening and closing the main valve was operated to open and then close the main valve.

If the chuck is insufficiently tightened to the handle of the main valve, the chuck will idle around the outer periphery of the handle after the main valve is closed. Also, if the positioning is not correct when connecting the chuck to the handle, the actuator's valve-closing position and the original valve's closing position may be misaligned, and the main valve may close before the actuator reaches the valve-closing position. Or, the actuator may stop mid-operation even though the main valve is closed.

However, when operating the intermediate valve after opening the main valve as in the past, not only is the gas in the cylinder leaked into the secondary piping and wasted, but the operator who installed the cylinder has to open and close the valve. It is troublesome to confirm that the chuck is installed because the valves have to be operated individually, and furthermore, since the normally used open and close valve switches are also used, it is easy to forget to check that the chuck is installed after replacing the cylinder.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a cylinder main valve emergency shutoff device that solves the above problems.

Means for Solving the Problems The present invention has an actuator that connects a chuck to the handle of a main valve of a cylinder filled with gas and drives the chuck in the closing direction of the main valve by operating a valve closing switch. A cylinder main valve emergency shutoff device comprising: a chuck attachment confirmation switch that is operated after the chuck is coupled to the handle of the main valve; and a signal from the chuck attachment confirmation switch that drives the actuator to close the valve; A chuck attachment confirmation means is provided for confirming that the valve-closing position of the actuator matches the valve-closing position of the original valve.

When replacing the action cylinder, after connecting the chuck to the handle of the main valve, by operating the chuck installation confirmation switch to check the chuck installation status, the actuator is automatically driven in the valve closing direction, and the actuator closes. You can check whether the operating position matches the valve closing position of the valve source.

Embodiment FIGS. 1 and 2 show an embodiment of the cylinder main valve emergency shutoff device according to the present invention.

In both figures, for example, a cylinder 1 is filled with a highly concentrated semiconductor material gas. The cylinders 1 are stored in a cylinder storage box 2 while being kept vertically at a predetermined distance from each other. A main valve 3 is attached to the top of the cylinder 1. The main valve 3 has an operating handle 3a on its upper part for opening and closing operations. Therefore, the main valve 3 is the operating handle 3a.
The valve opening degree is adjusted by rotating the valve. For this reason,
Gas flows out from the cylinder 1 at a flow rate corresponding to the opening degree of the main valve 3 and is supplied to the outside of the cylinder storage box 2 via a pipe 4 connected to the main valve 3 in communication.

The operating angle range of the operating handle 3a from the fully open position to the fully closed position of the main valve 3 is, for example, 1600 degrees.

5 is an actuator, which is attached to the top plate 2 of the cylinder storage box 2.
It is arranged on the upper surface of a, and is located at a position separated from Bonn/\l. A drive shaft 6 of the actuator 5 passes through the top plate 2a and projects into the cylinder storage box 2. Also,
The drive shaft 6 is connected to a universal joint 7.

Reference numeral 8 denotes a chuck, which is connected to the outer periphery of the operating handle 3a of the main valve 3. Also, a shaft 8a protruding from the top of the chuck 8
is connected to the universal joint 7.

Therefore, the drive shaft 6 of the actuator 5 is connected to the universal joint 7.
It is connected to the chuck 8 via.

Reference numeral 9 denotes an operating device, which is provided at a position away from the cylinder storage box 2, and includes open and close valve switches 9a and 9b that supply opening/closing signals for opening and closing the main valve 3 to the actuator 5.
and an emergency cutoff switch 9c.

It has a chuck attachment confirmation switch 9d. IO is an air pipe that supplies compressed air to the actuator 5 to rotate the drive shaft 6 of the actuator 5.

As shown in FIG. 2, an elastic member 11 made of rubber or the like is provided on the inner periphery of the chuck 8. Further, as will be described later, when connecting the chuck 8 to the operating knob 3a of the main valve 3 when replacing the cylinder, the pair of flexible portions 8b are displaced inward by tightening the screws 12 to tighten the elastic member 11. It bites into the outer peripheral recess of the operating knob 3a. At this time, the main valve 3 is in a closed state, and the actuator 5 is also operated to close accordingly.

An upper end 6a of a drive shaft 6 protrudes from the top of the actuator 5. In addition, a drive shaft 6 is provided at the top of the actuator 5.
A detection mechanism 16 is provided to detect the rotational position of.

The upper end 6a of the drive shaft 6 is provided with four cams 13a to 13d. Further, at the top of the actuator 5, there are switches 14a to 14d facing the four cams 1.3a to 13d.
Or is provided. Each cam 13a provided on the drive shaft 6
-13d are each switch 14a according to the rotational position of the drive shaft 6 in order to detect the open/close state of the main valve 3 when opening/closing the main valve 3.
~14d is closed.

Therefore, the cams 13a to 13d and the switches 14a to],
4d constitutes the detection mechanism 16.

Reference numeral 17 denotes a control circuit, which is connected to the operating device 9 and serves as a chuck attachment confirmation means 1 for confirming the chuck attachment position as described later by operating the chuck attachment confirmation switch 9d.
It has 7A. Reference numeral 18 denotes an alarm, which is connected to the control circuit 17 and issues an alarm when the chuck is improperly attached, as will be described later.

As shown in FIG. 3, the switches 14a to 14d are connected to indicator lamps 15a to 15d provided in the central control room, actuator 5, etc., respectively. Therefore, as will be described later, when the switches 14a to 14d are closed, the indicator lamps 15a to 15d light up to provide an indication.

As shown in FIG. 4(A), the switch 14a is a switch for detecting the valve closed position. Cam 13a is switch 14a
20° from a position 160° from the fully open position.
It has a cam portion 13a1 that protrudes within a range of 0. Therefore, as shown in the diagram I in FIG.
aI contacts the contact piece 14a+, closing the switch 14a.

As shown in FIG. 4(B), the switch 14b is connected to the chuck 8.
This is a switch that detects the proper connection position when the valve is attached to the operating handle 3a in the valve closed position.

The cam 13b faces the switch 14b, and the cam portion 1 protrudes within a range of 5° from a position 165° from the fully open position.
3b. Therefore, as shown in the diagram (■) in FIG. 5, when the drive shaft 6 is rotated to a position of 165 to 170 degrees from the fully open position, the cam portion 13b comes into contact with the contact piece 14bl, closing the switch 14b. do.

As shown in FIG. 4(C), the switch 14c is a switch that detects that the drive shaft 6 has rotated excessively beyond the valve closing position. The cam 13c faces the switch 14c, and has a cam portion 13C1 that projects within a range of 5° from a position 175° from the fully open position. For this reason, in Figure 5,
As shown in the diagram ■, the drive shaft 6 is 175 to 1 from the fully open position.
When rotated to the 800 position, the cam portion 13c+ contacts the contact piece 14.
C1 and closes the switch 14c.

As shown in FIG. 4(D), the switch 14d is a switch that detects that the main valve 3 is fully open. cam 13d
has a cam portion 13d that faces the switch 14d and projects within a range of 5° from the fully open position. Therefore, as shown in the diagram (■) in FIG. 5, when the drive shaft 6 rotates from the fully open position to a position of θ~5°, the cam portion 13d comes into contact with the contact piece 14d, closing the switch 14d. to be accomplished.

Here, when opening and closing the main valve 3 of the normal cylinder 1, first, the open and close valve switches 9a and 9b of the operating device 9 are operated to supply an operation signal to the actuator 5. As a result, the solenoid 5 for opening and closing the solenoid valve connected to the air pipe 10
Either a or 5b works.

Then, compressed air from the air pipe IO is introduced into the cylinder portion of the actuator 5 to displace a piston (not shown). In this way, the actuator 5 operates and the drive shaft 6 is driven. The rotational driving force of the drive shaft 6 is transmitted to the chuck 8 via the universal joint 7. That is, the operating handle 3a of the main valve 3 is driven by the actuator 5 and rotates to open and close the main valve 3.

Next, a case will be described in which the main valve 3 is in the fully open state and the actuator 5 is operated from the valve opening position to the valve closing position. When the valve closing switch 9b of the operating device 9 is operated to supply a valve closing signal to the actuator 5, the drive shaft 6 is rotationally driven in the valve closing direction. When the drive shaft 6 rotates 1600 revolutions from the fully open position, the main valve 3 closes and the cam 13a closes the switch 14a that detects the valve closed position. When the switch 14a is closed, the valve closing position indicator lamp 15a lights up. After a predetermined period of time has passed after the switch 14a is closed, the power to the valve closing solenoid 5b is cut off, and the actuator 5 is turned off.
stops. Also, the appropriate position after closing the actuator 5 or main valve 3 (165 to 170 degrees from the valve opening position)
When the valve has been operated up to this point, the proper coupling position detection switch 14b or the cam 13b closes together with the valve closing position indicator lamp 15a, and the indicator lamp 15b lights up. Therefore, it can be determined by the lighting of the indicator lamps 15a and 15b whether the actuator 5 has been operated to the proper position.

Next, the operation for checking the chuck attachment position when replacing a cylinder will be explained.

A new cylinder l is attached to cylinder storage box 2,
When the chuck 8 is connected to the operation handle 3a of the main valve 3 as described above, the flexible part 8b of the chuck 8 may be weakly tightened and the connection may be insufficient, or the operating positions of the actuator 5 and the main valve 3 may not match. Operate the chuck 8 with the handle 3a
Be sure to check the chuck mounting position after replacing the cylinder.

Therefore, the operator presses the chuck attachment confirmation switch 9d of the operating device 9 after replacing the cylinder. Since the operating device 9 has a dedicated switch 9d for checking the chuck attachment state, the operator only has to press the chuck attachment confirmation switch 9d, simplifying the operation.

In this way, when the chuck attachment confirmation switch 9d is pressed, the control circuit 17 executes the process shown in FIG. 6.

In FIG. 6, when an operation signal is output from the chuck installation confirmation switch 9d in step Sl (hereinafter steps will be omitted), the process moves to S2 and it is confirmed that the valve closing position detection switch 14a is turned on. .

When the chuck 8 is connected to the operating handle 3a by the correct mounting method, the main valve 3 is in a closed state, and the actuator 5 is also in a closed state. In that case,
The cam part 13a1 of the cam 13a of the detection mechanism 16 provided on the upper part of the actuator 5 or the contact piece 14 of the switch 14a
a, and closes the switch 14a.

Next, it is confirmed that the switch l4b for detecting the proper coupling position of the chuck 8 is turned on (S3).
. This confirms that the seal of the valve body is in sufficient contact with the seat portion of the main valve 3.

In addition, the above S2. Switch 14a in S3.

When the actuator 14b is closed by the cams 13a, 13b, the indicator lamps 15a, 15b light up, allowing the operator to check the operating state of the actuator 5.

In the next step 84, the valve closing solenoid 5b is energized to cause the actuator 5 to perform a valve closing operation. That is, the actuator 5 is driven by compressed air from the air pipe 1o to the drive shaft 6. A rotational driving force in the valve closing direction is applied to the chuck 8 via the universal joint 7. At this time, if the chuck 8 is securely connected to the operating handle 3a of the main valve 3, the operating handle 3a cannot be rotated in the valve closing direction, and the comer 3c does not come into contact with the over-rotation detection switch 14c. Therefore, if the chuck 8 is securely connected to the operating handle 3a, the chuck 8 will not slip on the operating handle 3a even if the rotational driving force of the actuator 5 in the valve closing direction is applied. Therefore,
During opening and closing operations, the driving force of the actuator 5 is transmitted to the operating handle 3a without any transmission loss. In this case, the operator can easily check because the indicator lamp 15d indicating over-speed is not lit, but the indicator lamp 15a for indicating the valve closed position and the indicator lamp 15b for indicating the proper coupling position are lit.

However, when connecting the chuck 8 to the operating handle 3a, if the actuator 5 is not in the closed state and the piston of the actuator 5 is located halfway between the valve open position and the valve closed position, the main valve 3 may be fully opened. I can't do anything. In such a case, since the switch 4a for validating the valve closing position is in the OFF state in S2, the process moves to S6, and the alarm 18 issues an alarm indicating that the chuck is improperly attached. Therefore, the operator can know that there is some kind of problem with the installation of the chuck 8, and since the indicator lamp 15a for indicating the valve closing position is off, the operating position of the actuator 5 or the main valve 3 can be detected. It turns out that there isn't. Therefore,
The operator reinstalls the chuck 8, closes the actuator 5, and then moves the chuck 8 to the operating handle 3a.
be combined with

In addition, in S3, the switch 14b for detecting the proper position of coupling
When the valve is in the OFF state, the piston of the actuator 5 is slightly shifted toward the valve opening side even if the indicator lamp 15a for indicating the valve closing position is lit.

In this case as well, S6. The process of S7 is executed, and the operator confirms this by turning off the alarm 18 and the display lamp 15b for displaying the proper joining position. Therefore, the operator immediately reattachs the chuck 8.

If the screw 12 that tightens the flexible portion 8a of the chuck 8 is loosened in S5, the chuck 8 will not be fully connected to the operating handle 3a. That is, the elastic member 11 slips on the outer periphery of the operating handle 3a, and the rotational driving force from the drive shaft 6 is not sufficiently transmitted to the operating handle 3a, resulting in a transmission loss.

Therefore, while the actuator 5 is being driven to close the valve by the air supply from the valve-closing solenoid 5b, the chuck 8 or the outer circumference of the operating handle 3a slips, and even though the main valve 3 is closed, The valve is further driven to close beyond the predetermined valve closing position. When the drive shaft 6 of the actuator 5 is further driven to close the valve and exceeds a position 170 degrees from the valve open position, the indicator lamp 15b goes out and only the indicator lamp 15a lights up.

Then, the actuator 5 is 170 to 17 from the valve open position.
If the engine does not stop at the 5° position, both the indicator lamp 15a indicating the valve closed position and the indicator lamp 15c indicating over-rotation are lit.

That is, when the drive shaft 6 rotates to a position of 175 to 180 degrees from the valve open position, the cam 13c closes the switch 14c that detects over-rotation, and the indicator lamp 15c displays this.
or lights up.

Therefore, when the over-speed detection switch 14c is on in S5, S6. The process of S7 is executed and an alarm is issued. Therefore, the operator can tell whether the actuator 5 or the drive shaft 6 is being rotated excessively by the warning and lighting of the over-rotation indicator lamp 15c. Therefore, the operator can quickly determine the cause of the problem by turning on the indicator lamp 15c and reattach the chuck 8.

That is, it can be easily known by the lighting of the indicator lamp 15c that the device is not operating normally. For this reason,
Even if some kind of failure occurs, it can be detected immediately and repairs can be made promptly.

In this way, by checking the operating state of the actuator 5 without opening the main valve 3, it is possible to confirm that the main valve 3 is opened and closed normally, so the gas in the cylinder l does not leak out. This is advantageous in terms of safety management and can further improve the reliability of the device.

In the above embodiment, when the operator presses the chuck attachment confirmation switch 9d, the control circuit 7 performs the chuck attachment confirmation operation shown in FIG. Valve close switch 9
The actuator 5 may close the valve by the same circuit operation as when pressing b.

Effects of the Invention As mentioned above, the cylinder main valve emergency shutoff device according to the present invention has the following features:
For example, when replacing the cylinder with a new cylinder and connecting the chuck to the operating handle of the original valve, simply operating the chuck installation confirmation switch, which is provided separately from the valve closing switch, will automatically drive the actuator in the valve closing direction. Since the operating state of the actuator can be checked by checking the operating condition of the actuator, it is possible to easily check, for example, whether or not the chuck installation work has been performed correctly after replacing the cylinder. In other words, if the actuator rotates excessively after replacing the cylinder, it may slip against the chuck or handle, or it may be found that the actuator's operation does not correspond to the main valve. In this case, investigate the cause and promptly install the valve. Necessary measures such as redoing the work can be taken. Moreover, since the chuck attachment confirmation operation after cylinder replacement is performed by simply driving the actuator to close without opening the main valve, it is possible to prevent the gas in the cylinder from flowing out unnecessarily. Therefore, when replacing a cylinder filled with existing gas, there is no risk of gas leakage, which is advantageous in terms of safety management.

[Brief explanation of drawings]

Fig. 1 is a schematic configuration diagram for explaining one embodiment of the cylinder main valve emergency shutoff device according to the present invention, and Fig. 2 shows a detection mechanism for detecting the operating position of the actuator and a combination of the actuator and the cylinder main valve. Figure 3 is a circuit diagram of each switch and each indicator lamp, Figure 4 is an enlarged diagram to explain the parts that
Figure (A) is a plan view of the limit switch and cam that detect the valve closing position, and Figure 4 (B) is the limit switch that detects the proper position when the actuator drive shaft is connected to the operating handle of the main valve. Fig. 4 (C) is a plan view of the limit switch and cam that detect over-rotation of the drive shaft, and Fig. 4 (D) is a plan view of the limit switch and cam that detects the valve open position. 5 is a diagram for explaining the operation of each limit switch according to the rotation angle of the drive shaft, and FIG. 6 is a flowchart for explaining the process executed by the control circuit after cylinder replacement. 1... Cylinder, 3... Main valve, 5... Actuator, 8... Chuck, 91 Operator, 9d... Chuck installation confirmation switch, 13 a-13d... Cam, 1
4a to 14d... Switch, 15a to 15d... Display lamp, 16... Detection mechanism, 17... Control circuit,
17A... Chuck installation confirmation means, 18... Alarm. Figure 2

Claims (1)

[Scope of Claims] A cylinder base comprising an actuator that connects a chuck to the handle of a main valve of a cylinder filled with gas and drives the chuck in the closing direction of the main valve by operating a valve-closing switch. In the valve emergency shutoff device, a chuck attachment confirmation switch that is operated after coupling the chuck to the handle of the main valve and a signal from the chuck attachment confirmation switch drive the actuator to close the valve, and the actuator closes the valve. A cylinder main valve emergency shutoff device, characterized in that it comprises chuck attachment confirmation means for confirming that the operating position matches the closing position of the main valve.