JPH0451131U - - Google Patents
Info
- Publication number
- JPH0451131U JPH0451131U JP9233790U JP9233790U JPH0451131U JP H0451131 U JPH0451131 U JP H0451131U JP 9233790 U JP9233790 U JP 9233790U JP 9233790 U JP9233790 U JP 9233790U JP H0451131 U JPH0451131 U JP H0451131U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- semiconductor materials
- air filter
- air
- drying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
第１図は本考案の一例による半導体材料用乾燥
装置を示す概略立面図、第２図は第１図の線Ａ−
Ａに沿つて取つた断面図、そして第３図は従来の
半導体材料用乾燥装置を示す縦断面図である。
１……ロータ、１０……クリーンユニツト、１
１……うず巻状通路、１４……エアヒータ、１５
，１６……エアフイルター。
FIG. 1 is a schematic elevational view showing a semiconductor material drying apparatus according to an example of the present invention, and FIG. 2 is a line A--
A is a sectional view taken along line A, and FIG. 3 is a longitudinal sectional view showing a conventional semiconductor material drying apparatus. 1... Rotor, 10... Clean unit, 1
1... spiral passage, 14... air heater, 15
, 16...Air filter.
Claims (1)
方にエアフイルターからなるクリーンユニツトが
備えられる半導体材料用乾燥装置において、 前記クリーンユニツトは上部のうず巻状の通路
とその下に在るエアフイルターからなり、前記ロ
ータ内に吸入される空気は前記うず巻状の通路を
通り前記エアフイルターを介して前記ロータに流
入するように構成され、さらに前記うず巻状の通
路内にはエアヒータが設置されていることを特徴
とする半導体材料用乾燥装置。[Claims for Utility Model Registration] A drying device for semiconductor materials that is equipped with a clean unit consisting of an air filter above a rotor on which semiconductor materials to be dried are placed, the clean unit having an upper spiral passage and a an underlying air filter configured such that air drawn into the rotor passes through the spiral passageway and flows into the rotor through the air filter; A drying device for semiconductor materials, characterized in that an air heater is installed therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9233790U JPH0451131U (en) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9233790U JPH0451131U (en) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451131U true JPH0451131U (en) | 1992-04-30 |
Family
ID=31828705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9233790U Pending JPH0451131U (en) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451131U (en) |
-
1990
- 1990-08-31 JP JP9233790U patent/JPH0451131U/ja active Pending
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