JPH0451140U - - Google Patents
Info
- Publication number
- JPH0451140U JPH0451140U JP9295990U JP9295990U JPH0451140U JP H0451140 U JPH0451140 U JP H0451140U JP 9295990 U JP9295990 U JP 9295990U JP 9295990 U JP9295990 U JP 9295990U JP H0451140 U JPH0451140 U JP H0451140U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- elastic body
- protective sheet
- processed side
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000002390 adhesive tape Substances 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 claims 1
Landscapes
- Dicing (AREA)
Description
第１図は本考案のブレイク装置の一実施例の縦
断側面図、第２図は同じく一実施例の装置要部の
縦断側面図、第３図は同じく一実施例によるチツ
プの斜視図、第４図は従来とブレイク装置の縦断
側面図、第５図は同じく従来のブレイク装置によ
るチツプの斜視図である。
１……ウエハ、２……保護シート、３……ゴム
（弾性体）、４……粘着テープ、５……ローラ、
８……フイルム。
FIG. 1 is a longitudinal sectional side view of an embodiment of the breaking device of the present invention, FIG. 2 is a longitudinal sectional side view of the main parts of the device of the same embodiment, and FIG. FIG. 4 is a longitudinal sectional side view of a conventional breaking device, and FIG. 5 is a perspective view of a chip using the conventional breaking device. 1... Wafer, 2... Protective sheet, 3... Rubber (elastic body), 4... Adhesive tape, 5... Roller,
8...Film.
Claims (1)
イブ加工が施されたウエハの、加工された面側に
順に配置された保護シート、弾性体を備え、かつ
半加工側に配置された粘着テープを備え、この粘
着テープ上をローラをころがして前記ウエハを押
しつけブレイクするブレイク装置において、前記
保護シートと弾性体との間に非伸縮性である可撓
性のあるフイルムが設けられたものであることを
特徴とするブレイク装置。 A wafer that has been grooved or scribed by dicing has a protective sheet placed in order on the processed side, an elastic body, and an adhesive tape placed on the partially processed side. A breaking device that presses and breaks the wafer by rolling a roller on the top thereof, characterized in that a non-stretchable flexible film is provided between the protective sheet and the elastic body. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9295990U JPH0451140U (en) | 1990-09-04 | 1990-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9295990U JPH0451140U (en) | 1990-09-04 | 1990-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451140U true JPH0451140U (en) | 1992-04-30 |
Family
ID=31829813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9295990U Pending JPH0451140U (en) | 1990-09-04 | 1990-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451140U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016117290A (en) * | 2016-02-29 | 2016-06-30 | 三星ダイヤモンド工業株式会社 | Device for dividing brittle material substrate |
-
1990
- 1990-09-04 JP JP9295990U patent/JPH0451140U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016117290A (en) * | 2016-02-29 | 2016-06-30 | 三星ダイヤモンド工業株式会社 | Device for dividing brittle material substrate |