JPH0451296Y2 - - Google Patents
Info
- Publication number
- JPH0451296Y2 JPH0451296Y2 JP1988151392U JP15139288U JPH0451296Y2 JP H0451296 Y2 JPH0451296 Y2 JP H0451296Y2 JP 1988151392 U JP1988151392 U JP 1988151392U JP 15139288 U JP15139288 U JP 15139288U JP H0451296 Y2 JPH0451296 Y2 JP H0451296Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean
- centrifugal fan
- partition plate
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案はクリーンな空気が要求される半導体製
造工程やバイオ関連のクリーンエアエリアの供給
に関する。[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to the supply of clean air areas for semiconductor manufacturing processes and bio-related industries that require clean air.
本考案は本当にクリーンな空気が必要なところ
だけにクリーンな空気を供給するようにするた
め、クリーンエアを供給するクリーンユニツトを
自在に移動可能な構造とし、作業空間を箱などで
区切ることなく風速分布の差によるエアカーテン
効果により、同様の区切りを得るものである。
In order to supply clean air only to the areas that really need it, this invention uses a structure that allows the clean unit that supplies clean air to be moved freely, so that the work space can be controlled without dividing the work space with boxes, etc. A similar separation is obtained by the air curtain effect due to the difference in distribution.
従来、第３図に示すような簡易的にクリーンエ
アリアを供給するにもクリーンベンチや卓上クリ
ーンベンチといつたものがあるが、いずれも箱の
中をクリーンエアリアにするといつたものであ
る。
Conventionally, clean benches and tabletop clean benches have been used to simply supply a clean air area as shown in FIG. 3, but in both cases, the clean air area is provided inside a box.
従来の技術では、簡易的にクリーンエアリアを
供給するにもクリーンベンチや卓上クリーンベン
チといつたものがあるが、いずれも箱の中をクリ
ーンエアリアにするといつたもので必要なところ
だけ高クリーン度にして、またその高クリーン度
の場所をすこし移動したいという要求には十分で
はなかつた。また卓上クリーンベンチでは小さい
箱の中での作業は不便であつた。
With conventional technology, there are methods such as clean benches and tabletop clean benches that can be used to simply supply clean air, but both of these methods use clean air in the box, which provides high cleanliness only where it is needed. However, it was not sufficient for the request to move the high cleanliness area a little. Also, with the tabletop clean bench, it was inconvenient to work inside a small box.
従来の問題点を解決するために、本考案はメイ
ンフイルタと遠心フアンとの間に、遠心フアンと
同心状にコーン状の仕切り板を設け、かつ仕切り
板の吸引側の径が吹き出し側の径よりも小さくな
るようにした。
In order to solve the conventional problems, the present invention provides a cone-shaped partition plate between the main filter and the centrifugal fan concentrically with the centrifugal fan, and the diameter of the suction side of the partition plate is the same as the diameter of the outlet side. I made it smaller than .
上記の構成であるので、本考案はクリーンフア
ンユニツトの外周部にエアカーテンを作ることが
できる。
With the above configuration, the present invention can create an air curtain around the outer periphery of the clean fan unit.
以下本考案の実施例を図面に基づいて説明す
る。第１図は本考案のクリーンスタンドの断面図
で、図において、クリーンユニツトはハウジング
１１、プレフイルター部１、遠心フアン１２、メ
インフイルター３、照明部４、自在保持部５から
なり、自在保持部からは自在継ぎ手６がテーブル
等７に保持するセツト部８につながつている。メ
インフイルタ３の空気吸引側に、遠心フアンと同
心状にコーン形状の仕切り板１８を設ける。仕切
り板は吸引側の外径が吹き出し側の外径よりも小
さくなつているので、エアーは仕切り板１８の外
側に多く流れる。従つて、メインフイルター３を
でたエアーは外側の風速が速く内側が遅くなるこ
とによりａで示すような風速分布となり、図示の
ようなエアカーテン１７が外周につくられること
になる。この効果により箱等の仕切り板がなくと
も外部の汚れたエアーが内部に入り込まなく内部
は高清浄度が保てる。
Embodiments of the present invention will be described below based on the drawings. FIG. 1 is a sectional view of the clean stand of the present invention. In the figure, the clean unit consists of a housing 11, a pre-filter part 1, a centrifugal fan 12, a main filter 3, a lighting part 4, and a flexible holding part 5. From there, a universal joint 6 is connected to a set part 8 which is held on a table or the like 7. A cone-shaped partition plate 18 is provided on the air suction side of the main filter 3 concentrically with the centrifugal fan. Since the outer diameter of the partition plate on the suction side is smaller than the outer diameter on the blowout side, a large amount of air flows to the outside of the partition plate 18. Therefore, the air exiting the main filter 3 has a wind speed distribution as shown by a because the wind speed on the outside is high and the wind speed on the inside is slow, and an air curtain 17 as shown in the figure is formed around the outer periphery. Due to this effect, even if there is no partition plate such as a box, dirty air from outside does not enter the inside, and the interior can maintain a high level of cleanliness.
ハウジング１１の中に固定されたステイ１４の
上にフアン駆動モータ１５が固定され、モータ軸
の遠心フアン１２がセツトされている。照明部４
はハウジング１１の外周部に蛍光灯１３を取り付
け作業領域を照らす様になつている。自在継ぎ手
６の内部をモータ１５と蛍光灯１３への電源線１
６が通つている。 A fan drive motor 15 is fixed on a stay 14 fixed in the housing 11, and a centrifugal fan 12 on the motor shaft is set. Lighting section 4
A fluorescent lamp 13 is attached to the outer periphery of the housing 11 to illuminate the work area. Connect the inside of the universal joint 6 to the motor 15 and the power line 1 to the fluorescent lamp 13.
6 is passing.
以上、本考案はクリーンフアンユニツトの外周
にエアーカーテンが作られるので、外部の汚れた
エアーが入り込まず、簡易で安価な局所クリーン
エアリアを供給できるという効果を有する。
As described above, the present invention has the effect that since an air curtain is formed around the outer periphery of the clean fan unit, dirty air from outside does not enter, and a simple and inexpensive local clean air area can be supplied.
第１図は本考案の断面図、第２図は本考案の外
観の斜視図である。第３図は従来の卓上クリーン
ベンチの外観の斜視図である。
１……プレフイルター部、３……メインフイル
ター、４……照明部、５……自在保持部、６……
自在継ぎ手、７……テーブル、８……セツト部、
１１……ハウジング、１２……遠心フアン、１３
……蛍光灯、１４……ステイ、１５……モータ、
１６……電源線、１７……エアカーテン、１８…
…仕切り板。
FIG. 1 is a sectional view of the present invention, and FIG. 2 is a perspective view of the appearance of the present invention. FIG. 3 is a perspective view of the appearance of a conventional tabletop clean bench. DESCRIPTION OF SYMBOLS 1... Pre-filter part, 3... Main filter, 4... Lighting part, 5... Flexible holding part, 6...
Universal joint, 7...Table, 8...Set part,
11...Housing, 12...Centrifugal fan, 13
... Fluorescent lamp, 14 ... Stay, 15 ... Motor,
16...Power line, 17...Air curtain, 18...
...Partition board.
Claims (1)
き出し側に板状のメインフイルタが設けられて、
クリーンな空気を局所に供給する移動自在な簡易
クリーンスタンドにおいて、前記メインフイルタ
と遠心フアンとの間に、遠心フアンと同心状にコ
ーン形状の仕切り板を設け、かつ前記仕切り板は
吸引側の径が吹き出し側の径よりも小さいことを
特徴とする簡易クリーンスタンド。 A centrifugal fan is installed on the air suction side, and a plate-shaped main filter is installed on the air blowout side.
In a movable simple clean stand that locally supplies clean air, a cone-shaped partition plate is provided between the main filter and the centrifugal fan concentrically with the centrifugal fan, and the partition plate has a diameter on the suction side. A simple clean stand characterized by a diameter smaller than the diameter of the blowout side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988151392U JPH0451296Y2 (en) | 1988-11-21 | 1988-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988151392U JPH0451296Y2 (en) | 1988-11-21 | 1988-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0273532U JPH0273532U (en) | 1990-06-05 |
| JPH0451296Y2 true JPH0451296Y2 (en) | 1992-12-03 |
Family
ID=31425397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988151392U Expired JPH0451296Y2 (en) | 1988-11-21 | 1988-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451296Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022037830A (en) * | 2020-08-25 | 2022-03-09 | 貴浩 大館 | Table and sofa capable of reducing droplet |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6004779B2 (en) * | 2012-06-26 | 2016-10-12 | 株式会社竹中工務店 | Local cleaning system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6012582U (en) * | 1983-07-05 | 1985-01-28 | 象印チエンブロツク株式会社 | hanging clamp |
| JPS6155632U (en) * | 1984-09-14 | 1986-04-14 | ||
| JPS63229115A (en) * | 1987-03-18 | 1988-09-26 | Hitachi Ltd | Air cleaner |
-
1988
- 1988-11-21 JP JP1988151392U patent/JPH0451296Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022037830A (en) * | 2020-08-25 | 2022-03-09 | 貴浩 大館 | Table and sofa capable of reducing droplet |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0273532U (en) | 1990-06-05 |
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