JPH045162B2 - - Google Patents

Description

[Detailed description of the invention]

INDUSTRIAL APPLICATION FIELD The present invention relates to a method for manufacturing an optical filter. Conventional configurations and their problems Conventionally, for example, when creating a color filter for a television camera, it was necessary to selectively dye a pattern in a small area of about 5 x 10 μm with a color that exhibits the necessary spectral characteristics. be. As a conventional method for producing a three-color color filter using this dyeing method, there is a method shown in FIGS. 1 and 2. In the method shown in FIG. 1, on a transparent glass substrate 1,
A photoresist film 2 is formed by adding ammonium chromate to dyeable gelatin to give it negative photosensitive characteristics.
(a), selectively irradiating the film 2 with light 4 using a mask 3, leaving only the light-irradiated part of the film 2 and removing the rest;
The remaining part is dyed to obtain one color of the color filter and a certain dyeing pattern 5 (b). After forming an intermediate film 6 that protects the pattern 5 from the next dyeing (c), the above-described photoresist film formation and mask exposure are repeated again, and a dyed pattern of a different color adjacent to the pattern 5 is formed through the intermediate film 6. form 7. Furthermore, the same process is repeated again to form a dyed pattern 9 having a different color from the patterns 5 and 7 via the intermediate film 8 (d). In this way, a color filter is created by sequentially stacking dyeing patterns of red, green, blue, etc. The method shown in Figure 1 requires 3 times of gelatin coating, 3 times of dyeing shape processing, and 2 times of interlayer film formation in addition to the dyeing process, which is extremely disadvantageous for manufacturing fine color filters. It is. In the method shown in FIG. 2, a positive photoresist 12 is coated on a dyeing film 11 on a transparent glass substrate 1, selectively exposed to light 14 using a mask 13 (a), and the resist 12 on the dyed portion is covered with a window. Open it and dye the dyeing film 11 in that part to form a dyeing pattern 15.
(b). Thereafter, the resist pattern 12 is removed and the above steps are repeated. That is, a new resist pattern 16 is formed and dyed by irradiating light 18 through a mask 17 to form a dyed pattern 19 having a different color from the pattern 15 (c). Then, a new photoresist 20 is formed again, and light 22 is irradiated through the mask 21 to form a dyed pattern 23 in the same manner (d). The method shown in Figure 2 also requires many steps of resist application and window opening, and is also disadvantageous due to the fact that the dye diffuses to a larger area than the opening area of the resist during dyeing, resulting in the formation of a fine color pattern. It is. Purpose of the Invention An object of the present invention is to provide a method for easily and highly accurately creating a color filter (a mosaic image of several colors) on a flat plate, which is necessary for an image pickup tube or an image pickup plate for a color television camera. do. Structure of the invention The present invention is based on the formula

[Formula] (where R ₁ is H or CH ₃ , X is O or S,
R ₂ is

[expression] or

Represents [formula]. ), for example, phenyl methacrylate, a polymer of phenyl methyl methacrylate, or a copolymer of the above compound with styrene, methyl methacrylate, etc., is used as a photosensitive coloring material, and a film of this material is placed on a transparent substrate. The method is characterized in that the portion of the coating to be colored is irradiated with light to be colored with a dye. The coloring principle of the photosensitive coloring material used in the present invention will be explained using polyphenyl methacrylate as an example. First, when this polymer is irradiated with ultraviolet light with a wavelength shorter than 350 nm, dislocation occurs as follows.

[expression] or

[Formula] The phenol group generated by the above photoreaction creates an anionic seat as shown below in the presence of an alkali or base, and adsorbs the cationic dye Dye×. As described above, the present invention is a method of generating a functional group capable of fixing a dye in the light-irradiated part of a film made of a photosensitive coloring material, and causing this functional group to react with a colored material to color only the light-irradiated part. For example, when manufacturing a mosaic color filter of multiple colors, the following effects can be obtained. (1) High resolution (micron range) image formation is possible. (2) Images can be formed on a flat plate simply by exposure to ultraviolet light using a photomask.
The process is simple. (3) In the coloring method using dyes, the coloring density is controlled by the amount of light irradiated onto the photosensitive coloring material base material, making it possible to easily perform coloring with reproducibility. That is, in the present invention, by performing high-precision exposure using a combination of ultraviolet light and a photomask, fine partial coloring in the micron region is possible. Description of Examples First, dyeing examples of the photosensitive coloring material used in the present invention will be described. Example 1 A copolymer was obtained by radical copolymerization of 20 parts by weight of phenyl methacrylate and 80 parts by weight of methyl methacrylate using azoisobutyronitrile as an initiator. A film with a thickness of about 50 μm is made on a slide glass from a 7% by weight benzene solution of the obtained copolymer. This copolymer forms a colorless and transparent film. The film was then irradiated with light from a distance of 10cm using a 100W high-pressure mercury lamp (UMI02 manufactured by Ushio). Next, 0.5% by weight of the dye (Azure A) and 0.2% by weight of triethylamine were dissolved in a mixed solvent of methanol and dioxane at a weight ratio of 5:1, and the above-mentioned light-irradiated film was immersed in this solution for 1 minute. When the surface was washed with methanol and dried, only the irradiated areas were colored with Azure A. The relationship between the irradiation time and the absorbance representing the amount of coloring was as shown in FIG. This result shows that the irradiation time and the amount of coloring are proportional. Therefore, the amount of coloring can be controlled by adjusting the irradiation time. Example 2 20 parts by weight of phenyl methacrylate and 80 parts by weight of styrene
A copolymer was obtained by radical copolymerization using part by weight of azoisobutyronitrile as an initiator. The obtained copolymer was colored in the same manner as in Coloring Example 1, and the relationship between the irradiation time and the amount of coloring was measured. This is shown in Figure 4.
This result shows that the irradiation time and the amount of coloring are proportional. From this, similarly to the copolymer of Example 1, the amount of coloring can be controlled by the irradiation time. In the above example, Azure A was used as the dye, but fuchsin or methylene blue can also be used. A method according to an embodiment of the present invention for producing a color filter for a television camera using the above coloring method will be explained with reference to FIG. First, about 2 μm of copolymer photosensitive coloring base material 31 is placed on a glass substrate 30 that becomes a transparent substrate.
A colorless and transparent film with a thickness of m is applied (a), and ultraviolet light 33 is selectively irradiated using a photomask 32 having an opaque area (shaded area) (b) to cause the above-mentioned reaction in the light irradiated area. Thereafter, the substrate 30 is immersed in the aforementioned dye bath containing the dye, and only the light-irradiated portion of the material 31 is dyed to form a red dyeing pattern 34 with a diameter of, for example, 10 μm (c). Next, using another photomask 34, the material 31 is
Ultraviolet light 36 is applied to a part other than the pattern 34 forming part.
is selectively irradiated (d) to cause the above-mentioned reaction, and then dyed with a different color from that of the pattern 34 using a dye bath of a different color. In this way, a dyeing pattern 37 different from the pattern 34, eg, blue, is formed.
(e). Similarly, after selectively irradiating ultraviolet light 39 using a mask 38 to a part other than the patterns 34 and 37, (f), irradiation of ultraviolet light 39 with a dye bath having a color different from that of the patterns 34 and 37. For example, a green dyeing pattern 40 is formed by dyeing only that part (g). Thus, dyeing patterns 34, 3 for color filters consisting of red, blue and green respectively, for example.
A color filter having a color filter of 7.40 is manufactured. According to the method shown in FIG. 5, the photosensitive colored base material is selectively irradiated with light, and only the light irradiated area can be colored, and a colored pattern is formed in the light irradiated area, so that the base material is simply selectively irradiated with light. A colored pattern on a filter can be formed simply by using exposure and dyeing steps. Therefore, when manufacturing a color filter with a multi-colored coloring pattern, there is no need for multiple dye film coatings and processing, or multiple resist coating, development, and resist removal processes, and only a few steps are required. High-precision color filters can be easily manufactured. Although the above description has been made regarding color filters, the present invention can also be applied to other optical filters, and other colored patterns such as cyan, magenta, and yellow can be similarly formed. Effects of the Invention As described above, according to the method of the present invention, a mosaic color filter can be directly created on a photosensitive substrate by ultraviolet irradiation using a photomask and dye manipulation, and the process is faster than that of the conventional method. In addition, in the present invention, since a single-layer photosensitive coloring substrate is directly dyed, a high-precision light irradiation device is used to form fine images with high resolution (in microns). In addition, in addition to obtaining a colorless and transparent base material, the color density can be controlled by adjusting the amount of light irradiated onto the photosensitive coloring base material, making it easy to color with reproducibility and high precision. This will greatly contribute to the production of optical filters with fine patterns.

[Brief explanation of drawings]

Figures 1 and 2 are diagrams showing the manufacturing process of conventional color filters, and Figure 3 is a diagram showing the relationship between ultraviolet light irradiation time and coloring density for a copolymer of phenyl methacrylate and methyl methacrylate. , FIG. 4 is a diagram showing the relationship between light irradiation time and coloring density for a copolymer of phenyl methacrylate and styrene, and FIG. 5 is a diagram showing the manufacturing process of a color filter according to an embodiment of the present invention. be. 30...Glass substrate, 31...Substrate material for photosensitive coloring, 32, 35, 38...Photomask, 3
3,36,39...ultraviolet light, 34,37,40...
...dyeing pattern.

Claims (1)

[Claims] 1 Formula [Formula] (wherein R ₁ is H or CH ₃ , X is 0 or S,
R ₂ represents [formula] or [formula]. ) A step of forming a film made of a polymer or copolymer containing the compound represented by the above as a polymerization component on a transparent substrate, a step of irradiating the portion of the film to be colored with light, and a step of applying a dye to the film. A method for manufacturing an optical filter, comprising the step of coloring a light irradiated part of the coating.