JPH045164B2 - - Google Patents
Info
- Publication number
- JPH045164B2 JPH045164B2 JP58069624A JP6962483A JPH045164B2 JP H045164 B2 JPH045164 B2 JP H045164B2 JP 58069624 A JP58069624 A JP 58069624A JP 6962483 A JP6962483 A JP 6962483A JP H045164 B2 JPH045164 B2 JP H045164B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- refractive index
- mirror
- contact
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
- Optical Filters (AREA)
Description
【発明の詳細な説明】
(イ) 発明の分野
本発明は電子写真複写機用のフイルタを兼ねた
結像系のミラーに関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of the Invention The present invention relates to a mirror for an imaging system that also serves as a filter for an electrophotographic copying machine.
(ロ) 発明の背景
電子写真複写機において、感光体としてSe−
As感光体、アモルフアスシリコン感光体等を用
いる場合、これらの感光体が波長550nm付近を
中心として長波長側にも短波長側にも感度を有し
ているため、ハロゲンランプ等の白色光源を用い
ると、原稿における赤色及び青色の部分の写りが
悪くなると云う問題がある。この対策として通常
は色ガラスフイルタ或は干渉膜フイルタを組合せ
て、短波長側の光と長波長側の光を夫々カツトす
るようにしているが、フイルタを2枚以上組合せ
るので、光量の損失が増し、コストも上昇すると
云う難点があつた。この点はバンドパスフイルタ
の特性を持たせた多層膜ミラーを用いることによ
つて一応解決できるが、従来の多層膜ミラーのバ
ンドパスフイルタでは特性上不満足な点があつ
た。この点についてもう少し詳しく説明する。(b) Background of the invention In electrophotographic copying machines, Se-
When using an As photoconductor, an amorphous silicon photoconductor, etc., these photoconductors are sensitive to long wavelengths and short wavelengths centered around a wavelength of 550 nm, so a white light source such as a halogen lamp cannot be used. If this method is used, there is a problem in that the red and blue parts of the original document are poorly captured. As a countermeasure to this problem, colored glass filters or interference film filters are usually combined to cut out light on the short wavelength side and light on the long wavelength side, respectively, but since two or more filters are combined, there is a loss in the amount of light. However, there was a problem in that the cost would also increase. This problem can be solved to some extent by using a multilayer mirror that has the characteristics of a bandpass filter, but conventional multilayer mirror bandpass filters have unsatisfactory characteristics. Let me explain this point in a little more detail.
第1図は従来の多層膜ミラーの膜構成を示す。
Gはガラス基板で、Aは外部の空気領域である。
Hは高屈折率層、Lは低屈折率層で、各層は図示
のように全部λp/4の光学的厚さ(実際の厚さに
屈折率を掛けた値)になつている。こゝでλpは反
射域の中心波長である。層の構成はガラス基板に
接する層と空気に接する層が高屈折率で、その間
はH,L各層が交互に重なつている。このような
膜構成のミラーの分光反射率特性を第2図に示
す。同図に示されているように反射特性はバンド
パスフイルタの特性を呈しているが、バンド域の
両側にリツプルが現れている。このリツプル部分
は感光体が感光するので、原稿の赤色部及び青色
部の再現性は余り改善されない。 FIG. 1 shows the film structure of a conventional multilayer mirror.
G is the glass substrate and A is the external air area.
H is a high refractive index layer, L is a low refractive index layer, and each layer has an optical thickness of λ p /4 (the value obtained by multiplying the actual thickness by the refractive index) as shown in the figure. Here, λ p is the center wavelength of the reflection region. The layer structure is such that the layer in contact with the glass substrate and the layer in contact with air have a high refractive index, and H and L layers are alternately stacked in between. FIG. 2 shows the spectral reflectance characteristics of a mirror with such a film configuration. As shown in the figure, the reflection characteristics exhibit those of a bandpass filter, but ripples appear on both sides of the band region. Since this ripple portion is exposed to light by the photoreceptor, the reproducibility of the red and blue portions of the document is not improved much.
第2図に示されるような分光反射特性の改善の
試みもなされている。第3図がその一例で、第1
図の膜構成で、ガラス基板に接するH層と空気に
接するH層とを夫々光学的厚さをλp/8にしたも
のである。このようにすると分光反射率特性は第
4図のようになり、長波長側のリツプルは消える
が短波長側のリツプルは第1図の構成より却つて
強められてしまう。第3図の膜構成でHとLを入
れ換えた関係の構成にすると、今度は短波長側の
リツプルは除去されるが長波長側のリツプルが第
2図の特性より増強されてしまう。 Attempts have also been made to improve the spectral reflection characteristics as shown in FIG. Figure 3 is an example.
In the film structure shown in the figure, the H layer in contact with the glass substrate and the H layer in contact with air each have an optical thickness of λ p /8. In this case, the spectral reflectance characteristic becomes as shown in FIG. 4, and the ripples on the longer wavelength side disappear, but the ripples on the shorter wavelength side become stronger than in the configuration shown in FIG. 1. If the film structure shown in FIG. 3 is replaced with H and L, the ripples on the short wavelength side will be removed, but the ripples on the long wavelength side will be enhanced compared to the characteristics shown in FIG. 2.
(ハ) 目的
本発明は電子写真複写機において、多層膜ミラ
ーを用いる場合の分光反射率特性の改善を目的と
する。(c) Purpose The purpose of the present invention is to improve the spectral reflectance characteristics when using a multilayer mirror in an electrophotographic copying machine.
(ニ) 構成
本発明はガラス基板に接する層を高屈折率、空
気に接する層を低屈折率とし、中間に高、低各屈
折率の層を交互に偶数層重ねて配置し、ガラス基
板に接する層と空気に接する層の光学的厚さを
λp/8、ガラス基板に接するH層に接する次の低
屈折率層の光学的厚さをλp/4以下、他の各層の
光学的厚さをλp/4とした多層膜ミラーを提供す
る。(D) Structure The present invention has a layer in contact with a glass substrate with a high refractive index, a layer in contact with air with a low refractive index, and an even number of layers with high and low refractive indexes arranged in the middle alternately. The optical thickness of the layer in contact with the air layer is λ p /8, the optical thickness of the next low refractive index layer in contact with the H layer in contact with the glass substrate is λ p /4 or less, and the optical thickness of each other layer is λ p /4 or less. A multilayer mirror having a thickness of λ p /4 is provided.
(ホ) 実施例
第5図及び第6図に本発明の一実施例を示す。
第1図と同じくGはガラス基板、Aは外部の空
気、Hは高屈折率層、Lは低屈折率層である。以
下説明の便宜上各層に番号をつけ、ガラス基板G
に接する層から順番に第1層、第2層等と呼び、
最後の空気に接する層を最外層と呼ぶことにす
る。また高屈折率層はH層、低屈折率層はL層と
呼び、層の厚さは一々断らないが光学的厚さを示
す。λpは設計波長で例えば550nmに選定される。(E) Embodiment An embodiment of the present invention is shown in FIGS. 5 and 6.
As in FIG. 1, G is a glass substrate, A is external air, H is a high refractive index layer, and L is a low refractive index layer. For convenience of explanation, each layer is numbered below, and the glass substrate G
The layer in contact with the layer is called the first layer, the second layer, etc.
The last layer in contact with air will be called the outermost layer. Further, the high refractive index layer is called the H layer, and the low refractive index layer is called the L layer, and the thickness of each layer is not specified, but indicates the optical thickness. λ p is the design wavelength, and is selected to be, for example, 550 nm.
H層としてはZrO2、TiO2、ZnS、CeO2等を用
いる。L層としてはMgF2、SiO2、氷晶石等を用
いる。ガラス基板Gの屈折率は1.52程度のものを
用いる。 ZrO2, TiO2, ZnS, CeO2, etc. are used as the H layer. MgF2, SiO2, cryolite, etc. are used as the L layer. A glass substrate G having a refractive index of about 1.52 is used.
第5図の実施例は第1層のH層と最外層のL層
とが厚さλp/8、他の層は全部λp/4の層厚にし
てある。第7図がこの実施例のミラーの分光反射
率特性で第2図と比較すれば明らかなようにバン
ド域の両側のリツプルが減少している。 In the embodiment shown in FIG. 5, the first H layer and the outermost L layer have a thickness of λ p /8, and all other layers have a thickness of λ p /4. FIG. 7 shows the spectral reflectance characteristics of the mirror of this example, and as can be seen from the comparison with FIG. 2, the ripples on both sides of the band region are reduced.
第6図の実施例では第2層のL層の厚さをλp/
4より稍薄くし、0.23λpとした。実際問題として
同層の厚さは0.23〜1.2λpの範囲が好ましい。この
実施例による分光反射率特性を第8図に示す。長
波長側のリツプルが第5図の実施例より更に減少
しているのが認められる。この実施例は長波長側
のリツプルをより一層抑えるのが目的であるが、
第2層を余り薄くして0.2λp以下にすると短波長
側のリツプルが強くなつて来て反射率が25%以上
となり青の再現性が低下して来る。0.23λp〜
0.25λpの範囲では第5図の実施例との差が余り認
められない。この実施例は第5図のものより赤色
側の再現性をより高めようとしたものであるが、
Se−As感光体の場合、赤色光だけでなく、近赤
外光にかけて感度を有し、単に赤色部分の再現を
低下させるだけでなく、メモリ効果等の作像プロ
セスに悪影響を与える効果が現れるので、このよ
うな場合に長波長側のリツプルを特に抑えた第6
図の構成が有効となる。 In the embodiment shown in FIG. 6, the thickness of the second L layer is λ p /
It was made slightly thinner than 4 and set to 0.23λ p . In practice, the thickness of the same layer is preferably in the range of 0.23 to 1.2λ p . The spectral reflectance characteristics of this example are shown in FIG. It can be seen that the ripple on the long wavelength side is further reduced compared to the embodiment shown in FIG. The purpose of this embodiment is to further suppress ripples on the long wavelength side.
If the second layer is made too thin to be less than 0.2λ p , the ripples on the short wavelength side will become stronger, the reflectance will become more than 25%, and the reproducibility of blue will deteriorate. 0.23λ p ~
In the range of 0.25λ p , there is not much difference from the embodiment shown in FIG. This example attempts to improve the reproducibility of the red side more than the one shown in Figure 5, but
In the case of the Se-As photoconductor, it is sensitive not only to red light but also to near-infrared light, which not only reduces the reproduction of the red part but also has effects that adversely affect the image forming process such as memory effects. Therefore, in such a case, we recommend using a 6th wave filter that particularly suppresses ripples on the long wavelength side.
The configuration in the diagram is valid.
第9図は本発明ミラーを用いた電子写真複写機
の構成の一例を示す。1は原稿台のガラス板、
2,3は走査鏡で、走査鏡3は走査鏡2の移動距
離の半分の距離を移動する。4は結合レンズ、5
が本発明に係るミラーで共に位置固定であり、6
が感光体ドラムである。機能上本発明ミラーは
2,3,5の各ミラーのうち何れに採用されても
よいが、常時結像レンズの近くにあるミラー5が
面積が最も小さくてよいから、ミラー5に本発明
を採用するのが製造上有利である。 FIG. 9 shows an example of the configuration of an electrophotographic copying machine using the mirror of the present invention. 1 is the glass plate of the manuscript table,
2 and 3 are scanning mirrors, and scanning mirror 3 moves half the distance that scanning mirror 2 moves. 4 is a coupling lens, 5
are both mirrors according to the present invention and their positions are fixed, and 6
is the photoreceptor drum. Functionally, the mirror of the present invention may be adopted as any of the mirrors 2, 3, and 5, but since the mirror 5, which is always near the imaging lens, has the smallest area, the mirror 5 of the present invention may be adopted as the mirror of the present invention. It is advantageous in terms of manufacturing to adopt this method.
(ヘ) 効果
本発明多層膜ミラーは上述したように第1層と
が屈折率において一方がHなら他方がLと云う点
で従来例と異なり、夫々の厚さをλp/8とするこ
とでバンド域の両側のリツプルを従来より低くす
ることに成功し、電子写真の青色、赤色の両方に
おける再現性の改善が2種以上のフイルタを組合
せると云つた面倒さなしに実現でき、更に第2層
の厚さをλp/4以下とすることで、長波長側のリ
ツプルをより一層抑圧し、近赤外まで感度を有す
る感光体におけるメモリ効果の防止も実現でき
た。(f) Effects As mentioned above, the multilayer mirror of the present invention differs from the conventional example in that the refractive index of the first layer is H and the other is L, and the thickness of each is λ p /8. We succeeded in lowering the ripple on both sides of the band range than before, and improved reproducibility in both blue and red in electrophotography can be achieved without the trouble of combining two or more types of filters. By setting the thickness of the second layer to λ p /4 or less, it was possible to further suppress ripples on the long wavelength side and prevent the memory effect in a photoreceptor having sensitivity up to near infrared rays.
第1図は従来の多層膜ミラーの一例の膜構成を
示す図、第2図は上記ミラーの分光反射率特性の
グラフ、第3図は他の従来例のミラーの膜構成を
示す図、第4図は同ミラーの分光反射率特性のグ
ラフ、第5図は本発明の一実施例ミラーの膜構成
図、第6図は本発明の他の実施例ミラーの膜構成
図、第7図は第5図のミラーの分光反射率特性の
グラフ、第8図は第6図のミラーの分光反射率特
性図、第9図は本発明ミラーを用いた電子写真複
写機の一例の要部側面図である。
G……ガラス基板、A……外部空気領域、H…
…高屈折率層、L……低屈折率層。
FIG. 1 is a diagram showing the film structure of an example of a conventional multilayer mirror, FIG. 2 is a graph of the spectral reflectance characteristics of the mirror, and FIG. 3 is a diagram showing the film structure of another conventional mirror. Fig. 4 is a graph of the spectral reflectance characteristics of the same mirror, Fig. 5 is a film structure diagram of a mirror according to one embodiment of the present invention, Fig. 6 is a film structure diagram of a mirror according to another embodiment of the present invention, and Fig. 7 is a film composition diagram of a mirror according to another embodiment of the present invention. FIG. 5 is a graph of the spectral reflectance characteristics of the mirror, FIG. 8 is a graph of the spectral reflectance characteristics of the mirror shown in FIG. 6, and FIG. 9 is a side view of essential parts of an example of an electrophotographic copying machine using the mirror of the present invention. It is. G...Glass substrate, A...External air area, H...
...High refractive index layer, L...Low refractive index layer.
Claims (1)
の空気に接する最外層を低屈折率とし、これら両
層の光学的厚さを夫々設計波長λpに対してλp/8
とし、上記両層の間に第1層の側から順に低屈折
率層と高屈折率層とを交互に偶数層介在させ、こ
れら介在層において、上記第1層と接する低屈折
率層の光学的厚さを0.23λp〜0.2λpとし、他の各層
の光学的厚さをλp/4としたことを特徴とする多
層膜ミラー。1 The first layer in contact with the glass substrate has a high refractive index, the outermost layer in contact with external air has a low refractive index, and the optical thickness of both layers is set to λ p /8 with respect to the design wavelength λ p
An even number of low refractive index layers and high refractive index layers are alternately interposed between the two layers in order from the first layer side, and in these intervening layers, the optical properties of the low refractive index layers in contact with the first layer are A multilayer mirror characterized in that the optical thickness is 0.23λ p to 0.2λ p and the optical thickness of each other layer is λ p /4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6962483A JPS59195205A (en) | 1983-04-19 | 1983-04-19 | Multilayered film mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6962483A JPS59195205A (en) | 1983-04-19 | 1983-04-19 | Multilayered film mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59195205A JPS59195205A (en) | 1984-11-06 |
| JPH045164B2 true JPH045164B2 (en) | 1992-01-30 |
Family
ID=13408204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6962483A Granted JPS59195205A (en) | 1983-04-19 | 1983-04-19 | Multilayered film mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59195205A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6374005A (en) * | 1986-09-18 | 1988-04-04 | Hoya Corp | Rear reflection mirror consisting of multi-layered films |
| JP2629693B2 (en) * | 1987-02-26 | 1997-07-09 | 松下電器産業株式会社 | Excimer laser mirror |
| JPH01154001A (en) * | 1987-12-10 | 1989-06-16 | Minolta Camera Co Ltd | Optical filter |
| US8687928B2 (en) | 2009-05-07 | 2014-04-01 | Konica Minolta Opto, Inc. | Optical characteristic measuring probe |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104138A (en) * | 1976-01-20 | 1977-09-01 | Ricoh Co Ltd | Short pass filter |
-
1983
- 1983-04-19 JP JP6962483A patent/JPS59195205A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59195205A (en) | 1984-11-06 |
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