JPH045170B2 - - Google Patents

Info

Publication number
JPH045170B2
JPH045170B2 JP58188592A JP18859283A JPH045170B2 JP H045170 B2 JPH045170 B2 JP H045170B2 JP 58188592 A JP58188592 A JP 58188592A JP 18859283 A JP18859283 A JP 18859283A JP H045170 B2 JPH045170 B2 JP H045170B2
Authority
JP
Japan
Prior art keywords
aperture
optical
resolution
microscope
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58188592A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59121310A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS59121310A publication Critical patent/JPS59121310A/ja
Publication of JPH045170B2 publication Critical patent/JPH045170B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
JP58188592A 1982-12-27 1983-10-11 光学近接視野走査顕微鏡 Granted JPS59121310A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP82111974A EP0112401B1 (fr) 1982-12-27 1982-12-27 Microscope de balayage optique de champ proche
EP82111974.0 1982-12-27

Publications (2)

Publication Number Publication Date
JPS59121310A JPS59121310A (ja) 1984-07-13
JPH045170B2 true JPH045170B2 (fr) 1992-01-30

Family

ID=8189426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58188592A Granted JPS59121310A (ja) 1982-12-27 1983-10-11 光学近接視野走査顕微鏡

Country Status (5)

Country Link
US (1) US4604520A (fr)
EP (1) EP0112401B1 (fr)
JP (1) JPS59121310A (fr)
CA (1) CA1243231A (fr)
DE (1) DE3276138D1 (fr)

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US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler
EP0283256A3 (fr) * 1987-03-18 1990-02-07 Tektronix Inc. Microscope à balayage optique
DE3772563D1 (de) * 1987-06-22 1991-10-02 Ibm Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens.
ES2024468B3 (es) * 1987-09-25 1992-03-01 Ibm Sensor para convertir una distancia a optica y ademas a energia electrica, y aparato de exploracion de superficie que usa el mismo
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DE3820518C1 (fr) * 1988-06-16 1990-01-11 Wild Leitz Gmbh, 6330 Wetzlar, De
US5212987A (en) * 1988-06-16 1993-05-25 Hommelwerke Gmbh Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscillator
EP1245987B1 (fr) * 1988-07-13 2008-01-23 Optiscan Pty Ltd Microscope confocal à balayage
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US4947034A (en) * 1989-04-28 1990-08-07 International Business Machines Corporation Apertureless near field optical microscope
DE3916047C2 (de) * 1989-05-17 1998-09-17 Ulrich Dr Fischer Stabförmige Sonde zur berührungslosen Untersuchung von Oberflächenstrukturen im Submikrometerbereich sowie Verfahren zur Herstellung dieser Sonde
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FR2654212A1 (fr) * 1989-11-03 1991-05-10 Ardt Procede d'analyse spectroscopique ponctuelle de la lumiere diffractee ou absorbee par une substance placee dans un champ proche, et microscopes optiques a balayage en champ proche mettant en óoeuvre ce procede.
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IL97362A0 (en) * 1991-02-26 1992-08-18 Aaron Lewis Method for external excitation of subwavelength light sources that is integrated into feedback methodologies
JP2823970B2 (ja) * 1991-04-05 1998-11-11 浜松ホトニクス株式会社 近接場走査光学顕微鏡
DE69121201D1 (de) * 1991-08-27 1996-09-05 Ibm Verfahren und Gerät zur Erzeugung hochauflösender optischer Bilder
JP2683180B2 (ja) * 1992-04-08 1997-11-26 浜松ホトニクス株式会社 走査型光学顕微鏡
JPH05288995A (ja) * 1992-04-10 1993-11-05 Hamamatsu Photonics Kk 走査型光学顕微鏡
DE4231426A1 (de) * 1992-09-19 1993-04-29 Danzebrink Hans Ulrich Polyederspitze als nahfeldoptischer sensor und optoelektronischer wandler
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Also Published As

Publication number Publication date
DE3276138D1 (en) 1987-05-27
EP0112401B1 (fr) 1987-04-22
CA1243231A (fr) 1988-10-18
EP0112401A1 (fr) 1984-07-04
US4604520A (en) 1986-08-05
JPS59121310A (ja) 1984-07-13

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