JPH0451762B2 - - Google Patents
Info
- Publication number
- JPH0451762B2 JPH0451762B2 JP25628085A JP25628085A JPH0451762B2 JP H0451762 B2 JPH0451762 B2 JP H0451762B2 JP 25628085 A JP25628085 A JP 25628085A JP 25628085 A JP25628085 A JP 25628085A JP H0451762 B2 JPH0451762 B2 JP H0451762B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- output
- electrodes
- displacement
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 28
- 230000006698 induction Effects 0.000 claims description 11
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、静電容量変化を利用した直線変位の
検出器に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a linear displacement detector that utilizes changes in capacitance.
従来の技術
この検出器の基本的なものは３枚の矩形電極か
ら成り、２枚の同一大きさの電極が測定対象の変
位方向に間隔を有して並べられ、それらの面に平
行な１枚の電極の長さ（以下変位方向を長さと
し、変位方向に直角な方向を巾とする）は前記２
枚の電極の１枚と間隔との合計であり、わずかな
間隔を隔てて２枚の電極と平面的に対向し、１枚
と２枚のいずれかが変位するとその変位に応じて
１枚の電極から出力が取り出されるものである。
その実例としては、出力を電圧信号により取出す
ようにしたものが実公昭44−15398号「容量変化
を利用した変位変換装置」、特公昭45−38169号
「容量−直流信号変換装置」等であり、この一般
的なものの他に、出力を位相信号に変換して取出
すようにした特開昭49−5061号「回転角トランス
デユーサ」がある。この後者の位相変化を利用す
るものについてさらに説明すると、第３図に示す
ように、変位方向（図では左右方向）と平行な面
を電極面として変位方向に配置された矩形の第
１、第２の電極１１，１２が固定され、その第
１、第２の電極面と小間隙ｄを隔てて対向させら
れた可動電極２１があり、前記第１、第２の電極
１１，１２に相互に90度位相差を有する三角波
e1，e2を各別に供給する発振器３１，３２からな
る交流信号発振部３０が有り、前記可動電極２１
からその出力e0を取出すようにしたものである。
尚、上記の可動と固定の電極をそれぞれ固定と可
動に入れかえても同様である。また、変位の検出
範囲を大にするため電極は、幅に対して変位方向
長さが大にされている。Prior Art This detector basically consists of three rectangular electrodes, two of the same size are arranged at a distance in the direction of displacement of the object to be measured, and one electrode parallel to these planes. The length of each electrode (hereinafter, the displacement direction is defined as length, and the direction perpendicular to the displacement direction is defined as width) is 2.
It is the sum of one of the two electrodes and the interval, and it faces two electrodes with a small interval, and when either one of the two electrodes is displaced, the one of the electrodes changes according to the displacement. Output is extracted from the electrodes.
Examples include Utility Model Publication No. 44-15398 ``Displacement Conversion Device Utilizing Capacitance Change'' and Special Publication No. 1977-38169 ``Capacitance-DC Signal Converter''. In addition to this general type, there is a ``rotation angle transducer'' disclosed in Japanese Patent Application Laid-Open No. 49-5061 which converts the output into a phase signal and extracts it. To further explain what utilizes this latter phase change, as shown in Fig. 3, the first and second electrodes of a rectangle arranged in the displacement direction with the plane parallel to the displacement direction (left-right direction in the figure) as the electrode surface. The two electrodes 11 and 12 are fixed, and there is a movable electrode 21 that faces the first and second electrode surfaces with a small gap d in between. Triangular wave with 90 degree phase difference
There is an AC signal oscillation section 30 consisting of oscillators 31 and 32 that supply e 1 and e 2 separately, and the movable electrode 21
The output e 0 is extracted from .
Incidentally, the same effect can be obtained even if the above-mentioned movable and fixed electrodes are replaced with fixed and movable electrodes, respectively. Further, in order to widen the displacement detection range, the length of the electrode in the displacement direction is made larger than the width.
これにおいては、第１と可動の電極１１，２１
および第２と可動の電極１２，２１はそれぞれを
コンデンサを形成することになり、それらコンデ
ンサを符号５１，５２として上記のものの等価回
路を表わすと第４図のようになる。すなわち、各
コンデンサ５１，５２の一端を三角波発振部３０
のそれぞれ発振器３１，３２と結合し、その各他
端を結合してその結合部を出力端５３とした回路
が構成されたことになり、可動の電極２１から取
出される出力e0と変位ｘの関係は第５図のように
e0の位相変化に変換される。 In this, the first and movable electrodes 11, 21
The second and movable electrodes 12 and 21 each form a capacitor, and when these capacitors are designated by reference numerals 51 and 52, an equivalent circuit of the above is shown in FIG. That is, one end of each capacitor 51, 52 is connected to the triangular wave oscillator 30.
are coupled to the oscillators 31 and 32, respectively, and the other ends are coupled to form a circuit with the coupled portion as the output end 53, and the output e 0 taken out from the movable electrode 21 and the displacement x The relationship between is shown in Figure 5.
It is converted into a phase change of e 0 .
以上は第１、第２の電極１１，１２の各々を90
度位相差を有する三角波発振器３０と結線した場
合であるが、これを第６図に示すような180度位
相差を有する交流信号発振部４０と結線すると、
可動電極２１からの出力e0の振幅が変位ｘに対応
して変化する。 In the above, each of the first and second electrodes 11 and 12 is
This is the case where the triangular wave oscillator 30 having a phase difference of 180 degrees is connected, but if this is connected to the AC signal oscillator 40 having a phase difference of 180 degrees as shown in FIG.
The amplitude of the output e 0 from the movable electrode 21 changes in accordance with the displacement x.
ところで、前記固定、可動の電極１１，１２，
２１は平板状であるが、その変形としては第７図
に示すように固定の電極は一定厚肉の誘電体より
なるシリンダ１３の外周面に付着した第１、第２
の導体膜１１′，１２′とし、可動の電極はそのシ
リンダ１３内で滑動自在な導体により形成したピ
ストン２１′としても同様の出力e0が得られる。
これは前記の矩形電極板を円筒形としたものに相
当する。そして、このシリンダ１３の両端を密封
し、ピストン２１′で仕切られる各室に選択的に
切換えられる流入・流出口を結合したものはピス
トン変位から流量を検出するピストン式の流量計
となる。 By the way, the fixed and movable electrodes 11, 12,
Reference numeral 21 has a flat plate shape, but as shown in FIG.
A similar output e 0 can be obtained even if the conductor films 11' and 12' are used, and the movable electrode is a piston 21' formed of a conductor that can slide freely within the cylinder 13.
This corresponds to the aforementioned rectangular electrode plate made into a cylindrical shape. The cylinder 13 is sealed at both ends, and the inflow and outflow ports which can be selectively switched are connected to the respective chambers partitioned by the piston 21' to form a piston-type flowmeter that detects the flow rate from the displacement of the piston.
発明が解決しようとする問題点
この種の変位検出器は、いずれも固定の電極と
可動の電極の両方にリード線を結合する必要があ
る。このため、可動の電極と連結された被検出体
の移動力が弱い場合は、そのリード線が変位に際
しての負荷となつて影響したり、また、繰返し移
動により破損したりする恐れがあり、結局、変位
方向の度々変化するものにおいては検出精度や耐
久性の面に問題点がある。Problems to be Solved by the Invention All of these types of displacement detectors require lead wires to be connected to both the fixed electrode and the movable electrode. For this reason, if the moving force of the object to be detected connected to the movable electrode is weak, the lead wire may act as a load during displacement and may be damaged due to repeated movement. However, in cases where the direction of displacement changes frequently, there are problems in terms of detection accuracy and durability.
これを解決するには、可動の電極のリード線を
除去し、他の手段により解決を図ることである
が、発振部との間のリード線を他の手段に置き換
えることは極めて困難であるので、出力側の可動
電極のリード線に対することになり、可動の電極
と常時接触しながら摺動する摺動子を介して信号
を取出すことが考えられる。しかしこの場合、摺
動子の数を少なくするためには、電極が一つの側
を可動電極体とし、それに対して摺動子を接触さ
せるようにすればよい。しかしながら、この場合
には、摺動子との接触圧の変動や摩耗等に伴なう
ノイズの混入が避けられない。 To solve this problem, remove the lead wire of the movable electrode and try to solve it by other means, but it is extremely difficult to replace the lead wire between it and the oscillating part with other means. This corresponds to the lead wire of the movable electrode on the output side, and it is conceivable to extract the signal through a slider that slides while being in constant contact with the movable electrode. However, in this case, in order to reduce the number of sliders, one side of the electrode may be used as a movable electrode body, and the slider may be brought into contact with the movable electrode body. However, in this case, the mixing of noise due to fluctuations in contact pressure with the slider, wear, etc. is unavoidable.
問題点を解決するための手段
本発明は、上記問題点を解決するために、ま
ず、一つの電極の方が可動電極となり、それには
リード線が付着されず、被検出体の変位に応じて
無負荷で可動とされ、それ自体からは出力を取り
出すことなく、電気的には誘導電極としての機能
を残置させ、出力の取り出し手段としては固定側
への誘導出力を発生させ、それにより、対応出力
を取出すようにしたものである。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention first makes one electrode movable, has no lead wire attached to it, and moves according to the displacement of the object to be detected. It is said to be movable without load, and does not extract output from itself, leaving its function as an electrically induced electrode, and as a means of extracting the output, it generates an induced output to the fixed side, thereby responding to the problem. It is designed to take out the output.
すなわち、この発明は、変位方向に間隔を有し
て配置された第１、第２の電極が固定の電極とな
り、その間隔内に充分な面積の出力電極が配置さ
れ、可動の電極は第１（第２）電極と間隔との合
計の長さとなり、変位の範囲内で常に出力電極と
重合関係を維持する。そして、出力は出力電極か
ら取り出される。 That is, in the present invention, the first and second electrodes arranged with an interval in the displacement direction serve as fixed electrodes, the output electrode with a sufficient area is arranged within the interval, and the movable electrode becomes the first electrode. (Second) It is the total length of the electrode and the interval, and always maintains an overlapping relationship with the output electrode within the range of displacement. Then, the output is taken out from the output electrode.
作 用
可動誘導電極が変位すると、その先端は第１の
電極内で動き、後端は第２の電極内で動き、第１
と第２の電極と可動誘導電極との重合面積は、相
互に増減する。一方、第１、第２の電極に対し、
180度位相差を有する交流波が供給されている。Effect When the movable induction electrode is displaced, its tip moves within the first electrode, its rear end moves within the second electrode, and the movable induction electrode moves within the first electrode.
The overlapping area of the second electrode and the movable induction electrode increases and decreases with respect to each other. On the other hand, for the first and second electrodes,
An alternating current wave with a 180 degree phase difference is supplied.
そして、可動誘導電極の変位の間、出力電極の
全面は常に可動誘導電極内で全面が重合してい
る。この結果、第１、第２の電極との間の静電誘
導、すなわちそれらとの重合面積に応じて変化す
る電荷に応じて可動電極内ではその合成された電
圧が発生し、さらに可動電極と出力電極間での静
電誘導により出力電極に電圧が生じ、その出力の
位相変化（または振幅変化）から変位ｘが求めら
れる。 During the displacement of the movable induction electrode, the entire surface of the output electrode always overlaps within the movable induction electrode. As a result, a combined voltage is generated within the movable electrode according to electrostatic induction between the first and second electrodes, that is, a charge that changes depending on the area of overlap between them, and further between the movable electrode and the movable electrode. A voltage is generated at the output electrodes due to electrostatic induction between the output electrodes, and the displacement x is determined from the phase change (or amplitude change) of the output.
しかして、出力電極は第１、第２の電極と共に
静止状態に保持される固定側の電極に形成されて
いるものであり、移動する可動誘導電極とは無関
係に出力の取出しが行なわれる。 Thus, the output electrode is formed on a fixed electrode that is held stationary together with the first and second electrodes, and the output is taken out regardless of the moving movable induction electrode.
次に、出力電極の大いさについて述べると、出
力電極から変位に対応した出力を得るには、出力
を測定する測定器の入力インピーダンスが、前記
第１、第２出力電極と可動誘導電極間の静電容量
によるインピーダンスより十分に大である必要が
あり、入力インピーダンスの大きさに応じて、出
力電極の面積を定めることになる。 Next, regarding the size of the output electrode, in order to obtain an output corresponding to the displacement from the output electrode, the input impedance of the measuring instrument that measures the output must be between the first and second output electrodes and the movable induction electrode. It needs to be sufficiently larger than the impedance due to capacitance, and the area of the output electrode is determined depending on the magnitude of the input impedance.
実施例
第１図は、電極を円筒状としたピストン式流量
計についての実施例であり、可動の電極の移動範
囲内で常に重合面積が不変となるように出力電極
を第１、第２の電極の中間に配置したものであ
る。固定の電極はシリンダ状、可動の電極はその
内部に配置されたピストン状に形成され、前記固
定の電極はガラス管１３の外周面に中央に間隔を
おいて両側に円筒状のクロム蒸着層が同じ長さで
形成され、それが第１、第２の誘導膜１１′，１
２′となり、前記の間隔内に無端帯状蒸着層が形
成され、それが出力導体膜となつている。また、
前記可動の電極はカーボングラフアイト製のピス
トン２１′であり、その長さは第１の導体膜１
１′の先端（図の左端）から第２を導体膜１２′の
先端（左端）までの大いさになつており、前記ガ
ラス管１３の内周面に滑動自在になつている。そ
の第１、第２の導体膜１１′，１２′には各別に
180度位相差を有する交流信号を供給する発振部
４０が結線されている。Embodiment Figure 1 shows an embodiment of a piston-type flowmeter with cylindrical electrodes. It is placed in the middle of the electrodes. The fixed electrode is formed in the shape of a cylinder, and the movable electrode is formed in the shape of a piston disposed inside the fixed electrode. The first and second induction films 11', 1 are formed to have the same length.
2', and an endless band-shaped vapor deposited layer is formed within the above-mentioned interval, which serves as an output conductor film. Also,
The movable electrode is a piston 21' made of carbon graphite, the length of which is equal to the length of the first conductor film 1.
The size is from the tip of the conductor film 1' (left end in the figure) to the tip (left end) of the second conductor film 12', and is slidable on the inner circumferential surface of the glass tube 13. The first and second conductive films 11' and 12' each have a
An oscillator 40 that supplies alternating current signals having a phase difference of 180 degrees is connected.
これにおいては、ピストン２１′が変位した場
合、第１、第２の導体膜１１′，１２′とピストン
２１′との重合面積が変位に対応して変化し、一
方が増大するのに対して他方が減少する。その
間、第１、第２の導体膜１１′，１２′の中間の出
力導体膜１４は、その全面が常時ピストン２１′
と対向することになる。したがつて、第１図のも
のの等価回路は第２図に示すように、前記第６図
のものの出力e0の取出経路に出力導体膜１４とピ
ストン２１′により形成される一定容量C0のコン
デンサ５４を介入させた回路となる。 In this case, when the piston 21' is displaced, the overlapping area of the first and second conductor films 11', 12' and the piston 21' changes corresponding to the displacement, and one increases, whereas the other increases. the other decreases. During this period, the entire surface of the output conductor film 14 located between the first and second conductor films 11' and 12' is always connected to the piston 21'.
You will be facing. Therefore, as shown in FIG. 2 , the equivalent circuit of the circuit shown in FIG . The circuit includes a capacitor 54.
この結果、ピストン２１′がガラス管１３内を
変位すると、ピストン２１′にはその変位ｘに応
じた出力e0が生じ、その出力e0は一定容量C0のコ
ンデンサを介して出力導体膜１４から外部にリー
ド線により導かれる。 As a result, when the piston 21' is displaced within the glass tube 13, an output e 0 is generated in the piston 21 ' according to the displacement It is led to the outside by a lead wire.
発明の効果
以上のとおりであり、この発明は変位を検出す
るに際し、変位と出力の直線的関係を変えること
なく固定の電極体から出力を取出すことができ、
それにより可動の電極体は可動が自由にでき、高
い信頼性のもとで変位の検出が行なえる。また、
出力取出線の破損原因が解消されるので、変位検
出器の耐久性が向上する。Effects of the Invention As described above, when detecting displacement, the present invention can extract output from a fixed electrode body without changing the linear relationship between displacement and output.
This allows the movable electrode body to move freely, and displacement can be detected with high reliability. Also,
Since the cause of damage to the output lead wire is eliminated, the durability of the displacement detector is improved.
第１図は本発明の実施例を示す一部回路記号を
含む正面断面図、第２図は第１図の等価回路図、
第３図は従来技術の斜視図、第４図は第３図の等
価回路図、第５図は第４図の出力波形図、第６図
は発振部の供給信号を180度位相差の交流信号と
したものの等価回路図、第７図は他の従来技術の
一部に回路記号を含んだ正面断面図である。
１１，１１′，１２，１２′，１４，１４′，２
１，２１′，２１″：電極。
FIG. 1 is a front sectional view including some circuit symbols showing an embodiment of the present invention, FIG. 2 is an equivalent circuit diagram of FIG. 1,
Fig. 3 is a perspective view of the conventional technology, Fig. 4 is an equivalent circuit diagram of Fig. 3, Fig. 5 is an output waveform diagram of Fig. 4, and Fig. 6 shows the supply signal of the oscillation section as an alternating current with a phase difference of 180 degrees. FIG. 7, which is an equivalent circuit diagram of a signal, is a front sectional view including circuit symbols as part of another conventional technique. 11, 11', 12, 12', 14, 14', 2
1, 21', 21'': Electrode.
Claims (1)
が間隔を有して配置され、この第１、第２の電極
は180度位相差の交流信号を送出する発振部と結
合され、第１、第２の電極間の間隔内に出力電極
が十分な面積を有して配置され、第１、第２の電
極面に平行にわずかな間隙を隔てて可動である誘
導電極は、第１の電極（第２の電極）と間隔との
合計の大いさであり、前記の出力電極から出力を
取出すようにしたところの静電容量式変位検出
器。1. First and second electrodes having a rectangular shape of the same size are arranged with a gap between them, and the first and second electrodes are coupled to an oscillation unit that sends an AC signal with a phase difference of 180 degrees, The output electrode is disposed with a sufficient area within the interval between the first and second electrodes, and the induction electrode is movable parallel to the first and second electrode surfaces with a slight gap between them. The capacitive displacement detector is the total size of the first electrode (second electrode) and the interval, and the output is taken out from the output electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25628085A JPS62116202A (en) | 1985-11-15 | 1985-11-15 | Electrostatic capacity type displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25628085A JPS62116202A (en) | 1985-11-15 | 1985-11-15 | Electrostatic capacity type displacement detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116202A JPS62116202A (en) | 1987-05-27 |
| JPH0451762B2 true JPH0451762B2 (en) | 1992-08-20 |
Family
ID=17290450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25628085A Granted JPS62116202A (en) | 1985-11-15 | 1985-11-15 | Electrostatic capacity type displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62116202A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2828631B2 (en) * | 1987-03-13 | 1998-11-25 | 三洋電機株式会社 | Manufacturing method of superconducting material |
| JPH01277717A (en) * | 1988-04-18 | 1989-11-08 | Schutz Im & Exporthandl Bv | Capacity displacement meter |
-
1985
- 1985-11-15 JP JP25628085A patent/JPS62116202A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62116202A (en) | 1987-05-27 |
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