JPH0452681U - - Google Patents
Info
- Publication number
- JPH0452681U JPH0452681U JP9482690U JP9482690U JPH0452681U JP H0452681 U JPH0452681 U JP H0452681U JP 9482690 U JP9482690 U JP 9482690U JP 9482690 U JP9482690 U JP 9482690U JP H0452681 U JPH0452681 U JP H0452681U
- Authority
- JP
- Japan
- Prior art keywords
- plunger
- curved surface
- orifice
- contact
- vacuum valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Valves (AREA)
- Magnetically Actuated Valves (AREA)
Description
第１図は本考案の１実施例に係わる真空バルブ
のプランジヤとオリフイスとの接触部の断面図、
第２図は従来のＯ−リングを使用した真空バルブ
のプランジヤとオリフイスとの接触部の断面図、
第３図は従来の円錐面同士の接触による真空シー
ルを使用した真空バルブのプランジヤとオリフイ
スとの接触部の断面図、第４図は従来の平面とエ
ツジの接触による真空シールを使用した真空バル
ブのプランジヤとオリフイスとの接触部の断面図
、第５図は従来の真空バルブの全体構成断面図を
示す。
１……プランジヤ、２……オリフイス、３……
Ｏリング、４……エツジ、５……試料溜、６……
ソレノイド、７……ベローズ。
FIG. 1 is a sectional view of the contact portion between the plunger and orifice of a vacuum valve according to an embodiment of the present invention;
Figure 2 is a cross-sectional view of the contact area between the plunger and orifice of a vacuum valve using a conventional O-ring.
Figure 3 is a cross-sectional view of the contact area between the plunger and orifice of a vacuum valve that uses a conventional vacuum seal that uses contact between conical surfaces, and Figure 4 shows a vacuum valve that uses a conventional vacuum seal that uses contact between flat surfaces and edges. FIG. 5 is a cross-sectional view of the contact portion between the plunger and the orifice, and FIG. 5 is a cross-sectional view of the overall configuration of a conventional vacuum valve. 1... Plunger, 2... Orifice, 3...
O-ring, 4...edge, 5...sample reservoir, 6...
Solenoid, 7...bellows.
Claims (1)
、これと対向する位置い配設したオリフイスとに
より真空シールを行なう真空バルブに於て、前記
プランジヤの先端形状を球面、楕円曲面、放物曲
面、双曲面、あるいは回転曲面等の曲面状としこ
れと接触するオリフイス側形状を円錐面状に構成
するか、又はプランジヤ先端形状を円錐面状とし
、これと接触するオリフイス側形状を曲面状に構
成したことを特徴とする真空バルブ。 In a vacuum valve that performs vacuum sealing using a plunger that moves by the drive of a solenoid and an orifice located opposite the plunger, the shape of the tip of the plunger may be spherical, elliptical, parabolic, hyperboloid, or The plunger has a curved surface such as a rotating curved surface, and the orifice side that comes into contact with this is configured as a conical surface, or the plunger tip has a conical shape and the orifice side that comes into contact with this is configured as a curved surface. vacuum valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9482690U JPH0452681U (en) | 1990-09-11 | 1990-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9482690U JPH0452681U (en) | 1990-09-11 | 1990-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0452681U true JPH0452681U (en) | 1992-05-06 |
Family
ID=31833076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9482690U Pending JPH0452681U (en) | 1990-09-11 | 1990-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452681U (en) |
-
1990
- 1990-09-11 JP JP9482690U patent/JPH0452681U/ja active Pending