JPH0452726Y2 - - Google Patents

Description

[Detailed Description of the Invention] A. Field of Industrial Application The present invention relates to a mechanism for finely adjusting the angle of parts of precision machines, such as mirrors in optical devices.

B. Prior Art FIG. 2 shows a conventional example. For example, mirrors used in Fourier transform infrared spectrophotometers (FTIR) must reflect incident light along the same optical path, so the mirror surface must be tilted so that it is perpendicular to the optical axis. need to be adjusted. As shown in FIG. 2, the surface of the mirror 1 is spaced from the reference plane N by α,
When the mirror table is tilted vertically by β, the mirror table 2 must be adjusted as shown in Figure C in Figure 2 to adjust the left and right tilt angle α.
A groove g1 is cut in the center, and as shown in the figure, the upper and lower parts are connected only through the notch A, and the structure is such that the mirror stand 2 bends around the notch A due to external force. There is. Therefore, when the adjustment screw 6 is rotated, the mirror stand 2 is distorted around the notch A, and as a result, the inclination angle of the mirror 1 attached to the mirror stand 2 changes. To adjust the vertical inclination angle β, a groove g2 is cut at the left end of the joint between the mounting base 5 and the mirror stand 2, as shown in Figure 2D, and the upper and lower connections in the figure are cut out. This is done only in part B, and the structure is such that the dressing table 2 is bent around the notch part B by an external force.
Therefore, when the adjusting screw 7 is rotated, the elastic force of the spring plate 4 is changed, and due to the elastic force, the diagonal line part of the mounting base 5 is distorted around the notch part B, and as a result, the mounting base 5 is not attached to the mirror base 2. This is done by changing the inclination angle of the mirror 1.

As mentioned above, in the past, all mirror angle adjustments were made mechanically using screws, which required hands to be placed inside the device, and it was very troublesome to constantly adjust the angle to the appropriate angle during measurement. , therefore,
Adjustments were only made during assembly, and even if the mirror surface deviated from the reference plane due to changes in the environment such as temperature changes after shipment, fine adjustments were not made, so measurement accuracy could deteriorate with use. Ta. Also,
There was a problem in that it took a lot of time to readjust to prevent this decline.

C. Problems to be Solved by the Invention The purpose of the invention is to solve the above-mentioned problems and to make it possible to easily and precisely adjust the angle of the mirror.

D. Means for solving the problem: A mirror is held in a swingable state, biased in at least one direction by an elastic force, and a piezoelectric element that expands and contracts in response to an electric signal presses the mirror against the biasing force. It was set up so that

E. Effect The present invention is an invention that controls the inclination of a mirror using a piezoelectric element that expands and contracts in response to electrical signals. A biasing body that holds the mirror in a swingable state and biases the mirror in one direction by the elastic force of a spring is provided, and a support body that supports the back surface of the mirror against the biasing force is provided. It consists of a piezoelectric element that expands and contracts when an electric signal is applied. When a voltage is applied to this piezoelectric element in one direction, the piezoelectric element stretches and pushes out the back surface of the mirror against the biasing force. Conversely, when a voltage is applied to the piezoelectric element in the opposite direction, the piezoelectric element contracts and the mirror is pushed back by the biasing force. In this way, as the piezoelectric element expands and contracts, the balance of forces supporting the mirror changes, and the mirror is swung according to the change in balance, changing its inclination. If the voltage applied to the piezoelectric element at the time of completion of adjustment is stored in the CPU, the angle of the mirror at the time of adjustment can be easily reproduced by applying the memorized voltage to the piezoelectric element at the time of measurement, and the measurement result can be easily reproduced. It is extremely easy to use because the mirror tilt can be adjusted to the optimal state even during measurement by feedback.

The above adjustment is done by electrical adjustment outside the device, which is much easier than adjusting by inserting your hand inside the device and turning screws, so readjustment is also easy and the device can be adjusted easily. It is also easy to maintain a good precision state at all times.

F. Embodiment FIG. 1 shows an embodiment of the present invention. In FIG. 1, 1 is a mirror, 2 is a mirror stand that holds the mirror 1, 3 is a holding shaft that holds the mirror stand 2, a part of the holding shaft is formed with a constriction to form a swinging part 3A, and the mirror stand 2 is a swinging part 3A. Moving part 3A
It is connected to a holding shaft so that it can swing vertically and horizontally. 4 is a vertical adjustment shaft, which is composed of three parts: an aluminum rod 4A, a piezoelectric element 4B, and a screw part 4C.
An aluminum rod and a piezoelectric element are slidably fitted into a hole provided below the holding shaft of the fine adjustment holder 8, and the threaded portion is screwed into the threaded portion of the same hole. Aluminum rod 4
The right end of A is pressed to the left by the screwing force of the screw portion 4C via the piezoelectric element 4B, and the left end is pressed against the back surface of the mirror stand 2. A horizontal adjustment shaft 5 has the same structure as the vertical adjustment shaft 4, and is fitted into a hole provided on the right side of the holding shaft of the fine adjustment holder 8. 6 is an elastic shaft for vertical fine adjustment, which includes a shaft portion 6A and a compression spring 6B.
It is composed of three parts: a holding shaft 3 and a threaded part 6C.
The shaft portion 6A and the compression spring 6B are slidably fitted into a hole provided at a position symmetrical to the vertical adjustment shaft 4, and the threaded portion 6C is screwed into the threaded portion of the same hole to provide compression. The spring 6B is compressed against elastic force. The left end of the shaft portion 6A is pressed against the back surface of the mirror stand 2 by the elastic force of the compression spring 6B. Reference numeral 7 denotes an elastic shaft for fine adjustment in the lateral direction, which consists of a shaft portion 7A, a compression spring 7B, and a threaded portion 7C.
A shaft 7A and a compression spring 7B are slidably fitted into a hole provided at a position symmetrical to the horizontal adjustment shaft 5 with respect to the holding shaft 3. It is screwed into the threaded portion and compresses the compression spring 7B against the elastic force. The left end of the shaft portion 7A is pressed against the mirror stand 2 by the elastic force of the compression spring 7B.

In the above configuration, when an electric signal is applied to the piezoelectric element 4B built in the vertical adjustment shaft 4, the piezoelectric element 4B expands and contracts against the elastic force of the compression spring 6B. Due to its expansion and contraction, the mirror moves to the swinging part 3A of the holding shaft 3.
The mirror rotates vertically using the mirror as a fulcrum, changing the vertical tilt of the mirror. Similarly, an electric signal is applied to the piezoelectric element 5B built in the lateral adjustment shaft 5 to change the lateral inclination of the mirror.

The aluminum rods built into the adjustment shafts 4 and 5 should be used in combination with aluminum, which has a larger temperature coefficient than the material of the holding shaft 3, since the piezoelectric element has a smaller temperature coefficient than the material of the holding shaft 3 (steel). This is to allow the adjustment shafts 4 and 5 to expand and contract in the same way as the holding shaft 3 in response to temperature changes, so that the tilt of the mirror does not change in response to temperature changes. If so, it does not have to be limited to aluminum. For example, brass is also possible.

In this embodiment, the swinging portion 3A of the holding shaft 3 has a notch structure, but the same effect can be obtained even if the swinging portion 3A is a jointed structure that can be rotated vertically and horizontally.

G. Effects According to the present invention, there is no need to perform extremely difficult operations such as putting one's hand inside the device and turning a screw, and by adjusting the electrical adjustment part outside the device, the tilt of the mirror can be easily adjusted. Since it can now be controlled, the accuracy of mirror installation can be easily improved.

[Brief explanation of the drawing]

Fig. 1 shows one embodiment of the present invention; Fig. A is a front view;
Figure B is a side sectional view, and Figure 2 is a plan view C and side view D of a conventional example. 1...Mirror, 2...Mirror stand, 3...Holding shaft, 4...
Vertical adjustment axis, 5... Horizontal adjustment axis, 6... Elastic axis for vertical fine adjustment, 7... Elastic axis for horizontal fine adjustment, 8... Fine adjustment holder, 3A... Swinging part, 4
A, 5A... Aluminum rod, 4B, 5B... Piezoelectric element, 4C, 5C... Threaded portion, 6A, 7A... Shaft portion, 6B, 7B... Compression spring, 6C, 7... Threaded portion.

Claims (1)

[Scope of utility model registration request] A biasing body that holds the mirror in a swingable state and biases the back surface of the mirror in at least one direction with elastic force, and a support body that supports the back surface of the mirror against the biasing force are provided. , the support body is composed of a piezoelectric element that can be expanded and contracted in the same direction as the biasing force, and a shaft that is made of a material that has a different coefficient of thermal expansion than the member that holds the mirror in a swingable state, and is connected in a straight line. The mirror angle fine adjustment mechanism is characterized by compensating for the effects of temperature expansion.