JPH0453061U - - Google Patents
Info
- Publication number
- JPH0453061U JPH0453061U JP9692490U JP9692490U JPH0453061U JP H0453061 U JPH0453061 U JP H0453061U JP 9692490 U JP9692490 U JP 9692490U JP 9692490 U JP9692490 U JP 9692490U JP H0453061 U JPH0453061 U JP H0453061U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- target
- workpiece
- conveyance
- conveyance means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692490U JPH0453061U (fr) | 1990-09-13 | 1990-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692490U JPH0453061U (fr) | 1990-09-13 | 1990-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453061U true JPH0453061U (fr) | 1992-05-06 |
Family
ID=31836858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9692490U Pending JPH0453061U (fr) | 1990-09-13 | 1990-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453061U (fr) |
-
1990
- 1990-09-13 JP JP9692490U patent/JPH0453061U/ja active Pending
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