JPH0453068U - - Google Patents
Info
- Publication number
- JPH0453068U JPH0453068U JP9275290U JP9275290U JPH0453068U JP H0453068 U JPH0453068 U JP H0453068U JP 9275290 U JP9275290 U JP 9275290U JP 9275290 U JP9275290 U JP 9275290U JP H0453068 U JPH0453068 U JP H0453068U
- Authority
- JP
- Japan
- Prior art keywords
- power
- molecular beam
- source
- power supply
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は、本考案の一実施例のＫセル給電装置
の回路構成図、第２図は、Ｋセル温度と必要電力
との関係模式図、第３図は、停電時のＫセル温度
変化の模式図である。
１……Ｋセル電源回路、２……Ｋセル、３……
無停電電源、４……トランス、５……切替器、６
……停電検出回路。
Fig. 1 is a circuit configuration diagram of a K cell power supply device according to an embodiment of the present invention, Fig. 2 is a schematic diagram of the relationship between K cell temperature and required power, and Fig. 3 is a diagram of K cell temperature change during a power outage. FIG. 1...K cell power supply circuit, 2...K cell, 3...
Uninterruptible power supply, 4...Transformer, 5...Switching device, 6
...Power failure detection circuit.
Claims (1)
る電源から成る分子線源給電装置において、前記
電源の停電を検出する手段と、停電時に電力を供
給する無停電電源装置と、停電時の電力を通常加
熱時より低く設定する手段を備え、前記無停電電
源の最大出力を通常の分子線加熱時よりも小さく
したことを特徴とする分子線源給電装置。 A molecular beam source power supply device comprising a molecular beam source and a power source for supplying power to a heater in the molecular beam source, comprising means for detecting a power outage of the power source, an uninterruptible power supply device that supplies power during a power outage, and a power supply during a power outage. What is claimed is: 1. A molecular beam source power supply device, comprising: means for setting the maximum output of the uninterruptible power source to be lower than that during normal molecular beam heating;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9275290U JPH0453068U (en) | 1990-09-05 | 1990-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9275290U JPH0453068U (en) | 1990-09-05 | 1990-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453068U true JPH0453068U (en) | 1992-05-06 |
Family
ID=31829451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9275290U Pending JPH0453068U (en) | 1990-09-05 | 1990-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453068U (en) |
-
1990
- 1990-09-05 JP JP9275290U patent/JPH0453068U/ja active Pending
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