JPH0453507U - - Google Patents
Info
- Publication number
- JPH0453507U JPH0453507U JP9516190U JP9516190U JPH0453507U JP H0453507 U JPH0453507 U JP H0453507U JP 9516190 U JP9516190 U JP 9516190U JP 9516190 U JP9516190 U JP 9516190U JP H0453507 U JPH0453507 U JP H0453507U
- Authority
- JP
- Japan
- Prior art keywords
- beam splitter
- optical fiber
- half beam
- output end
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第1図は本考案の一実施例を示す斜視図、第2
図は従来の光位置検出センサの一例を示すブロツ
ク図である。
1……ハーフビームスプリツタ、2……第一ナ
イフエツジ、3……第一光フアイバ、4……第一
拡散板、5……第一フオトマルチプライヤ、6…
…第二ナイフエツジ、7……第二光フアイバ、8
……第二拡散板、9……第二フオトマルチプライ
ヤ、10,13,14……光軸、11……2分割
センサ、12……アンプ。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a block diagram showing an example of a conventional optical position detection sensor. DESCRIPTION OF SYMBOLS 1... Half beam splitter, 2... First knife edge, 3... First optical fiber, 4... First diffuser, 5... First photo multiplier, 6...
...Second knife edge, 7...Second optical fiber, 8
...Second diffuser plate, 9...Second photo multiplier, 10, 13, 14...Optical axis, 11...2-split sensor, 12...Amplifier.
Claims (1)
スプリツタを通過した光の光軸にエツジを接する
第一ナイフエツジと、前記第一ナイフエツジを通
過した光を入射する第一光フアイバと、前記第一
光フアイバの出射端に設けた第一拡散板と、前記
第一拡散板を挟んで前記第一光フアイバの出射端
と対向する位置に設けた第一フオトマルチプライ
ヤと、前記ハーフビームスプリツタで分離した光
の光軸にエツジを接し前記ハーフビームスプリツ
タに入射する前の光の光軸に関して前記第一ナイ
フエツジと対称の位置に設けた第二ナイフエツジ
と、前記第二ナイフエツジを通過した光を入射す
る第二光フアイバと、前記第二光フアイバの出射
端に設けた第二拡散板と、前記第二拡散板を挟ん
で前記第二光フアイバの出射端と対向する位置に
設けた第二フオトマルチプライヤとを備えること
を特徴とする光位置検出センサ。 a half beam splitter, a first knife edge whose edge is in contact with the optical axis of the light that has passed through the half beam splitter, a first optical fiber into which the light that has passed through the first knife edge is incident, and a first optical fiber. Light separated by a first diffuser plate provided at the output end, a first photo multiplier provided at a position facing the output end of the first optical fiber across the first diffuser plate, and the half beam splitter. a second knife edge, the edge of which is in contact with the optical axis of the half beam splitter, and which is provided at a position symmetrical to the first knife edge with respect to the optical axis of the light before entering the half beam splitter; two optical fibers, a second diffusion plate provided at the output end of the second optical fiber, and a second photomultiplier provided at a position facing the output end of the second optical fiber with the second diffusion plate in between. An optical position detection sensor comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9516190U JPH0453507U (en) | 1990-09-11 | 1990-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9516190U JPH0453507U (en) | 1990-09-11 | 1990-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453507U true JPH0453507U (en) | 1992-05-07 |
Family
ID=31833673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9516190U Pending JPH0453507U (en) | 1990-09-11 | 1990-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453507U (en) |
-
1990
- 1990-09-11 JP JP9516190U patent/JPH0453507U/ja active Pending
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