JPH0454481Y2 - - Google Patents
Info
- Publication number
- JPH0454481Y2 JPH0454481Y2 JP3136085U JP3136085U JPH0454481Y2 JP H0454481 Y2 JPH0454481 Y2 JP H0454481Y2 JP 3136085 U JP3136085 U JP 3136085U JP 3136085 U JP3136085 U JP 3136085U JP H0454481 Y2 JPH0454481 Y2 JP H0454481Y2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- flexible plate
- driving
- micro
- laminated piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 38
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
- Control Of Position Or Direction (AREA)
Description
【考案の詳細な説明】
（考案の技術分野）
本考案は、精密変位を得る、積層型超音波部材
を利用した微小駆動部品の微小変位を、その変位
精度を著しく低下させる事なくその変位量を、変
位方向と直角方向に拡大伝達する構造に係るもの
である。[Detailed Description of the Invention] (Technical Field of the Invention) The present invention enables minute displacement of minute drive parts using laminated ultrasonic members to obtain precise displacement without significantly reducing the displacement accuracy. This relates to a structure that expands and transmits in a direction perpendicular to the displacement direction.
（考案の技術的背景）
精密変位を得る微小駆動部品として、例えば圧
電材料を用いた積層型圧電セラミツクや、バイモ
ルフ型圧電セラミツクが有るが、いずれも圧電効
果を利用して0.01μｍ単位の微小変位を、高精度
に作り出せるため、機械系の精度微小駆動に適し
ている。(Technical background of the invention) There are, for example, laminated piezoelectric ceramics using piezoelectric materials and bimorph piezoelectric ceramics as minute drive parts that can obtain precise displacement, but both of them utilize the piezoelectric effect to produce minute displacements in units of 0.01 μm. can be produced with high precision, making it suitable for precision minute drive in mechanical systems.
（背景技術の問題点）
ところが、上記圧電セラミツクには、夫々次の
様な問題点がある。(Problems with Background Art) However, the piezoelectric ceramics described above have the following problems.
まずバイモルフ型圧電セラミツクの場合、変位
量は数百μｍと大きいが、発生力は数十ｇ／cm2程
度しか出せない、そこで発生力を上げるために、
バイモルフ型圧電セラミツクの幅方向形状を広く
取ることにより機械的に発生力を増加する方法が
あるが、この方法は変位の応答性能劣化、構造の
大型化による点荷重時のセラミツク形状の撓み変
形、外筺の大型化など新たな問題がでてくる。 First of all, in the case of bimorph type piezoelectric ceramics, the amount of displacement is large, several hundred μm, but the generated force can only be produced on the order of several tens of g/ cm2 . Therefore, in order to increase the generated force,
There is a method to mechanically increase the generated force by widening the widthwise shape of bimorph piezoelectric ceramics, but this method causes deterioration of displacement response performance, bending deformation of the ceramic shape under point load due to larger structure, New problems arise, such as increasing the size of the outer casing.
次に積層型圧電セラミツクの場合、発生力は数
百Kg／cm2と大きいが、変位量は百枚積層で、十数
μｍ程度と小さい、そこで第４図の様にテコを使
つて変位量拡大を行つたり、積層枚数を増すこと
により変位量の増大を行つている。 Next, in the case of laminated piezoelectric ceramics, the generated force is large, several hundred kg/ cm2 , but the amount of displacement is small, about 10-odd micrometers for 100 layers laminated.Therefore, as shown in Figure 4, the amount of displacement is determined using a lever. The amount of displacement is increased by enlarging or increasing the number of laminated sheets.
第４図は従来利用されているテコによる変位量
拡大の説明図である。同図において２は積層型圧
電セラミツクであり、５は変位拡大用のテコ、６
はその支点部である。 FIG. 4 is an explanatory diagram of expanding the amount of displacement using a conventionally used lever. In the figure, 2 is a laminated piezoelectric ceramic, 5 is a lever for increasing displacement, and 6 is a laminated piezoelectric ceramic.
is its fulcrum.
この方法では、テコの形状は単純であつが、応
答速度を早くするために、テコ支点部６を固定部
に固着する必要がある、その結果支点付近を中心
に歪が集中するので、機械的寿命に問題があるば
かりでなく拡大変位方向が円弧を描くこと、拡大
率はテコの長さに比例するため、例えば10倍の拡
大を行う場合でも、支点から力点までの長さを５
mmとして、テコの全長が50mmにもなり変位拡大率
に対する構造の大型化が著しく、延いては変位拡
大の応答速度の劣化や外筺の大型化等の問題が出
てくる。 In this method, the shape of the lever is simple, but in order to increase the response speed, it is necessary to fix the lever fulcrum part 6 to a fixed part.As a result, strain concentrates around the fulcrum, so the mechanical Not only is there a problem with the service life, but the direction of expansion displacement draws a circular arc, and the expansion rate is proportional to the length of the lever.
mm, the total length of the lever becomes 50 mm, which significantly increases the size of the structure relative to the displacement magnification rate, which leads to problems such as deterioration of the response speed of displacement expansion and an increase in the size of the outer casing.
（考案の目的）
本考案は上記事情に鑑みてなされたもので、変
位量の小さな、積層型超音波部材を利用した微小
駆動部品の変位量拡大を、単純で且つ機械的寿命
の長い構造で提供しようとするものである。(Purpose of the invention) The present invention was made in view of the above circumstances, and it is possible to increase the displacement of a micro-drive component using a laminated ultrasonic member with a small displacement using a simple structure with a long mechanical life. This is what we are trying to provide.
本考案による微小変位拡大伝達装置は、駆動面
の反対面を固定した積層型超音波部材を利用した
微小駆動部品の駆動面と、対向する固定面又は、
同一構造の微小駆動部品の駆動面に挟み込まれた
状態の可撓板中央部が駆動力と直角方向に変位す
る様に設置された構造を特徴とするものである。 The micro-displacement magnification transmission device according to the present invention includes a driving surface of a micro-driving component using a laminated ultrasonic member with the opposite surface of the driving surface fixed, and a fixed surface facing the driving surface or
This device is characterized by a structure in which the central portion of the flexible plate, which is sandwiched between the driving surfaces of micro-driving components having the same structure, is disposed so as to be displaced in a direction perpendicular to the driving force.
上記本考案による微小変位の拡大は、上記可撓
板の微小駆動部品面に接する端辺が、対向面方向
に押されることにより得られる可撓板の歪により
可撓板の中央部が、上方又は下方に変位すること
で実現される。 The magnification of the minute displacement according to the present invention is achieved by pushing the edge of the flexible plate in contact with the surface of the minute drive component toward the opposing surface, causing the central part of the flexible plate to move upward. Or it can be realized by displacing it downward.
この構造において、可撓板の形状は単純である
ため、加工精度を向上させることは容易であり、
変位拡大構造の小型化に適している。 In this structure, the shape of the flexible plate is simple, so it is easy to improve processing accuracy.
Suitable for downsizing displacement amplifying structures.
又、可撓板の構造上、歪曲時の歪配分が、可撓
板全体に分散され、機械的寿命を長くすることが
出きるだけでなく、可撓板の歪曲方向を反転させ
るだけで、拡大変位方向を反転できる。 Moreover, due to the structure of the flexible plate, the strain distribution during distortion is distributed throughout the flexible plate, which not only extends the mechanical life but also allows the bending direction of the flexible plate to be reversed. The expansion displacement direction can be reversed.
更に、微小駆動部品として積層型圧電セラミツ
クを使用した場合、電圧制御により可撓板の初期
歪曲を設定できるので、可撓板端辺の磨滅に対す
る補正も容易である。 Furthermore, when a laminated piezoelectric ceramic is used as the micro-driving component, the initial distortion of the flexible plate can be set by voltage control, so it is easy to compensate for wear on the edges of the flexible plate.
（考案の実施例）
以下に本考案を第１図乃至第３図に示す実施例
に基いて詳細に説明する。(Embodiments of the invention) The invention will be described in detail below based on the embodiments shown in FIGS. 1 to 3.
本考案は、プリンタ装置のワイヤ式印字ヘツド
や、ラスタ方式のインクジエツトプロツタ用空気
弁など、駆動量が数百μｍ程度で、応答速度の要
求される装置に適しているが、第１図は、精密空
気弁の弁駆動に本考案を実施例した例である。 The present invention is suitable for devices such as wire-type printing heads of printers and air valves for raster-type inkjet plotters, which have a driving amount of several hundred μm and require response speed. This is an example in which the present invention is applied to the valve drive of a precision air valve.
この精密空気弁は、スプレー式のインクジエツ
トペンに供給する描画用圧縮空気を制御もので、
精密で且つ速度な応答性能が要求される。 This precision air valve controls the compressed air for drawing supplied to the spray-type inkjet pen.
Accurate and fast response performance is required.
即ち１は可撓弾性板であつて、この可撓弾性板
１の両端は、積層型圧電セラミツクからなる一対
の微小駆動部品２の駆動面２′にピポツト手段
１′を介して支持されている。３は可撓弾性板１
の板面に対して直角方向に突設されている弁であ
つて、この弁３は、外筺４に設けた通気路を４′
を開閉する位置に位置されているものである。 That is, reference numeral 1 denotes a flexible elastic plate, and both ends of the flexible elastic plate 1 are supported via pivot means 1' on drive surfaces 2' of a pair of micro drive parts 2 made of laminated piezoelectric ceramics. . 3 is a flexible elastic plate 1
This valve 3 protrudes in a direction perpendicular to the plate surface of the valve 3, and this valve 3 connects a ventilation passage provided in an outer casing 4 to 4'.
It is located at the position where it opens and closes.
上記実施例において、その作用を第２図の変位
拡大原理図で説明すると次の通りである。 In the above embodiment, the operation will be explained as follows using the diagram of the principle of displacement magnification shown in FIG.
まず第２図Ａの様に積層型圧電セラミツク２に
外部電界が加わらない状態では、可撓板１には積
層型圧電セラミツクからの力が加わらないので歪
曲は起きない。 First, when no external electric field is applied to the laminated piezoelectric ceramic 2 as shown in FIG. 2A, no force is applied to the flexible plate 1 from the laminated piezoelectric ceramic, so no distortion occurs.
次に積層型圧電セラミツク２に外部電界が加わ
ると、積層型圧電セラミツク２は、可撓板１を挟
み付ける様に中心方向へ伸び、その結果可撓板１
は、同図Ｂの様に、両端辺が中央方向に押され、
アーチ状に歪曲する、この時、積層型圧電セラミ
ツク２の変位量αに比べ、可撓板１の端辺から中
心までの長さが、充分に長ければ、同図Ｃの様
に可撓板１の歪形状は付似され、可撓板１の中央
部が、下方にΔlだけ変位する。 Next, when an external electric field is applied to the laminated piezoelectric ceramic 2, the laminated piezoelectric ceramic 2 stretches toward the center so as to sandwich the flexible plate 1, and as a result, the flexible plate 1
As shown in figure B, both end sides are pushed toward the center,
At this time, if the length from the edge of the flexible plate 1 to the center is sufficiently long compared to the displacement α of the laminated piezoelectric ceramic 2, the flexible plate 1 will be distorted in an arch shape as shown in FIG. The distorted shape of the flexible plate 1 is similar, and the center portion of the flexible plate 1 is displaced downward by Δl.
この時の拡大変位量Δlは、積層型圧電セラミ
ツク２の変位量をα、可撓板１の端辺から中央ま
での長さをｌ、歪曲により発生した積層型圧電セ
ラミツク２の変位方向と、可撓板１との角度をθ
とすれば、次式で表わされる。 The enlarged displacement amount Δl at this time is defined as: α is the displacement amount of the laminated piezoelectric ceramic 2, l is the length from the edge to the center of the flexible plate 1, and is the direction of displacement of the laminated piezoelectric ceramic 2 caused by distortion. The angle with flexible plate 1 is θ
Then, it is expressed by the following formula.
θ＝COS-1（（ｌ−α）／ｌ）
Δl＝ｌ×SIN（COS-1（（ｌ−α／ｌ））
これにｌ＝5000μｍとして実際の変位量αを代
入してみると、α＝1μｍでΔl＝100μｍ、α＝10μ
ｍでΔl＝316μｍとなり、θが小さい時ほど大き
な拡大率が得られる。 θ=COS -1 ((l-α)/l) Δl=l×SIN(COS -1 ((l-α/l)) When l=5000μm and substitute the actual displacement α into this, we get α=1μm, Δl=100μm, α=10μ
m, Δl=316 μm, and the smaller θ is, the larger the magnification can be obtained.
又、上式からも明白な様に、ｌの設定により、
拡大率を可変することもできる。 Also, as is clear from the above equation, depending on the setting of l,
It is also possible to vary the magnification rate.
第３図は、本実施例の精密空気弁の特性を積層
型圧電セラミツクの変位量αを基準に、本考案に
よる拡大変位量Δlと空気量について示したもの
である。 FIG. 3 shows the characteristics of the precision air valve of this embodiment with respect to the enlarged displacement amount Δl and the air amount according to the present invention, based on the displacement amount α of the laminated piezoelectric ceramic.
尚、本実施例での弁機構は、弁座パイプ径φ2.2
mm、円錐形制御弁の頂点角90°、空気圧２Kg／cm2
であり可撓板には予め拡大変位方向に200μｍの
バイアス歪曲を付けてある。 The valve mechanism in this example has a valve seat pipe diameter of φ2.2.
mm, apex angle of conical control valve 90°, air pressure 2Kg/cm 2
A bias distortion of 200 μm is applied to the flexible plate in advance in the direction of expansion displacement.
次に駆動力であるが、駆動力については、可撓
板１の材質、厚み形状を変えるだけで、小さく
も、大きくも自由に対応できる。 Next, regarding the driving force, the driving force can be made small or large by simply changing the material, thickness, and shape of the flexible plate 1.
尚、厚みを厚くすることによる積層型圧電セラ
ミツクの変位量減少については、その発生力の大
きさから見て問題にならないばかりでなく、積層
型圧電セラミツクの特性上、かえつて機械的変換
効率を向上させる効果がある。 It should be noted that the reduction in displacement of the laminated piezoelectric ceramic due to the increase in thickness is not only not a problem considering the magnitude of the generated force, but also due to the characteristics of the laminated piezoelectric ceramic, it may actually reduce the mechanical conversion efficiency. It has the effect of improving
（考案の概要）
以上のように、本考案は駆動面の反対面を固定
した積層型超音波部材を利用した微小駆動部品の
駆動面と、対向する固定面又は、同一構造の微小
駆動部品の駆動面に、挟み込まれた状態の可撓板
中央部が、駆動力と直角方向に変位する様に設置
された構造を特徴とした、機械的変位拡大伝達装
置である。(Summary of the invention) As described above, the present invention is based on the driving surface of a micro-drive component using a laminated ultrasonic member with the opposite surface of the drive surface fixed, and the opposing fixed surface or micro-drive component with the same structure. This is a mechanical displacement magnification transmission device characterized by a structure in which the central portion of the flexible plate sandwiched between the driving surfaces is disposed so as to be displaced in a direction perpendicular to the driving force.
（考案の効果）
以上詳述した様に、本考案によれば、積層型超
音波部材を利用した微小駆動部品が従来抱えてい
た、発生力と変位量のアンバランスによる利用範
囲の限界を簡単で且つ安価に打開することがで
き、微小駆動部品の持つ特長を充分に発揮するこ
とが可能となるため、微細な位置合せ制御を行う
Ｘ−Ｙテーブルのバ−ニア機構、タイプライター
の印字機構、各種バルブ等、精密駆動装置への応
用範囲が広がり、顕著な効果を奏するものであ
る。(Effects of the invention) As detailed above, according to the invention, the limitations in the range of use due to the unbalance between the generated force and the amount of displacement, which conventionally existed in micro-drive parts using laminated ultrasonic members, can be easily overcome. The vernier mechanism of the X-Y table, which performs fine positioning control, and the printing mechanism of typewriters, because it can be achieved at a low cost and make full use of the features of minute drive parts. , various valves, etc., and the range of application to precision drive devices is expanded, and significant effects are achieved.
第１図Ａは本考案の実施例である精密空気弁装
置の断面図であり、同図Ｂはその構造の内本考案
に係る弁駆動構造の斜視図である。第２図は、本
考案の可撓板による変位量拡大の原理図であり、
同図はＡは定常状態、同図Ｂは歪曲状態、同図Ｃ
は歪曲時の機械的寸法変化の付似図である。第３
図は本考案実施例による精密空気弁の空気量特性
と、変位拡大特性の関係を示した特性図である。
第４図は、積層型圧電セラミツクの従来使われて
いるテコ利用の変位拡大方法の一例である。
１……可撓板、２……積層型圧電セラミツク、
３……円錐形制御弁、４……外筺、５……拡大用
テコ、６……拡大用テコ支点部。
FIG. 1A is a sectional view of a precision pneumatic valve device according to an embodiment of the present invention, and FIG. 1B is a perspective view of a valve drive structure according to the present invention. FIG. 2 is a diagram showing the principle of increasing displacement using the flexible plate of the present invention.
In the same figure, A is a steady state, B is a distorted state, and C is a distorted state.
is a similar diagram of mechanical dimensional changes during distortion. Third
The figure is a characteristic diagram showing the relationship between the air amount characteristic and the displacement expansion characteristic of the precision air valve according to the embodiment of the present invention.
FIG. 4 is an example of a conventional method for increasing the displacement of laminated piezoelectric ceramics using a lever. 1...Flexible plate, 2...Laminated piezoelectric ceramic,
3...Conical control valve, 4...Outer casing, 5...Lever for expansion, 6...Lever fulcrum for expansion.
Claims (1)
利用した微小駆動部品の駆動面と、対向する固定
面又は、同一構造の微小駆動部品の駆動面に、狭
み込まれた状態の可撓板中央部が、駆動力と直角
方向に変位する様に配置された構造を特徴とし
た、微小変位拡大伝達装置。 The driving surface of a micro-driving component using a laminated ultrasonic member with the opposite surface of the driving surface fixed, and the opposing fixed surface or the flexible drive surface of a micro-driving component having the same structure. A micro-displacement magnification transmission device characterized by a structure in which the central part of the plate is displaced in a direction perpendicular to the driving force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3136085U JPH0454481Y2 (en) | 1985-03-05 | 1985-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3136085U JPH0454481Y2 (en) | 1985-03-05 | 1985-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147405U JPS61147405U (en) | 1986-09-11 |
| JPH0454481Y2 true JPH0454481Y2 (en) | 1992-12-21 |
Family
ID=30531898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3136085U Expired JPH0454481Y2 (en) | 1985-03-05 | 1985-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0454481Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2792667B2 (en) * | 1989-03-09 | 1998-09-03 | 株式会社日立製作所 | Vibration suppression device for plate-like flexible structures |
-
1985
- 1985-03-05 JP JP3136085U patent/JPH0454481Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61147405U (en) | 1986-09-11 |
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