JPH045507A - Shape measuring instrument - Google Patents

Abstract

PURPOSE:To remove shape data on the overlap part of respective measured parts of a body to be measured which are formed when the measuring instrument is moved and installed by providing plural marks so that specific surfaces are formed at the respective measurement parts of the body to be measured, and measuring the shapes of the respective measurement parts so that those marks are included. CONSTITUTION:A photosensor part 2 is moved on the body 1 to be measured in parallel in an X-axial direction to measure variation in the distance between the photosensor part 2 and the body 1 to be measured at constant intervals in the X-axial direction, and supplies measurement data to a 1st arithmetic part 3. The arithmetic part 3 calculates the quantity of displacement between the photosensor part 2 and the body 1 to be measured. After the measurement in the X-axial direction is completed, the photosensor 2 moves on the body 1 to be measured by a constant quantity in parallel in a Y-axial direction to take measurements. Thus, said operation is repeated and measurement data are stored in a 2nd arithmetic part 5. The arithmetic part 5 calculates the shape of the entire surface of the object body 1 from the shape data on the respective parts. At this time, the data are put together in one having a border at the parts connecting the centers of the marks 14 at the respective parts. Consequently, overlap shape data are removed at adjacent parts and the discontinuity of the measurement data is removed.

Description

[Detailed Description of the Invention] [Industrial Field of Application] This invention relates to a shape measuring device, and in particular, since the object to be measured is wide, it cannot be measured using only the measurable range of the shape measuring device.
Shape measurement data at the boundary between each measurement part, which is generated when the shape measurement device is moved multiple times to perform shape measurement and the shape of the entire surface of the object to be measured is calculated based on the shape data input at each measurement part. The present invention relates to a non-contact type shape measuring device that can suppress shape calculation errors due to discontinuity as much as possible.

[Prior art] Figure 4 shows, for example, "How to use process sensors as seen in practical examples J1981 Measurement / Separate volume (279-28)" published by Kogyo Gijutsusha.
This is a configuration diagram showing a laser type displacement meter as a conventional shape measuring device shown on page 0), in which (1) shows an object to be measured having a predetermined shape, and (2) shows an object to be measured (1). The optical sensor section (3) is arranged to irradiate a laser beam onto the target and detect the reflected light, and the optical sensor section (3) is connected to the optical sensor section (2) via wiring (4). The optical sensor part (2
) and the object to be measured (1), the first calculation unit (5) is connected to the first calculation unit (3) via the wiring (6), and the first calculation unit (3) ) converts the calculated displacement amount into the shape of the object to be measured (1), and (7) moves the optical sensor section (2) in the X-axis direction parallel to the object to be measured (1). The X-axis moving mechanism (8) is a Y-axis moving mechanism that moves the optical sensor section (2) in the Y-axis direction parallel to the object to be measured (1). In addition, the second calculation unit (5) is a moving mechanism (
7) and (8) via wires (11) and (12), respectively, and receives position information from the moving mechanisms (7) and (8), and supplies control information to them.

Next, the operation of the conventional shape measuring device shown in FIG. 4 will be explained. When the object to be measured (1) whose shape is to be measured is positioned relative to the optical sensor section (2) as shown in Fig. 4, the laser beam (9) is emitted from the optical sensor section (2) onto the object
1), and the reflected light (10) is detected by the optical sensor section (2). This reflected light (10) is transmitted to the optical sensor section (
2) The detection points to be detected are the optical sensor part (2) and the object to be measured (
1), the optical sensor section (2) converts this displacement amount La into an electrical signal, and the first calculation section (3) converts this electrical signal between the optical sensor section (2) and the object to be measured. (1)
Detected as the distance from

The optical sensor section (2) is moved in the X-axis direction and the Y-axis direction parallel to the object to be measured (1) by the mobile devices ti (7) and (8),
Since changes in the surface shape of the object to be measured (1) directly appear as changes in the distance between the optical sensor section (2) and the object to be measured (1), the second calculation is performed based on the data of this distance change. Part (5
) the shape of the object to be measured (1) is calculated.

[Problems to be Solved by the Invention] However, in the conventional shape measuring device, the area to be measured of the object to be measured (1) is larger than the area to be measured by moving the optical sensor section (2) using the moving mechanisms (7) and (8). If it is wide, the object to be measured (1)
The entire surface of the object to be measured (1) is divided into multiple parts within the area that can be measured by the shape measuring device, and a support mechanism (not shown) is installed for each part. The shape data measured in the part is the object to be measured (1)
It is necessary to integrate the entire surface of the object to be measured (1), but because the measuring device cannot detect the boundaries between the divided parts, shape data may overlap or data may be missing at the boundaries. There is a problem in that the continuity of the shape data cannot be maintained, and this results in an error in the shape measurement of the entire surface of the object to be measured (1).

This invention was made to solve the above-mentioned problems, and it suppresses the occurrence of discontinuities in the shape data of the entire surface of the object to be measured due to the moving and installation of the measuring device, and enables highly accurate shape measurement over the entire surface of the object to be measured. The purpose of this invention is to obtain a shape measuring device that can perform measurements.

[Means for Solving the Problems] A shape measuring device according to the present invention includes an optical sensor section arranged to irradiate a measured object with a laser beam and detect the reflected light, and a device connected to the optical sensor section. a first calculating section that calculates the amount of displacement between the optical sensor section and the object to be measured based on the amount of displacement between the detection point of the reflected light detected by the optical sensor section and the reference detection point; connected to the arithmetic unit, and connected to the first
a second calculation unit that converts the amount of displacement calculated by the calculation unit into the shape of the object to be measured; and a second calculation unit that is controlled by the second calculation unit to move the optical sensor unit parallel to the object to be measured in the comprising a moving mechanism section for moving in the axial direction, and a plurality of marks provided so as to form a predetermined surface on each measurement portion of the object to be measured, and having a predetermined thickness that can be detected by the optical sensor section, The shape of each measurement portion is measured so as to include the mark.

[Function] In the present invention, when measuring the shape of the entire surface of a measured object, when dividing the measured object into each part having an area smaller than that which can be measured by the measuring device, the corner part where adjacent divided parts, for example, four parts, touch each other. A mark with a predetermined thickness that can be detected by the optical sensor part is installed on each part, and the shape of the object to be measured is measured over the range including the mark for each divided part, and the shape of the object is measured based on the shape data of each part. At the time of calculating the shape of the entire object to be measured, the shape data measured for each part is connected using the center of the marks installed at the four corners of each part as the boundary, and the shape data is included in the shape data of each part. Remove duplicate data.

[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. 1st
The figure is a configuration diagram showing one embodiment of the present invention, and (1) to
Reference numeral 12 is completely similar to the conventional device described above. (13
) is a support mechanism that supports the moving mechanisms (7) and (8), and the optical sensor section (2) moves along the X-axis direction moving mechanism (7), and the optical sensor section (2) and the X-axis Directional movement mechanism (7)
and moves along the X-axis direction movement mechanism (8). <14
) are provided at, for example, four corners of each divided portion of the object to be measured, and are, for example, cylindrical marks that are thick in the height direction and can be detected by the optical sensor section (2).

FIG. 2 is a diagram showing an example of the dividing portion, measurement range, and mark installation position on the entire surface of the object to be measured, and shows the dividing method when the mark (14) is installed and fixed on the object to be measured (1). In Figure 2, (15) is the range of the entire measured object, (1
6) shows the range that can be measured by the measuring device, and (17) shows the range of the shape data that is used among the shape data measured by the measuring device.

Next, the operation of the embodiment of the present invention shown in FIG. 1 will be explained with reference to FIG. 3. First, the optical sensor section (2
) is moved in the X-axis direction in parallel over the object to be measured (1) by the X-axis direction movement mechanism (7), and the optical sensor section (2) moves the Distance fluctuations are measured at regular intervals in the X-axis direction, and the measured data is sent to the first calculation unit (3
). The first calculation section (3) is the optical sensor section (2)
The amount of displacement between the optical sensor section (2) and the object to be measured (1) is calculated based on the amount of displacement between the detected reflected light detection point and the reference detection point. At this time, if the optical sensor (2) reaches the mark (14) fixedly installed on the object to be measured (1), a mark will be placed on the distance change between the optical sensor (2) and the object to be measured (1). (
14) will be added.

When the measurement in the X-axis direction is completed, the optical sensor (2) moves a certain amount in the Y-axis direction parallel to the object to be measured (1) by the X-axis direction movement mechanism (8), performs the measurement, and then The sensor (2) starts moving in the X-axis direction again and performs measurement.

By repeating the above-mentioned operations in this manner, the measurement of the area divided into areas that can be measured by the measuring device is completed, and the measurement data is stored in the second calculation unit (5).

Furthermore, by moving the support mechanism (13) and repeating the above-mentioned operations, the entire surface of the object to be measured (1) can be measured;
The shape measurement for each part on the entire surface of the object to be measured (1) is completed.

Next, the second calculation unit (5) calculates the shape of the entire surface of the object to be measured (1) based on the shape data of each part. ) is integrated as a boundary. As a result, duplicate shape data in adjacent portions is removed, discontinuity in measurement data is eliminated, and the shape of a wide object to be measured can be measured with high precision.

In the above embodiment, four marks are provided to form a predetermined surface on each measurement part of the object to be measured, but the number is not limited to this, and as long as there are at least three marks, any Even if it is.

[Effects of the Invention] As described above, according to the present invention, there is an optical sensor section arranged to irradiate the object to be measured with a laser beam and detect the reflected light, and the optical sensor section connected to the optical sensor section, a first calculation unit that calculates the amount of displacement between the optical sensor unit and the object to be measured based on the amount of displacement between the detection point of the reflected light detected by the optical sensor unit and the reference detection point; connected and the first
a second calculation unit that converts the amount of displacement calculated by the calculation unit into the shape of the object to be measured; and a second calculation unit that is controlled by the second calculation unit to move the optical sensor unit parallel to the object to be measured in the comprising a moving mechanism section for moving in the axial direction, and a plurality of marks provided so as to form a predetermined surface on each measurement portion of the object to be measured, and having a predetermined thickness that can be detected by the optical sensor section, Since the shape of each measurement part is measured to include the above-mentioned marks, it is possible to remove the shape data at the overlapping parts of each measurement part that occurs when moving and installing the measuring device, and it is possible to eliminate This has the effect of providing a shape measuring device that can measure the shape of the object to be measured with high precision.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing an example of the shape measuring device of the present invention installed on an object to be measured, and FIG. 3 is a diagram showing the shape measuring device of the present invention. FIG. 4 is a block diagram showing a case where the shape of an object to be measured is measured. FIG. 4 is a block diagram showing a conventional shape measuring device. In the figure, (1) is the object to be measured, (2) is the optical sensor section,
(3) is the first calculation section, (5) is the second calculation section, (7) is the X-axis direction movement mechanism, (8) is the Y-axis direction movement mechanism, (14)
) is a landmark. In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] An optical sensor section arranged to irradiate a measured object with a laser beam and detect the reflected light; a first calculation section that calculates the amount of displacement between the optical sensor section and the object to be measured based on the amount of displacement between the detection point and the reference detection point; a second calculation unit that converts the calculated displacement amount into the shape of the object to be measured; and a second calculation unit that is controlled by the second calculation unit to move the optical sensor unit parallel to the object to be measured in the X-axis direction and the Y-axis direction. A moving mechanism section for moving the object, and a plurality of marks provided to form a predetermined surface on each measurement part of the object to be measured and having a predetermined thickness that can be detected by the optical sensor section, A shape measuring device characterized in that it measures the shape of each of the measurement portions as described above.