JPH045556A - Method and device for flaw inspection of surface of sphere - Google Patents
Method and device for flaw inspection of surface of sphereInfo
- Publication number
- JPH045556A JPH045556A JP10594390A JP10594390A JPH045556A JP H045556 A JPH045556 A JP H045556A JP 10594390 A JP10594390 A JP 10594390A JP 10594390 A JP10594390 A JP 10594390A JP H045556 A JPH045556 A JP H045556A
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- light
- sphere
- scattered light
- incident light
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Links
- 238000007689 inspection Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000005259 measurement Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 2
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザ光等の入射光を球体表面に照射して球
体表面の傷の有無を判別する傷検査方法および装置に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flaw inspection method and apparatus for determining the presence or absence of flaws on the surface of a sphere by irradiating the surface of the sphere with incident light such as a laser beam.
球体表面の傷を検査するために、第８図に示すような傷
検査方法が用いられている。この傷検査方法は、斜め方
向の入射光（８１） 、例えばレーザ光を集光レンズ（
８２）を用いて回転させた球体測定物（８３）の表面に
集光させ、測定物（８３）の表面で反射された反射光（
８４）の光量を受光素子（８６）により検出して、測定
物（８３）の表面の傷の有無を判別するものである。即
ち、測定物（８３）の表面に集光された入射光（８１）
は、入射角（θ）と等しい反射角（θ）で反射するが、
測定物（８３）の表面に傷があると傷部分に当たった入
射光（８１）の一部が乱反射を起こし、散乱光（８７）
となって集光レンズ（８５）の収光範囲外に飛び出す。In order to inspect the surface of the sphere for flaws, a flaw inspection method as shown in FIG. 8 is used. This flaw inspection method uses diagonally incident light (81), such as laser light, through a condensing lens (
The reflected light (
The amount of light 84) is detected by a light receiving element (86) to determine whether there are any scratches on the surface of the object to be measured (83). That is, the incident light (81) focused on the surface of the measurement object (83)
is reflected at an angle of reflection (θ) equal to the angle of incidence (θ), but
If there is a scratch on the surface of the object to be measured (83), a part of the incident light (81) that hits the scratch will cause diffuse reflection, resulting in scattered light (87)
As a result, the light jumps out of the condensing range of the condensing lens (85).
このため、受光素子（８６）に集光される反射光（８４
）の光量は、傷がない場合の光量に比べ、散乱光（８７
）の光量骨だけ減少することになる。従って、反射光の
光量を測定することによって球体表面の傷の有無を反射
光の光量変化としてとらえることができる。Therefore, the reflected light (84) is focused on the light receiving element (86).
) is scattered light (87
), the amount of light will decrease only for the bone. Therefore, by measuring the amount of reflected light, the presence or absence of scratches on the surface of the sphere can be determined as a change in the amount of reflected light.
前述した傷検査方法は、測定物の表面で反射された反射
光の光量変化を測定することによって傷の有無を判別す
るため、入射光の集光位置を測定物の表面に合わせる必
要がある。In the above-described flaw inspection method, the presence or absence of flaws is determined by measuring changes in the amount of reflected light reflected on the surface of the object to be measured, so it is necessary to align the convergence position of the incident light with the surface of the object to be measured.
しかし、入射光の集光位置を測定物表面に合せると、１
回当たりの検査面積が小さくなり、測定物の全面を検査
しようとすると、かなり時間がかるという問題点がある
。However, when the focusing position of the incident light is aligned with the surface of the measurement object, 1
There is a problem that the inspection area per inspection is small and it takes a considerable amount of time to inspect the entire surface of the object to be measured.
また、測定物の反射率あるいは入射光源例えばレーザパ
ワーの変動による反射光の光量変化がそのまま測定結果
に影響するため、傷の判別能力が低いという問題点があ
る。Additionally, changes in the amount of reflected light due to changes in the reflectance of the object to be measured or changes in the incident light source, such as laser power, directly affect the measurement results, resulting in a problem that the ability to discriminate flaws is low.
本発明は上記問題点に鑑みて提案されたもので、その目
的とするところは、検査に要する時間が短縮でき、かつ
、傷の判別能力の高い傷検査方法を提供し、さらには、
上記検査方法を用いた構造の簡単な傷検査装置を提供す
ることにある。The present invention was proposed in view of the above-mentioned problems, and its purpose is to provide a flaw inspection method that can shorten the time required for inspection and has a high ability to discriminate flaws.
It is an object of the present invention to provide a flaw inspection device with a simple structure using the above inspection method.
本発明では、入射光の集光位置を球体の中心に合せ、反
射光を入射光学系に戻し、散乱光のみを集光して傷の判
別をおこなう構成とした。In the present invention, the condensing position of the incident light is aligned with the center of the sphere, the reflected light is returned to the incident optical system, and only the scattered light is condensed to identify scratches.
また、上記方法を用いないための検査装置として、入射
光の集光位置を球体の中心に合わせるための集光レンズ
と、該集光レンズを通った入射光を球体側に偏向するた
めの反射鏡と、散乱光を受光素子に集光するためのホロ
グラムレンズと、散乱光を検出するための受光素とを有
する球体表面の傷検査装置であって、前記ホログラムレ
ンズの中心部に透孔を設け、前記反射鏡で偏向された入
射光が前記透孔を通って球体の表面に入射するようにし
た球体表面の傷検査装置を用いた。In addition, as an inspection device that does not use the above method, we have a condensing lens to align the condensing position of the incident light to the center of the sphere, and a reflection device to deflect the incident light that has passed through the condensing lens toward the sphere. A spherical surface flaw inspection device having a mirror, a hologram lens for condensing scattered light onto a light receiving element, and a light receiving element for detecting the scattered light, the hologram lens having a through hole in the center thereof. A spherical surface flaw inspection device was used in which the incident light deflected by the reflecting mirror was incident on the surface of the spherical body through the through hole.
球体の中心に集光位置をもつ入射光は、球体表面に傷が
なければ反射光となって入射してきた方向に戻る。これ
は、第７図に示すように、入射光（１）が球体（２）表
面上の点、例えば点（２ａ）における接線（２ｂ）と垂
直方向に入射するためにおこるもので、これにより反射
光（９）は入射光学系に戻される。一方、球体表面に傷
があると、傷部分例えば点（２ｃ）に入射した入射光（
１）は乱反射を起こし、散乱光（４）となって入射光学
系外に飛び出す。この飛び出した散乱光を受光素子に集
光し、受光素子で散乱光の有無を検出することによって
傷の有無が判別できる。The incident light that is focused at the center of the sphere becomes reflected light and returns in the direction from which it came, if there are no scratches on the sphere's surface. This occurs because the incident light (1) is incident on the surface of the sphere (2) in a direction perpendicular to the tangent line (2b) at a point, for example, point (2a), as shown in Figure 7. The reflected light (9) is returned to the input optical system. On the other hand, if there is a scratch on the surface of the sphere, the incident light (
1) causes diffuse reflection, becomes scattered light (4), and flies out of the incident optical system. The presence or absence of a scratch can be determined by focusing this scattered light on a light receiving element and detecting the presence or absence of the scattered light with the light receiving element.
請求項（２）の傷検査装置において、集光レンズを通っ
た入射光は反射鏡で球体側に偏向され、さらにホログラ
ムレンズの中心部に形成された透孔を通って球体表面に
入射する〔ここでホログラムレンズとは、公知なように
、ホログラム（物体から出る光波と、それと干渉性のあ
る光波との干渉パターンを写真感光材料などに記録した
もの）の結像作用を利用して、これをレンズとして用い
たもので、同一ホログラム面上に複数のレンズを構成す
ることができ、また複製が容易である等の特徴をもつ、
〕、入射光の集光位置は集光レンズによって球体の中心
に合わされており、球体表面に傷がなければ、前述した
ように、反射光はホログラムレンズの透孔を通って入射
光学系に戻る。球体表面に傷があると、入射光学系外に
飛び出した散乱光がホログラムレンズによって受光素子
に集光され、これにより傷の判別がなされる。In the flaw inspection device according to claim (2), the incident light that passes through the condenser lens is deflected toward the sphere by the reflecting mirror, and further enters the surface of the sphere through a through hole formed in the center of the hologram lens. Here, a hologram lens is a lens that utilizes the imaging effect of a hologram (an interference pattern between a light wave emitted from an object and a coherent light wave recorded on a photographic material, etc.). is used as a lens, and has features such as being able to configure multiple lenses on the same hologram surface and being easy to reproduce.
], the condensing position of the incident light is aligned with the center of the sphere by the condenser lens, and if there are no scratches on the surface of the sphere, the reflected light will return to the input optical system through the through hole of the hologram lens, as mentioned above. . If there is a flaw on the surface of the sphere, the scattered light emitted outside the input optical system is focused on the light receiving element by the hologram lens, and the flaw is determined based on this.
請求項（３）の傷検査装置において、入射光はホログラ
ムレンズの中心部に形成された入射光集光用レンズ部に
よって球体の中心に集光位置を合わされる０反射光はこ
の入射光集光用レンズ部を通って入射光学系に戻り、散
乱光は散乱光集光用レンズ部によって受光素子に集光さ
れる。In the flaw inspection device according to claim (3), the incident light is focused at the center of the sphere by the incident light focusing lens portion formed at the center of the hologram lens, and the reflected light is focused by this incident light. The scattered light returns to the incident optical system through the optical lens section, and is focused on the light receiving element by the scattered light focusing lens section.
以下、本発明の実施例を図面に基づいて説明する、第１
図は傷検査装置（Ａ）の光学系を示す。Hereinafter, the first embodiment of the present invention will be explained based on the drawings.
The figure shows the optical system of the flaw inspection device (A).
この傷検査装置（Ａ）は、入射光（１）例えばレーザ光
の集光位置を回転させた球体の測定物（２）の中心（０
）に合わせるための集光レンズ（３）と、測定物（２）
からの散乱光（４）を一対の集光レンズ（５）（５）に
送るための放物凹面鏡（６）および反射鏡（７）と、散
乱光を一対の受光素子（８）（８）に集光するための一
対の集光レンズ（５）（５）と、散乱光を検出するため
の一対の受光素子（８）（８）とを主要な構成要素とす
る。放物凹面鏡（６）は、同図に示す断面が連続して全
体として環状をなすものであり、反射鏡（７）は第２図
に示すように、金属製円筒の側面を両側から削り取った
部分（７ａ）を鏡面仕上げしたものを用いている０反射
鏡（７）の中心部は、入射光および反射光の通過用孔（
７ｂ）になっている。入射光（１）の集光位置を測定物
（２）の中心（０）に合わすことによって、前述したよ
うに、反射光（９）を入射光学系に戻し、散乱光（４）
のみを検出して測定物（２）表面の傷を判別することが
できる。This flaw inspection device (A) uses incident light (1), for example, the center (0
) and the object to be measured (2).
A parabolic concave mirror (6) and a reflecting mirror (7) for sending the scattered light (4) from the to a pair of condensing lenses (5) (5), and a pair of light receiving elements (8) (8) for transmitting the scattered light to a pair of light receiving elements (8). The main components are a pair of condensing lenses (5) (5) for condensing light into the light and a pair of light receiving elements (8) (8) for detecting scattered light. The parabolic concave mirror (6) has a continuous cross-section as shown in the same figure, forming an annular shape as a whole, and the reflecting mirror (7) is a metal cylinder whose sides are shaved off from both sides, as shown in Fig. 2. The center part of the 0-reflector (7), whose portion (7a) is mirror-finished, has a hole for passing incident light and reflected light (
7b). By aligning the condensing position of the incident light (1) with the center (0) of the object to be measured (2), the reflected light (9) is returned to the incident optical system as described above, and the scattered light (4)
It is possible to determine scratches on the surface of the measurement object (2) by detecting only the scratches.
しかし、傷検査装置（Ａ）は光学系の配置が複数なため
、部品点数が多（なる。そこで、光学系の配置を簡単に
して部品点数を少なくしたのが、以下に説明する検査装
置（Ｂ）および傷検査装置（Ｃ）である。However, since the flaw inspection device (A) has multiple optical systems arranged, it has a large number of parts.Therefore, the inspection device (A) described below has simplified the arrangement of the optical system and reduced the number of parts. B) and a flaw inspection device (C).
第３図は傷検査装置（Ｂ）を示す。尚、同一構成要素は
同一符号で示す、この傷検査装置（Ｂ）は、入射光（１
）の集光位置を測定物（２）の中心（０）に合わせるた
めの集光レンズ（３）と、集光レンズ（３）を通った入
射光（１）を測定物（２）側に偏向するための反射鏡（
３１）と、散乱光（４）を受光素子（８）に集光するた
めのホログラムレンズ（３２）と、散乱光（４）を検出
するための受光素子（８）とを主要な構成要素とする。FIG. 3 shows the flaw inspection device (B). Note that the same components are indicated by the same reference numerals. This flaw inspection device (B)
) to align the focusing position of the object (2) with the center (0) of the object (2), and a focusing lens (3) that directs the incident light (1) that has passed through the focusing lens (3) to the object (2) side. Reflector for deflection (
31), a hologram lens (32) for focusing the scattered light (4) on the light receiving element (8), and a light receiving element (8) for detecting the scattered light (4) as the main components. do.
ホログラムレンズ（３２）は、第４図に示すように、周
縁部がレンズ作用をもつ散乱光集光用レンズ部（３２ａ
）、中心部が入射光（１）を通過させるための透孔（３
２ｂ）になっている。この透孔（３２ｂ）は、穴あるい
は穴にガラス等の透明体を装着したものである。入射光
（１）の集光位置が測定物（２）の中心（０）に合わさ
れているため、反射光（９）は透孔（３２ｂ）を通って
入射光学系に戻り、散乱光（４）は散乱光集光用レンズ
部（３２ａ）によって直接、受光素子（８）に集光され
る。従って、傷検査装置（Ａ）に比べて、放物凹面鏡（
６）、一対の集光レンズ（５）（５）、および−個の受
光素子（８）が不要になり、構造を簡単にすることがで
きる。As shown in FIG. 4, the hologram lens (32) has a scattered light condensing lens part (32a) whose peripheral part has a lens function.
), the center has a through hole (3) for passing the incident light (1)
2b). This through hole (32b) is a hole or a hole in which a transparent material such as glass is attached. Since the condensing position of the incident light (1) is aligned with the center (0) of the measurement object (2), the reflected light (9) returns to the incident optical system through the through hole (32b) and becomes the scattered light (4). ) is directly focused on the light receiving element (8) by the scattered light focusing lens section (32a). Therefore, compared to the flaw inspection device (A), the parabolic concave mirror (
6), the pair of condensing lenses (5) (5), and - number of light receiving elements (8) are no longer necessary, and the structure can be simplified.
第５図は、傷検査装置（Ｃ）を示す。この傷検査装置（
Ｃ）は、同一ホログラム上に二つのレンズ部を形成させ
たホログラムレンズ（５１）と、散乱光を検出するため
の受光素子（８）とを主要な構成要素とする。ホログラ
ムレンズ（５１）は、第６図に示すように、中心部が入
射光（１）を測定物（２）の中心（０）に合わせるため
の入射光集光用レンズ部（５１ｂ ） 、周縁部が散乱
光（４）を受光素子（８）に集光するための散乱光集光
用レンズ部（５１ａ）になっている。反射光（９）は入
射光集光用レンズ部（５１ｂ ＞を通って入射光学系に
戻り、散乱光（４）は散乱光集光用レンズ部（５１ａ）
によって受光素子（８）に集光される。FIG. 5 shows a flaw inspection device (C). This flaw inspection device (
The main components of C) are a hologram lens (51) in which two lens parts are formed on the same hologram, and a light receiving element (8) for detecting scattered light. As shown in FIG. 6, the hologram lens (51) has a center part (51b) for focusing incident light to align the incident light (1) with the center (0) of the measurement object (2), and a peripheral part (51b). The portion serves as a scattered light condensing lens portion (51a) for condensing the scattered light (4) onto the light receiving element (8). The reflected light (9) passes through the incident light condensing lens section (51b) and returns to the input optical system, and the scattered light (4) passes through the scattered light condensing lens section (51a).
The light is focused on the light receiving element (8).
このため、傷検査装置（Ａ）に比べて、放物凹面鏡（６
）、一対の集光レンズ（５）（５）、−個の受光素子（
８）、さらに集光レンズ（３）および反射鏡（７）が不
要になり、構造を著しく簡単化することができる。Therefore, compared to the flaw inspection device (A), the parabolic concave mirror (6
), a pair of condensing lenses (5) (5), - light receiving elements (
8) Furthermore, the condensing lens (3) and the reflecting mirror (7) are no longer necessary, and the structure can be significantly simplified.
本発明は以下の効果を有する。 The present invention has the following effects.
■ 入射光の集光位置を球体測定物の中心に合わせるた
め、１回当たりの検査面積が増え、傷検査に要する時間
が従来のものに比べて短くなる。- Since the converging position of the incident light is aligned with the center of the spherical object to be measured, the inspection area per inspection is increased and the time required for flaw inspection is shortened compared to conventional methods.
■ 測定物表面の傷部分で反射された散乱光のみを検出
するようにしたため、測定物の反射率、入射光源のパワ
ー変動等が測定結果に影響せず、傷の判別能力が向上す
る。■ Since only the scattered light reflected from the scratches on the surface of the object to be measured is detected, the reflectance of the object to be measured, fluctuations in the power of the incident light source, etc. do not affect the measurement results, improving the ability to distinguish scratches.
■ ホログラムレンズを用いることによって、上記効果
を有し、かつ、構造の簡単な傷検査装置を製作できる。(2) By using a hologram lens, it is possible to manufacture a flaw inspection device that has the above effects and has a simple structure.
また、ホログラムレンズは複製が容易にできるため、安
価に製作できる。Further, since hologram lenses can be easily duplicated, they can be manufactured at low cost.
第１図は傷検査装置（Ａ）の光学系配置図、第２図は反
射鏡の斜視図、
第３図は傷検査装置（Ｂ）の光学系の配置図、第４図は
ホログラムレンズの平面図、
第５図は傷検査袋？１ｌ（Ｃ）の光学系配置図、第６図
はホログラムレンズの平面図、
第７図は傷検査方法を示す図、
第８図は従来の傷検査方法を示す図である。
Ａ、Ｂ、Ｃ−−−−一傷検査装置
１−入射光 ２−球状の測定物３．５−・集光
レンズ ４−散乱光
８−受光素子 ９−・−・反射光３１−反射鏡
３２．５１−ホログラムレンズ第３図
第４図
第１図
第２図
第５図
第６ｒＩ！ＪFigure 1 is a layout diagram of the optical system of the flaw inspection device (A), Figure 2 is a perspective view of the reflecting mirror, Figure 3 is a layout diagram of the optical system of the flaw inspection device (B), and Figure 4 is a diagram of the hologram lens. Plan view, Figure 5 is a flaw inspection bag? FIG. 6 is a plan view of the hologram lens, FIG. 7 is a diagram showing a flaw inspection method, and FIG. 8 is a diagram showing a conventional flaw inspection method. A, B, C - Scratch inspection device 1 - Incident light 2 - Spherical object to be measured 3.5 - Condensing lens 4 - Scattered light 8 - Light receiving element 9 - Reflected light 31 - Reflecting mirror
32.51 - Hologram Lens Figure 3 Figure 4 Figure 1 Figure 2 Figure 5 Figure 6rI! J
Claims (3)
で反射した反射光を入射光学系に戻し、球体表面の傷部
分で乱反射した散乱光のみを受光素子に集光して検出す
ることにより傷の有無を判別する球体表面の傷検査方法
。(1) Align the focusing position of the incident light to the center of the sphere, return the reflected light reflected from the sphere surface to the input optical system, and only the scattered light that is diffusely reflected from the scratches on the sphere surface is focused on the light receiving element and detected. A method of inspecting flaws on the surface of a sphere to determine the presence or absence of flaws.
集光レンズと、該集光レンズを通った入射光を球体側に
偏向するための反射鏡と、散乱光を受光素子に集光する
ためのホログラムレンズと、散乱光を検出するための受
光素とを有する球体表面の傷検査装置であって、 前記ホログラムレンズの中心部に透孔を設け、前記反射
鏡で偏向された入射光が前記透孔を通って球体の表面に
入射するようにした球体表面の傷検査装置。(2) A condenser lens for aligning the condensing position of the incident light with the center of the sphere, a reflector for deflecting the incident light passing through the condenser lens toward the sphere, and a condensing mirror for concentrating the scattered light onto the light receiving element. A flaw inspection device for a spherical surface having a hologram lens for emitting light and a light receiving element for detecting scattered light, the hologram lens having a through hole in the center to detect the incident light deflected by the reflecting mirror. A device for inspecting flaws on the surface of a sphere, in which light passes through the through hole and enters the surface of the sphere.
入射光集光用レンズ部を中心部に有し、散乱光を受光素
子に集光させるための散乱光集光用レンズ部を周縁部に
有するホログラムレンズと、散乱光を検出するための受
光素子とを有する球体表面の傷検査装置。(3) It has an incident light condensing lens part in the center to align the incident light condensing position with the center of the sphere, and a scattered light condensing lens part to focus the scattered light on the light receiving element. A device for inspecting flaws on the surface of a sphere, which includes a hologram lens on the periphery and a light-receiving element for detecting scattered light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2105943A JP3040131B2 (en) | 1990-04-20 | 1990-04-20 | Spherical surface scratch inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2105943A JP3040131B2 (en) | 1990-04-20 | 1990-04-20 | Spherical surface scratch inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH045556A true JPH045556A (en) | 1992-01-09 |
| JP3040131B2 JP3040131B2 (en) | 2000-05-08 |
Family
ID=14420932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2105943A Expired - Fee Related JP3040131B2 (en) | 1990-04-20 | 1990-04-20 | Spherical surface scratch inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3040131B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4949204A (en) * | 1987-07-27 | 1990-08-14 | Teac Corporation | Tape recorder for playing endless magnetic tape |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102070295B1 (en) * | 2018-08-22 | 2020-01-28 | 한국식품연구원 | A portable detecting apparatus and a module for detecting component in agricultural products and livestock prodects |
| KR102600032B1 (en) * | 2019-11-12 | 2023-11-08 | 한국식품연구원 | Inspection automatic apparatus and module for agricultural products and livestock products |
-
1990
- 1990-04-20 JP JP2105943A patent/JP3040131B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4949204A (en) * | 1987-07-27 | 1990-08-14 | Teac Corporation | Tape recorder for playing endless magnetic tape |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3040131B2 (en) | 2000-05-08 |
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