JPH0456341U

JPH0456341U -

Info

Publication number: JPH0456341U
Application number: JP9822390U
Authority: JP
Priority date: 1990-09-19
Filing date: 1990-09-19
Publication date: 1992-05-14

Description

[Brief explanation of drawings]

第１図は第１実施例の側断面図、第２図ａ，ｂ
は第２実施例の側断面図と底板部分平面図、第３
図ａ，ｂは第３実施例の側断面図と底板部分平面
図、第４図はウエーハキヤリアを説明するための
側面図、第５図は従来例の側断面図、である。図
において、１，１１は容器、２，１２は蓋、３，１３は側
壁、４，１４は底板、５は支承平板（支承部材）
、６，７ａ，７ｂは支承リブ（支承部材）、Ｃは
ウエーハキヤリア、Ｗはウエーハ、である。 Fig. 1 is a side sectional view of the first embodiment, Fig. 2 a, b
are a side sectional view and a partial plan view of the bottom plate of the second embodiment;
Figures a and b are a side sectional view and a partial plan view of the bottom plate of the third embodiment, Figure 4 is a side view for explaining the wafer carrier, and Figure 5 is a side sectional view of the conventional example. In the figure, 1 and 11 are containers, 2 and 12 are lids, 3 and 13 are side walls, 4 and 14 are bottom plates, and 5 is a support plate (support member).
, 6, 7a, 7b are supporting ribs (supporting members), C is a wafer carrier, and W is a wafer.

Claims

[Claims for Utility Model Registration] 1. A container having a box shape with an upward opening into which a wafer carrier is placed, one side wall of the container is inclined in such a direction that the inner surface faces upward, and the bottom of the container is A wafer carrier storage box comprising a support member that supports the wafer carrier in an inclined state with one side thereof abutting the inner surface of the side wall. 2. The wafer carrier storage box according to claim 1, wherein the support member is an inclined flat plate. 3. The wafer carrier storage box according to claim 1, wherein the support member is a rib that stands up from the bottom plate of the container. 4. The wafer carrier storage box according to claim 1, further comprising a lid that can be opened and closed on the container.