JPH0456750U - - Google Patents
Info
- Publication number
- JPH0456750U JPH0456750U JP9964690U JP9964690U JPH0456750U JP H0456750 U JPH0456750 U JP H0456750U JP 9964690 U JP9964690 U JP 9964690U JP 9964690 U JP9964690 U JP 9964690U JP H0456750 U JPH0456750 U JP H0456750U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- tank
- rotation mechanism
- evaporation apparatus
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000725 suspension Substances 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図〜第５図はこの考案の実施例を示し、第
１図は真空蒸着装置の蒸着槽上部の縦断正面図、
第２図は基板ホルダが吊持される直前の状態を示
す内部平面図、第３図はフツクと爪部の詳細構造
を示す斜視図、第４図はリフト手段の概略構造を
示す全体平面図、第５図は真空蒸着装置の概要を
示す全体の縦断正面図である。第６図は従来装置
を示す動作説明図である。
１……蒸着槽、２……入口槽（真空槽）、３…
…出口槽（真空槽）、６……基板ホルダ、７……
搬送手段、１１……リフト手段、１８……吊持ア
ーム、２５……基板、２６……フツク、２７……
係合手段。
1 to 5 show an embodiment of this invention, and FIG. 1 is a longitudinal sectional front view of the upper part of the vapor deposition tank of the vacuum vapor deposition apparatus;
Fig. 2 is an internal plan view showing the state immediately before the substrate holder is suspended, Fig. 3 is a perspective view showing the detailed structure of the hook and claw, and Fig. 4 is an overall plan view showing the schematic structure of the lifting means. , FIG. 5 is an overall longitudinal sectional front view showing an outline of the vacuum evaporation apparatus. FIG. 6 is an explanatory diagram of the operation of the conventional device. 1... Vapor deposition tank, 2... Inlet tank (vacuum tank), 3...
...Exit tank (vacuum tank), 6...Substrate holder, 7...
Conveying means, 11... Lifting means, 18... Hanging arm, 25... Board, 26... Hook, 27...
Engagement means.
Claims (1)
れており、各槽には一群の基板が装着された基板
ホルダを送り操作する搬送手段が設けられており
、前記蒸着槽の天井壁に基板ホルダを吊持状態で
回転操作する回転機構が設けてある真空蒸着装置
であつて、 前記回転機構は蒸着槽内における基板ホルダの
搬送経路より上方に配置されており、 搬送手段に支持された基板ホルダを、回転機構
真下の捕捉位置へ持ち上げ操作するリフト手段が
蒸着槽の内部に設けられており、 基板ホルダの上周面に周方向等間隔おきに３個
のフツクが設けられており、 回転機構に前記フツクに対応して３個の吊持ア
ームが設けられており、 リフト手段で前記捕捉位置へ持ち上げ操作され
た基板ホルダのフツクを、回転操作される吊持ア
ームで捕捉して吊持するように構成したことを特
徴とする連続成膜方式の真空蒸着装置。 (2) フツクと吊持アームの吊持面間に、凹凸係
合する係合手段が設けてある請求項(1)記載の連
続成膜方式の真空蒸着装置。[Scope of Claim for Utility Model Registration] (1) Vacuum tanks are arranged adjacent to each vapor deposition tank, and each tank is provided with a transport means for transporting and operating a substrate holder on which a group of substrates are attached. , a vacuum evaporation apparatus in which a rotation mechanism for rotating the substrate holder in a suspended state is provided on the ceiling wall of the evaporation tank, the rotation mechanism being disposed above the transport path of the substrate holder in the evaporation tank; Lifting means for lifting the substrate holder supported by the transporting means to a capture position directly below the rotation mechanism is provided inside the deposition tank, and three lift means are provided at equal intervals in the circumferential direction on the upper circumferential surface of the substrate holder. The rotating mechanism is provided with three hanging arms corresponding to the hooks, and the hook of the substrate holder lifted to the capturing position by the lifting means is rotated. A continuous film-forming vacuum evaporation apparatus characterized by being configured to be captured and suspended by a suspension arm. (2) The continuous film-forming vacuum evaporation apparatus according to claim 1, further comprising an engaging means for engaging the hook and the suspending surface of the suspending arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990099646U JPH0740524Y2 (en) | 1990-09-20 | 1990-09-20 | Continuous film deposition type vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990099646U JPH0740524Y2 (en) | 1990-09-20 | 1990-09-20 | Continuous film deposition type vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456750U true JPH0456750U (en) | 1992-05-15 |
| JPH0740524Y2 JPH0740524Y2 (en) | 1995-09-20 |
Family
ID=31841718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990099646U Expired - Lifetime JPH0740524Y2 (en) | 1990-09-20 | 1990-09-20 | Continuous film deposition type vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740524Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3001961U (en) * | 1994-03-14 | 1994-09-06 | 鈴木合金株式会社 | Wheelchairs with step wheels, traveling vehicles for the elderly, trolleys, etc. |
-
1990
- 1990-09-20 JP JP1990099646U patent/JPH0740524Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3001961U (en) * | 1994-03-14 | 1994-09-06 | 鈴木合金株式会社 | Wheelchairs with step wheels, traveling vehicles for the elderly, trolleys, etc. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740524Y2 (en) | 1995-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3900229B2 (en) | Board transfer hand | |
| JPH05271935A (en) | Vacuum deposition device for continuous film formation | |
| JPS63108630U (en) | ||
| JPH0124051Y2 (en) | ||
| JPH02132657U (en) | ||
| JPH0740524Y2 (en) | Continuous film deposition type vacuum deposition equipment | |
| JPH089074Y2 (en) | Container transport device | |
| JPH032522Y2 (en) | ||
| JPH024064Y2 (en) | ||
| JPH11233588A5 (en) | Wafer processing apparatus and wafer processing method | |
| JPH0638017Y2 (en) | Plate transfer device | |
| JPH0411036Y2 (en) | ||
| JPS5843664Y2 (en) | Air cleaner for power agricultural machinery | |
| JPS6280334U (en) | ||
| JPS63147811U (en) | ||
| JPH0213386Y2 (en) | ||
| JPH041807U (en) | ||
| JPH02122540A (en) | Wafer container conveying jig | |
| JPH049681U (en) | ||
| JPH0521420Y2 (en) | ||
| JPH0630371B2 (en) | Wafer carrier transfer method in clean room | |
| JPH0482925U (en) | ||
| JPH0510206U (en) | Lid supply device for containers | |
| JPS62256450A (en) | Wafer carrier | |
| JPS6292277U (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |