JPH0456764U - - Google Patents
Info
- Publication number
- JPH0456764U JPH0456764U JP10058090U JP10058090U JPH0456764U JP H0456764 U JPH0456764 U JP H0456764U JP 10058090 U JP10058090 U JP 10058090U JP 10058090 U JP10058090 U JP 10058090U JP H0456764 U JPH0456764 U JP H0456764U
- Authority
- JP
- Japan
- Prior art keywords
- center
- mirror
- surface observation
- melt surface
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第1図は本考案による融液表面観察用具の一実
施例の構成図、第2図は第1図のX−X′線から
見たミラーの断面図、第3図はCZ法を説明する
図である。
1……単結晶育成炉、2……るつぼ、3……高
周波加熱コイル、4……融液、5……種結晶、6
……引上軸、10……融液表面観察用具、11…
…枠体、12……ミラー、13……孔。
Fig. 1 is a configuration diagram of an embodiment of the melt surface observation tool according to the present invention, Fig. 2 is a cross-sectional view of the mirror seen from the line X-X' in Fig. 1, and Fig. 3 explains the CZ method. It is a diagram. 1... Single crystal growth furnace, 2... Crucible, 3... High frequency heating coil, 4... Melt, 5... Seed crystal, 6
...pulling shaft, 10 ... melt surface observation tool, 11...
...frame body, 12...mirror, 13...hole.
補正 平3.9.6
実用新案登録請求の範囲を次のように補正する
。Amendment 3/9/6 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
(1) 原料融液から引上げ法により単結晶を製造
する場合の用具であつて、枠体を用いて筒状の立
体を形成し、上部を傾斜部とすると共に、この傾
斜部には中心部に孔を有するミラーを載置するこ
とを特徴とする融液表面観察用具。
(2) ミラーは中心または中心の近傍から2分割
以上することを特徴とする請求項1項記載の融液
表面観察用具。[Claims for Utility Model Registration] (1) A tool for producing a single crystal from a raw material melt by a pulling method , which forms a cylindrical solid body using a frame, and has an inclined upper part. A melt surface observation tool, characterized in that a mirror having a hole in the center is placed on the inclined part. (2) The melt surface observation tool according to claim 1, wherein the mirror is divided into two or more parts from the center or the vicinity of the center.
Claims (1)
単結晶を製造する場合の用具であつて、枠体を用
いて筒状の立体を形成し、上部を傾斜部とすると
共に、この傾斜部には中心部に孔を有するミラー
を載置することを特徴とする融液表面観察用具。 (2) ミラーは中心または中心の近傍から2分割
以上することを特徴とする請求項1項記載の融液
表面観察用具。[Claims for Utility Model Registration] (1) A tool for producing a single crystal from a raw material melt by the Czyochralski method, which forms a cylindrical solid using a frame and has an inclined upper part. A melt surface observation tool characterized in that a mirror having a hole in the center is placed on the inclined part. (2) The melt surface observation tool according to claim 1, wherein the mirror is divided into two or more parts from the center or the vicinity of the center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990100580U JPH0634371Y2 (en) | 1990-09-26 | 1990-09-26 | Melt surface observation tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990100580U JPH0634371Y2 (en) | 1990-09-26 | 1990-09-26 | Melt surface observation tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456764U true JPH0456764U (en) | 1992-05-15 |
| JPH0634371Y2 JPH0634371Y2 (en) | 1994-09-07 |
Family
ID=31843341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990100580U Expired - Lifetime JPH0634371Y2 (en) | 1990-09-26 | 1990-09-26 | Melt surface observation tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634371Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63233100A (en) * | 1986-11-27 | 1988-09-28 | Sumitomo Electric Ind Ltd | High dissociation pressure compound single crystal production equipment |
-
1990
- 1990-09-26 JP JP1990100580U patent/JPH0634371Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63233100A (en) * | 1986-11-27 | 1988-09-28 | Sumitomo Electric Ind Ltd | High dissociation pressure compound single crystal production equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634371Y2 (en) | 1994-09-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |