JPH0457006A - Optoelectronic device with optical fiber - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a manufacturing technology for an optoelectronic device with an optical fiber, for example, an optoelectronic device with an optical fiber that combines a semiconductor laser device as an optoelectronic device and a fiber guide. In particular, the present invention relates to a technique that is effective when applied to a technique for connecting a fiber guide for guiding a single-mode optical fiber and a semiconductor laser device.

[Prior Art] Optoelectronic devices include light emitting devices such as semiconductor laser devices and light emitting diode devices, and light receiving devices such as photodiode devices.In the field of optical communication, optoelectronic devices and optical fibers are optically coupled. There is a structure. In order to improve this optical coupling rate, advanced assembly technology is required. In particular, in order to couple a single mode fiber whose core diameter is 10 μm or less with a laser beam with good reproducibility, a sophisticated alignment technique between the semiconductor laser and the fiber is required.

Conventional optical coupling techniques include the following.

Japanese Unexamined Patent Publication No. 57-37320 discloses a technique for optical coupling using a mount whose cross section is approximately C-shaped due to a through hole provided in the shaft portion and a slit provided along the through hole. It's broken. In the mount, a light emitting element is inserted into one end of the through hole, and a spacer supporting an optical fiber is inserted into the other end. The optical axes of the optical fiber and light emitting element can be aligned by rotating the light emitting element side, rotating the spacer that eccentrically supports the optical fiber, and adjusting the optical fiber back and forth in the direction along the optical axis as necessary. and do it. Further, the spacer is made of a rubber-like elastic material such as urethane rubber or the like, which has relatively high elasticity, or metal with slots in order to fix the optical fiber. Furthermore, the mount has a prismatic or cylindrical shape, and is provided with a slit along its entire length.

In the example disclosed in Japanese Patent Application Laid-open No. 55-166973,
To align the optical fiber and the light-emitting semiconductor element, the optical fiber is held in a cylindrical fiber holder, and this fiber holder is A stopper is provided at the fiber holder so that the stopper can come into contact with the end face of the fiber holder to prevent the optical fiber from approaching the light-emitting semiconductor element more than necessary, thereby preventing damage to the optical fiber tip and the light-emitting semiconductor element. . Note that in this light emitting semiconductor device with an optical fiber, the fiber holder and the optical fiber are set in an eccentric state.

JP-A-61-127210 and JP-A-631322
No. 11 discloses a method for aligning an optical element and an optical fiber. In this method, the tip of the optical fiber is inserted into a plastically deformable sleeve whose position is fixed, the position of the tip surface of the optical fiber is adjusted by applying force to plastically deform the sleeve, and then the sleeve and the By fixing the gap between the optical fiber and the optical fiber, or by fitting the tip of the optical fiber into a sleeve that is fixed in position and can be plastically deformed in the axial direction, and applying force to plastically deform the sleeve, the optical fiber can be The structure is such that positioning is performed by adjusting the position of the end face of the fiber in the optical axis direction while monitoring the amount of light transmitted from one of the optical fiber and the optical element to the other.

In the example disclosed in Japanese Unexamined Patent Publication No. 57-76510, a photoelectric conversion element ( In addition to fixing the laser diode (laser diode), the aperture has flexibility and bendability, and when positioning the optical fiber and laser diode, an external force is applied to the aperture to displace the laser diode. By doing so, the structure provides good optical coupling.

[Problems to be Solved by the Invention] As disclosed in the above-mentioned literature, in the optical coupling work between an optoelectronic device and an optical fiber, the optical axis direction (Z direction) and the plane direction perpendicular to the optical axis ( It is necessary to perform positioning in the XY force directions.
In both of the techniques disclosed in Japanese Patent Publication No. 20 and Japanese Patent Application Laid-Open No. 166973/1984, the optical fiber is fixed eccentrically in order to align the optical axes in the x and Y directions.
It is difficult to perform optical axis alignment with an error within the eccentric distance (radius), and furthermore, when using a fiber with a core diameter of 10 μm or less, such as a single mode fiber, optical axis alignment becomes even more difficult.

In addition, the above-mentioned Japanese Patent Application Laid-Open No. 63-127210, Japanese Patent Application Laid-Open No. 63-132211, and Japanese Patent Application Laid-Open No. 57-765
In all of the techniques disclosed in Publication No. 10, some external force is applied to a structure that holds an optical fiber to deform the structure and align the optical axis. Therefore, if an external force is applied to the structure again, the structure may be deformed and the optical axis may shift, resulting in a problem that the reliability of the optoelectronic device is reduced. Furthermore, depending on the degree of deformation of the structure, there is also the problem of damaging the optical fiber.

Further, in the above-mentioned document, since the X-Y direction and the Z direction are independently aligned, the adjustment time tends to be long and it is difficult to automate the assembly.

Therefore, an object of the present invention is to provide an optical fiber-equipped optoelectronic device that allows optical coupling between the optical fiber and the optoelectronic device with high precision.

SUMMARY OF THE INVENTION An object of the present invention is to provide an optical fiber-equipped optoelectronic device that allows optical axis alignment and assembly of the optical fiber and the optoelectronic device to be performed in a short time.

The above and other objects and novel features of the present invention include:
It will become clear from the description of this specification and the attached JV page.

[Means for Solving the Problems] A brief overview of typical inventions disclosed in this application is as follows.

That is, the optoelectronic device with an optical fiber of the present invention includes a connecting body made of a tube, a light emitting or light receiving device fixed to one end of the connecting body, and a light emitting or light receiving device fixed to one end of the connecting body, the optical fiber being held in a central portion and the other end of the connecting body being fixed to the connecting body. The fiber guide is fixed to the side, and the connection between the fiber guide and the coupling body is a line connection.

Specifically, in the connection, the connecting body side is the inner circumferential surface of the pipe,
The fiber guide side has a spherical surface inscribed in the tube body G. Therefore, in optical coupling work between an optical fiber and an optoelectronic device, the position of the optical fiber tip in the optical axis direction is adjusted by slidingly adjusting the fiber guide in the direction of the central axis of the tube body (Z direction) of the coupling body. , it is possible to adjust the rotation of the inscribed fiber guide in the direction perpendicular to the optical axis (X-Y direction). Further, after the three-dimensional position adjustment, the fiber guide is fixed to the connecting body using a bonding material or welding. Further, the tip of the optical fiber on the side of the light emitting or light receiving device is structured so as to be approximately flush with the tip surface of the fiber guide, and the image front surface is such that the light reflected from this surface enters the optical system of the optoelectronic device. It is a slope from which there is no turning back.

[Function] As described above, in the optoelectronic device with an optical fiber of the present invention, the fiber guide holding the optical fiber is in line contact with the coupling body through the spherical part, and the optical fiber is fixed at the center of the fiber guide. Because of its structure, the fiber guide can be freely rotated in the ), and the optical axis can be adjusted between the tip of the optical fiber and the light emitting or light receiving device. In addition, since the optical fiber is not eccentrically fixed, there is no put space within which the optical axis cannot be aligned within the eccentric distance, so the optical coupling between the optical fiber and the light emitting or light receiving device attached to the other end of the coupling body is not possible. It can be done with high precision. In addition, since the fiber guide is fixed to the connecting body by bonding material or welding after positioning, stress is not applied to the optical fiber and the fiber guide, making it possible to manufacture optoelectronic devices with optical fibers with high optical coupling efficiency. I can do it.

In addition, when adjusting the optical axis, the fiber guide can be adjusted three-dimensionally at the same time, and the posture after adjustment is less likely to collapse because of the rubbing contact between the spherical surface of the fiber guide and the inner circumferential surface of the tube of the coupling body. It also has good workability.

In addition, in this optoelectronic device with an optical fiber, the tip surfaces of the optical fiber and fiber guide are inclined with respect to the optical axis, so that the reflected light from these surfaces does not return to the optical system of the optoelectronic device. , it is also possible to achieve low noise in optoelectronic devices with optical fibers.

[Example] An example of the present invention will be described below with reference to the drawings.

FIG. 1 is a cross-sectional view showing an outline of an optical fiber high-j optoelectronic device according to an embodiment of the present invention, FIG. FIG. 4 is a cross-sectional view of a fiber guide that constitutes an optoelectronic device with optical fiber, FIG. FIG. 7 is a cross-sectional view showing a state in which the optical axes of the optoelectronic device and the fiber guide attached to the coupling body are aligned, and FIG. 7 is a plan view of the optoelectronic device with the cap removed.

As shown in FIG. 1, the optical fiber-equipped optoelectronic device of the present invention allows light to be transmitted between the optical fiber 1 and a fiber guide 2 that inserts and holds the optical fiber 1 into a guide hole provided along the axial center. A photoelectronic device 3 that performs sending and receiving, and this photoelectronic device 3
and a connecting body 4 that connects the fiber guide 2. Examples of the optoelectronic device 3 include a light emitting diode device that emits light, a semiconductor laser device, and a light receiving device that receives light. In this embodiment, an example in which a semiconductor laser device is incorporated as the optoelectronic device 3 will be described.

Therefore, hereinafter, the semiconductor laser device will also be explained using the reference numeral 3, and the same object will be explained as the optoelectronic device 3 or the semiconductor laser device 3 depending on the time and the case. Note that, in order to understand the outline of the size of the optoelectronic device with optical fiber, an example of dimensions of main parts will be shown as necessary.

The shape of the semiconductor laser device 3 as the photoelectronic bag N3 varies depending on its sealing structure, but in this example, an example using a can sealing structure will be described.

As shown in FIGS. 2 and 7, the semiconductor laser device 3 having a can-sealed structure includes a metal stem 10 and a metal heat sink 1 fixed to the main surface of the stem 10.
1, a semiconductor laser chip 13 attached to the upper end portion of one side of the heat sink 11 via a submount 12, and a semiconductor laser chip 13 attached to the main surface of the stem 10 and airtightly connect the heat sink 11, the semiconductor laser chip 13, etc. It consists of a cap 14 for covering. Furthermore, four ropes 15 are attached to the stem 10. −
The book lead 15 is directly fixed to the conductive stem 10,
It is electrically connected to a lower electrode provided on the back surface of the semiconductor laser device/amp 13. Further, the other three leads 15 penetrate the stem 10 and protrude toward the main surface of the stem 10.

These three rods 15 are connected to the stem 1 through an insulator 19.
attached to 0. Of the three wires 15 that are insulatively attached, one is connected to an upper electrode (not shown) provided on the surface of the semiconductor laser chip 13 and a wire 1.
They are electrically connected via 6. Therefore, when a desired voltage is applied to this lead 15 and the lead 15 directly connected to the stem 10, the semiconductor laser chip 13
Laser light 17 is emitted from both ends of the resonator. In FIG. 2, only the forward light of the laser beam IT is shown, and the description of the backward light is omitted since it would complicate the figure.

Further, a double-mouthed glue protruding from the main surface side of the stem 10 is provided.
A support piece 2 made of a conductive material is attached to the tip of the lead 15.
0 is fixed, and a photodiode chip 21 is fixed on this support piece 20. This photodiode chip 21 is arranged so as to receive the rear light from the semiconductor laser chip 13. Furthermore, the three leads 15 (not shown) and the upper electrode (not shown) formed on the surface of the photodiode chip 21 are connected by wires 16 as shown in FIG. Therefore, since the light receiving state of the photodiode chip 21 can be observed by the pair of glues 15, the output of the semiconductor laser chip 13 can be monitored.

On the other hand, a stepped hole is provided in the center of the ceiling portion of the cap 14, and a spherical lens 22 is fixed to this stepped hole portion via a bonding material 23. The optical axis of the laser beam 17 passes through the center of the lens 22.

In such a semiconductor laser device w3, the stem 1
The outer diameter of 0 is 5.5 mm, and the outer diameter of 1.0 is 5.5 mm. The outer diameter of the pulley 14 is 1.9
mm, the length from stem 10 to cap 14 is approximately 2
．． '5mm.

The connecting body 4 is made of a tubular body made of Kovar (iron Ninokeru Kohar I alloy) with an outer diameter of about 7.5 mm, an inner diameter of about 6 mm, and a length of about 11 mm. One end of this connecting body 4 has a ring-shaped connecting portion 30 that slightly protrudes inward, as shown in FIG. The semiconductor laser device 3 is inserted into a region where the cap 14 is surrounded by the connecting portion 30. And the semiconductor laser device 3
The periphery of the stem 10 is fixed to the connecting portion 30 by welding. In this state, the optical axis 18 of the semiconductor laser device 3 and the central axis 32 of the coupling body 4 are aligned. The fiber guide 2 is attached to the other end of the connecting body 4 as described above, but the inner diameter of the connecting body 4 is slightly shaved for this purpose, and a fit with good dimensional accuracy of 6.5 mm diameter is achieved. A matching hole 31 is provided. This fitting hole 3
1, since the position (Z direction) is adjusted by moving the fiber guide 2 back and forth in the direction along the central axis 32 of the connecting body 4 during assembly, the length d is sufficient for the adjustment. ,
For example, it is about 2.5 mm. In addition, on the fitting hole 31 side of the connecting body 4, in order to make the temporary connection (connection at the positioning stage) between the connecting body 4 and the fiber guide 2 more secure, as shown in FIG. Swan l-70 may also be provided.

The fiber guide 2 is fixed by welding to a rubbing portion 33 forming the fitting hole 31 of the connecting body 4. As shown in FIG. 3, the fiber guide 2 includes a tubular guide 41 having a flange 40 in the middle portion, and this guide 4.
1 and a rubbing part 42 whose rear end (right end) contacts the flange part 40. Further, an optical fiber cable 44 is inserted into the guide hole 43 in the guide 41 from the rear end (right end). The optical fiber cable 44 has a coating 45 removed from its tip over a desired length within the guide hole 43 . Covering body 45
The part where is removed is the optical fiber 1 and the guide 41.
The tip (left end) side is inserted and fixed into a tubular guide 46 made of ceramic. Although not shown in detail, the optical fiber 1 consists of a core extending along the center of the fiber and a cladding 7 covering the core, and the laser beam 17 is taken into the core and transmitted. The optical fiber I has a crat diameter of, for example, 1.25/1 m, and a core diameter of about 7 to 10 μm in the case of a single moat fiber.

Further, in order to prevent the optical fiber 1 from buckling, the portion of the optical fiber 1 extending from the guide 46 to the rubbing portion 42 is
It is inserted into a tubular supporter 47. Further, the optical fiber cable 44 and the optical fiber 1 portion inside the guide hole 43 are fixed by a bonding material 48 such as resin that is injected into the guide hole 43 and hardened.

On the other hand, the tip surfaces (left end surfaces) of the optical fiber 1, the supporter 47, and the guide 41 are formed to be on the same plane, and the tip surface 49 is connected to the optical axis 50 of the optical fiber 1 or the semiconductor laser device. It is inclined with respect to the optical axis of 3.

The tip surface 49 is set at an angle θ, for example, about 4 degrees, with respect to a plane perpendicular to the optical axis 50, and after the fiber guide 2 is optically coupled to the semiconductor laser device 3, the laser beam 17 at the tip surface 49 is The reflected light passes through the optical system of the semiconductor laser device 3,
In other words, it is set so as not to return to the cavity end face of the semiconductor laser chip 13. This prevents reflected light from returning to the semiconductor laser chip 13, thereby further reducing the generation of noise.

On the other hand, the rubbing portion 42 fitted and fixed to the outside of the guide 41 has a spherical portion 55 .

The diameter of this spherical portion 55 is slightly smaller than the fitting hole 31 of the connecting body 4, and has, for example, a gap-eye fit structure. Therefore, fiber guide 2
The spherical surface 56 of the spherical portion 55 and the tube inner peripheral surface 57 of the rubbing portion 33 of the fiber guide 2 become rubbing surfaces, and the fiber guide 2 is aligned with the center axis 3 of the fitting hole 31 of the connecting body 4
2, and the rotation can be adjusted around the center of the spherical portion 55. For this reason,
The fiber guide 2 is rotated by rotating the fiber guide 2.
The position of the tip of the optical fiber 1 held in the connecting body 4 can be moved and adjusted in a direction intersecting the central axis 32 of the connecting body 4, that is, along a plane direction (X-Y direction) perpendicular to the central axis 32. In addition, the Fiha guide 2 is connected to the central axis 3 of the connecting body 4.
By moving it back and forth in the direction along 2 (Z direction),
This makes it possible to adjust the position of the tip of the optical fiber l in the Z direction.

Such a fiber guide 2 is fixed to the connecting body 4 by welding, soldering, or the like in the final stage of assembly.

Welding is performed between the spherical portion 55 of the fiber guide 2 and the edge of the fitting hole 31 of the connecting body 4. Further, in order to ensure welding reliability and miniaturization, the dimensions of each part are set so that the contact between the spherical part 55 and the rubbing part 33 is made near the edge of the fitting hole 31. 58 in FIG. 1 is a welded portion.

Next, a method for assembling such an optoelectronic device with an optical fiber will be explained.

In assembling an optoelectronic device with an optical fiber, a connected body 4, a fiber guide 2, and a semiconductor laser device 3, each of which has been processed and assembled, are prepared. Thereafter, as shown in FIG.
A semiconductor laser device 3 is fixed on the 0 side. This fixation is performed by overlapping the connecting portion 30 on the peripheral edge portion of the stem 10 and then welding it. At this time, welding is performed after positioning so that the optical axis 18 of the semiconductor laser device 3 and the central axis 32 of the coupling body 4 substantially coincide with each other.

Next, as shown in FIG.
The spherical portion 55 is inserted. The fiber guide 2 is held and moved by, for example, a chuck 60 of an automatic assembly machine, and is inserted into a fitting hole 3 of a connecting body 4 fixed to a table (not shown).
Fitted into 1. In this case, as shown in FIG.
Since the spherical surface portion 55 is elastically held by the rubbing portion 33, more reliable positioning work is possible. Note that a power meter 61 is connected to the end of the optical fiber cable 44 attached to the fiber guide 2.

Next, a predetermined voltage is applied to the semiconductor laser device 3 via the lead 15, and a laser beam 17 is emitted.

The chunk 60 is arranged in a plane direction perpendicular to the optical axis 50 of the fiber guide 2 (x-y direction) and in a direction along the optical axis 50 (Z
direction), and the laser beam 17 is taken into the optical fiber 1 at the tip of the fiber guide 2. Then, the output of the laser beam 17 taken into the optical fiber 1 is measured by the power meter 6.
Detected by 1. The chuck 6o is controlled by a control device (not shown) so that the detected optical output is maximized.

Next, when the optical output detected by the power meter 61 is at its maximum, the spherical part 55 and the rubbing part 33 are fixed by laser welding, thereby producing the optoelectronic device with optical fiber shown in FIG. Manufactured. Since the laser welding applies heat locally, each member is not thermally damaged and can be firmly fixed. Incidentally, fixing is not limited to welding, and it goes without saying that various bonding materials such as brazing material may be used.

According to such an embodiment, the following effects can be obtained.

(1) In the optoelectronic device with an optical fiber of the present invention, the fiber guide that holds the optical fiber and the semiconductor laser device are integrated with a connecting body interposed therebetween;
Before being fixed to the connector, the fiber guide has a rubbing structure in which the spherical part makes line contact with the inner peripheral surface of the tube.
The effect is obtained that the rotation of the spherical part can be controlled at a position where the spherical part is stationary.

(2) According to (1) above, in the optical fiber-equipped optoelectronic device of the present invention, the rotation of the fiber guide can be controlled by the spherical portion before the fiber guide is fixed to the coupling body, and
This provides the effect that the spherical portion can be moved back and forth along the central axis of the connecting body.

(3) According to (2) above, in the optical fiber-equipped optoelectronic device of the present invention, the rotation of the fiber guide can be controlled by the spherical portion before the fiber guide is fixed to the coupling body, and
Since the spherical part can be moved back and forth along the central axis of the coupling body, by controlling the rotation of the spherical part and the movement of the coupling body in the direction of the central axis, the tip of the optical fiber held in the fiber guide can be moved in three dimensions. The effect is that the position can be adjusted precisely.

(4) According to (3) above, in the optoelectronic device with an optical fiber of the present invention, by applying an input to the fiber guide and operating it before fixing the fiber guide to the coupling body, it is possible to face the semiconductor laser device. Since the position of the tip of the optical fiber can be adjusted three-dimensionally, it is possible to set the laser light input (output) taken into the optical fiber to any input from the maximum input.

(5) According to (4) above, in the optoelectronic device with an optical fiber of the present invention, before fixing the fiber guide to the coupling body, the fiber guide is operated to adjust the tip of the optical fiber facing the semiconductor laser device. Since the position can be adjusted three-dimensionally, the laser light input into the optical fiber can be set to the maximum input, resulting in an optical fiber-equipped optoelectronic device with high optical coupling efficiency.

(6) According to (3) above, in the optical fiber-equipped optoelectronic device of the present invention, the optical coupling operation between the semiconductor laser device and the optical fiber can be performed by one operation of the fiber guide during assembly. can be adjusted three-dimensionally, resulting in good workability and the ability to perform optical coupling work in a short time.

(7) From the above (6) Q, the optical fiber of the present invention (=i
In the assembly of optoelectronic devices, the optical coupling between the semiconductor laser device and the optical fiber can be performed three-dimensionally by adjusting the tip of the optical fiber with a single operation of the fiber guide, so the assembly process can be simplified. The effect is that it can be significantly simplified.

(8) In the optoelectronic device with an optical fiber of the present invention, since a lens is provided in the center of the cap of the semiconductor laser device, the laser light emitted from the semiconductor laser chip is focused by this lens and sent to the optical fiber. Since it has a structure in which the fibers are gathered together, it is possible to obtain the effect that the optical coupling efficiency in a single mode optical fiber with a small core diameter can also be increased.

(9) In the optoelectronic device with an optical fiber of the present invention, the optical fiber and the guide that receive the laser beam, and the tip end surface of the guide are inclined with respect to the optical axis, and the reflected light from the tip surface is directed to the resonator end surface of the semiconductor laser deep. Since it does not return, it is possible to achieve the effect of achieving low noise.

(10) According to J2 (1) to (9), according to the present invention, a synergistic effect can be obtained in that an optical fiber-equipped optoelectronic device with high optical coupling efficiency and high performance can be provided at a low cost.

Hereinafter, the invention made by the inventor Niki has been specifically explained based on examples, but the present invention is not limited to the above examples, and it is understood that various changes can be made without departing from the gist of the invention. Needless to say. For example, as shown in FIG. 8, if a plurality of slits 70 extending in the direction along the central axis 32 are provided in the rubbing part 33 of the connecting body 4 to which the fiber guide 2 is attached, Since the center part 33 can elastically hold the spherical part 55 of the fiber guide 20, the dimensional accuracy of the spherical part 55 does not need to be machined with such high precision, which has the effect of reducing processing costs. is obtained.

9 and 10 show a fiber guide 2 according to a modified example of the present invention. This fiber guide 2 includes a guide 41 that holds an optical fiber cable 44, and a guide 41 that holds an optical fiber cable 44.
The rubbing part 42 is formed of a spherical part 55 provided at the middle part of the first part.
As shown in the figure, the spherical surface 56 is part of a circle.

Even with such a structure, the tip of the optical fiber 1 facing the semiconductor laser device 3 can be adjusted three-dimensionally with a single operation.

FIG. 11 is a sectional view showing the main parts of an optical fiber-equipped optoelectronic device according to another embodiment of the present invention. In this example, by positioning the tip of the optical fiber 1 close to the center of the spherical portion 55 of the fiber guide 2, the structure performs optical coupling between the optical fiber 1 and the semiconductor laser device 3 in the same way as in the previous embodiment. That is. According to this structure, since the tip of the optical fiber 1 is located inside the spherical portion 55, it is possible to achieve the effect that the optoelectronic device with an optical fiber can be further miniaturized.

In the above explanation, we have mainly explained the case where the invention made by the present inventor is applied to the optical coupling technology between a semiconductor laser device as a light source for optical communication and an optical fiber, which is the field of application that formed the background of the invention. The present invention is not limited to this and can be applied to optical coupling technology between an optical fiber and an optoelectronic device that incorporates a light-emitting diode device that emits light or a light-receiving device that receives light.

〔Effect of the invention〕

A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

The optoelectronic device with an optical fiber of the present invention has a structure in which the fiber guide that holds the optical fiber comes into contact with the inner circumferential surface of the tube of the coupling body through the spherical part, so the tip of the optical fiber can be adjusted by adjusting the fiber guide. Since it can be adjusted three-dimensionally at the same time, the positioning adjustment between the tip of the optical fiber and the optoelectronic device can be performed with high precision and in a short time. Further, since the fiber guide is fixed to the coupling body after the optical coupling operation, it is possible to manufacture an optical fiber-equipped optoelectronic device with high optical coupling efficiency.

[Brief explanation of drawings]

Part 1 is a sectional view showing an overview of an optoelectronic device with an optical fiber according to an embodiment of the present invention, Fig. 2 is a sectional view of an optoelectronic device constituting the optoelectronic device with an optical fiber, and Fig. 3 is also a sectional view showing an optoelectronic device with an optical fiber. 4 is a sectional view of a coupling body that also constitutes an optoelectronic device with an optical fiber, FIG. 5 is a sectional view of the optoelectronic device fixed to the coupling body, and FIG. 6 is a sectional view of the optoelectronic device. 7 is a plan view of the optoelectronic device with the cap removed; FIG. 8 is a sectional view of a coupling body according to a modified example of the present invention; FIG. 9 is a front view of a fiber guide according to a modified example of the present invention, FIG. 10 is a side view of the same fiber guide, and FIG. 11 is a sectional view of an optoelectronic device with an optical fiber according to a modified example of the present invention. 1... Optical fiber, 2... Fiber guide, 3...
・Semiconductor laser device (optoelectronic device), 4... coupling body,
10... Stem, 11... Heat sink, 12...
・Submount, 13... Semiconductor laser chip, 14
... Cap, 15 ... Lead, 16 ... Wire, 17 ... Laser light, 18 ... Optical axis, 19 ... Insulator, 20 ... Support piece, 21 ... Photodiode Chip, 22... Lens, 23... Bonding material, 30...
・Connection part, 31... Fitting hole, 32... Center shaft, 33
... Rubbing portion, 35... Pipe inner peripheral surface, 40...
Flange part, 41... Guide, 42... Rubbing part, 4
3... Guide hole, 44... Optical fiber cable, 4
5... Covering body, 46... Guide, 47... Supporter, 48... Bonding material, 49... Tip surface, 55...
Spherical surface portion, 56... Spherical surface, 57... Pipe inner peripheral surface, 58.
...welding part, 60...chuck, 61...power meter, 70...slit.

Claims (1)

[Scope of Claims] 1. An optoelectronic device, an optical fiber whose inner end faces the optical axis of the optoelectronic device, a fiber guide that supports the optical fiber, and a coupling body that connects the optoelectronic device and the fiber guide. The fiber guide and the coupling body are characterized in that they are in contact with and fixed to each other at a rubbing surface that allows the inner ends of the optical fibers to be moved and adjusted in the optical axis direction and the direction transverse to the optical axis. Optoelectronic device with optical fiber. 2. The optical axis of the optical fiber held by the fiber guide is configured to coincide with or intersect with the optical axis of the optoelectronic device by adjusting the fiber guide. Optoelectronic device with optical fiber as described. 3. The optical fiber-attached optoelectronic device according to claim 1, wherein the connecting body is a tube, and the contact portion of the fiber guide that contacts the inner circumferential surface of the tube is a spherical surface. Device. 4. The optoelectronic device with an optical fiber according to claim 1, wherein the optoelectronic device has a lens for condensing light. 5. A patent claim characterized in that the distal end surface of the optical fiber and/or the distal end surface of the fiber guide is inclined at an angle such that light reflected from the distal end surface does not return to the optical system of the optoelectronic device. The optoelectronic device with an optical fiber according to item 1.