JPH0459280B2 - - Google Patents

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Publication number
JPH0459280B2
JPH0459280B2 JP59001841A JP184184A JPH0459280B2 JP H0459280 B2 JPH0459280 B2 JP H0459280B2 JP 59001841 A JP59001841 A JP 59001841A JP 184184 A JP184184 A JP 184184A JP H0459280 B2 JPH0459280 B2 JP H0459280B2
Authority
JP
Japan
Prior art keywords
garnet
single crystal
lattice constant
solid solution
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59001841A
Other languages
Japanese (ja)
Other versions
JPS60145990A (en
Inventor
Kenichi Shiraki
Taketoshi Hibya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59001841A priority Critical patent/JPS60145990A/en
Publication of JPS60145990A publication Critical patent/JPS60145990A/en
Publication of JPH0459280B2 publication Critical patent/JPH0459280B2/ja
Granted legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/02Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/22Complex oxides
    • C30B29/28Complex oxides with formula A3Me5O12 wherein A is a rare earth metal and Me is Fe, Ga, Sc, Cr, Co or Al, e.g. garnets

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Soft Magnetic Materials (AREA)
  • Thin Magnetic Films (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はガーネツト単結晶基板上に育成したビ
スマス(Bi)を含有する磁性ガーネツト液相エ
ピタキシヤル単結晶に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic garnet liquid phase epitaxial single crystal containing bismuth (Bi) grown on a garnet single crystal substrate.

〔従来技術〕[Prior art]

光通信において、光源であるレーザダイオード
に反射戻り光が入ると伝送の品質を悪くすること
が知られている。この問題の解決のために、電子
通信学会誌「技術研究報告OQE78−133に関、小
林および植木らによつて報告されているように、
1.3μm帯においてはイツトリウム−鉄−ガーネツ
トをフアラデー回転子とした光アイソレータを用
いることが提案されている。
In optical communications, it is known that reflected return light entering a laser diode, which is a light source, deteriorates the quality of transmission. In order to solve this problem, as reported by Kobayashi and Ueki et al. in Technical Research Report OQE78-133, Journal of the Institute of Electronics and Communication Engineers,
In the 1.3 μm band, it has been proposed to use an optical isolator using yttrium-iron-garnet as a Faraday rotator.

〔従来技術の問題点〕[Problems with conventional technology]

光アイソレータ材料としては、従来のイツトリ
ウム−鉄−ガーネツトよりも、使用する光波長に
おいてさらに吸収損失が小さく、しかもさらにフ
アラデー回転能の大きいものが要求される。この
ような条件を満たす材料として、Biを固溶した
ガーネツトが知られている。このBi固溶ガーネ
ツトの材料特性は、例えば竹内らの論文、ジヤパ
ニーズ・ジヤーナル・オブ・アプライド・フイジ
ツクス(Japanese Journal of Applied
Physics)第12巻(1973)465頁、およびウイツト
コークらの論文、エー・アイ・ピー・コンフアレ
ンス・プロシーデイングス(AIP Conference
Proceedings)10巻(1972)1418頁、等によつて
報告されている。
The optical isolator material is required to have a lower absorption loss than the conventional yttrium-iron-garnet at the wavelength of light used, and a higher Faraday rotation ability. Garnet containing Bi as a solid solution is known as a material that satisfies these conditions. The material properties of this Bi solid solution garnet are described, for example, in the paper by Takeuchi et al., Japanese Journal of Applied Physics.
Physics), Volume 12 (1973), p. 465, and the paper by Uitzkok et al., AIP Conference Proceedings.
Proceedings) Volume 10 (1972) Page 1418, etc.

ガーネツト結晶の示す磁気光学効果すなわちフ
アラデー回転能の大きさは結晶中に固溶したBi
の量と共に増大する。しかしながら、Biを多量
に固溶させようとしても、その固溶量に限界があ
ることが知られている。これらの状況は以下の論
文によつて詳しく述べられている。
The magnitude of the magneto-optical effect, or Faraday rotation ability, exhibited by garnet crystals is due to the Bi dissolved in the crystal.
increases with the amount of However, even if it is attempted to dissolve a large amount of Bi in solid solution, it is known that there is a limit to the amount of Bi in solid solution. These situations are detailed in the following papers.

例えば、品川らによるジヤパニーズ・ジヤーナ
ル・オブ・アプライド・フイジツクス
(Japanese Journal of Applied Physics)第13
巻(1974)1663頁における多結晶体(セラミツク
ス)に関する報告が第一の例で以下に説明する。
磁性ガーネツト結晶Re3Fe5O12(ReはSm,Eu,
Gd,Tb,Dy,Y,Er,Tmのうちの1つ)の中
にBiを固溶させる場合、上記元素Reに置きかわ
つてBiが入り、Re3-xBixFe5O12の組成の結晶が
生成される。Biの固溶量の限界は上記元素Reの
種類によつて異なり、最も多くBiを固溶できる
のは、Reがガドリニウム(Gd)の場合、すなわ
ちGd3-xBixFe5O12の場合で、xの上限は約1.4で
ある。これ以上にBi量を増加させようとすると
ガーネツト以外の相(ガーネツトでない組成と結
晶構造の物質)が生成されてしまう。生成された
ガーネツト結晶の格子定数を調べた結果では、格
子定数はBiの固溶量と共に増大し、x=1.4では
格子定数は12.54Åである。
For example, Japanese Journal of Applied Physics, No. 13 by Shinagawa et al.
The report on polycrystalline materials (ceramics) in Vol. (1974) p. 1663 is the first example and will be explained below.
Magnetic garnet crystal Re 3 Fe 5 O 12 (Re is Sm, Eu,
When Bi is dissolved as a solid solution in one of Gd, Tb, Dy, Y, Er, and Tm, Bi replaces the above element Re, and the composition of Re 3-x Bi x Fe 5 O 12 crystals are produced. The limit of the amount of Bi in solid solution differs depending on the type of element Re mentioned above, and the most Bi can be dissolved in solid solution when Re is gadolinium (Gd), that is, when Gd 3-x Bi x Fe 5 O 12 So, the upper limit of x is about 1.4. If an attempt is made to increase the amount of Bi beyond this, a phase other than garnet (a substance with a composition and crystal structure other than garnet) will be generated. The results of examining the lattice constant of the produced garnet crystal show that the lattice constant increases with the amount of Bi solid solution, and at x=1.4, the lattice constant is 12.54 Å.

ついでフラツクス法によつてGd3-xBixFe5O12
単結晶を成長させた場合についての報告である玉
城、対島による第7回応用磁気学会講演概要集
(1983)163〜164頁の例では、Biの固溶限界は多
結晶の場合よりも小さくx=1.15程度で、この場
合の格子定数の推算値は12.53Åである。
Then, by flux method, Gd 3-x Bi x Fe 5 O 12
In the report on the case of growing single crystals by Tamashiro and Tsushima in Proceedings of the 7th Japan Society of Applied Magnetics (1983), pp. 163-164, the solid solubility limit of Bi is smaller than that of polycrystals. When x=about 1.15, the estimated value of the lattice constant in this case is 12.53 Å.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、これまでに知られているBi
固溶ガーネツト結晶よりもBi固溶量を増加させ
た、従来のイツトリウム−鉄−ガーネツトや、こ
れまで知られているBi固溶ガーネツト結晶より
も、更にすぐれた磁気光学効果を有するBi固溶
ガーネツト単結晶を提供することにある。
The object of the present invention is to solve the problem of the previously known Bi
A Bi solid solute garnet with a magneto-optical effect that is even better than the conventional yttrium-iron-garnet and the previously known Bi solid solute garnet crystals, which have an increased Bi solid solution content than the solid solute garnet crystals. Our goal is to provide single crystals.

〔発明の構成〕[Structure of the invention]

本発明によれば、格子定数が12.53Å以上12.64
Å以下の値を有するガーネツト単結晶を基板とし
て該基板上に液相エピタキシヤル成長させた、組
成式がGd3-xBixFe5O12(1.72≦x≦3)である液
相エピタキシヤル磁性ガーネツト単結晶が得られ
る。
According to the present invention, the lattice constant is 12.53 Å or more 12.64
Liquid phase epitaxial growth using a garnet single crystal having a value of Å or less as a substrate and having a composition formula of Gd 3-x Bi x Fe 5 O 12 (1.72≦x≦3). A magnetic garnet single crystal is obtained.

〔発明の原理〕[Principle of the invention]

本発明の原理は、本発明者らの実験によつて見
出されたものである。すなわち、Bi2O3を多量に
含む融液を用いて格子定数が12.568ÅのGd3-xBix
Fe5O12(x≧1.72)液相エピタキシヤル磁性単結
晶を育成させる場合に、格子定数が12.383Åの
Gd3Ga5O12単結晶を基板として用いて上記エピタ
キシヤル単結晶の育成を試みたところ、液相温度
以下の融液に基板を浸漬してもガーネツト単結晶
膜の成長は見られなかつたが、基板として格子定
数が12.567ÅのGd3Sc2Ga3O12を用いたところガ
ーネツト単結晶膜が得られたことによる。すなわ
ち、Biを多量に固溶した格子定数の大きい液相
エピタキシヤル磁性ガーネツト単結晶膜を得るに
は、基板の格子定数もこれに対応したものでなけ
ればならず、格子定数の不整合が大きい場合に
は、基板上にガーネツト膜を成長させることがで
きない。
The principle of the present invention was discovered through experiments by the inventors. That is, using a melt containing a large amount of Bi 2 O 3 , Gd 3-x Bi x with a lattice constant of 12.568 Å
Fe 5 O 12 (x≧1.72) When growing a liquid phase epitaxial magnetic single crystal, the lattice constant is 12.383 Å.
When we attempted to grow the above epitaxial single crystal using a Gd 3 Ga 5 O 12 single crystal as a substrate, no growth of a garnet single crystal film was observed even when the substrate was immersed in a melt below the liquidus temperature. However, when Gd 3 Sc 2 Ga 3 O 12 with a lattice constant of 12.567 Å was used as a substrate, a garnet single crystal film was obtained. In other words, in order to obtain a liquid-phase epitaxial magnetic garnet single crystal film with a large lattice constant containing a large amount of Bi as a solid solution, the lattice constant of the substrate must also correspond to this, and the lattice constant mismatch is large. In some cases, it is not possible to grow a garnet film on the substrate.

〔実施例〕〔Example〕

以下、本発明の実施例について詳細に説明す
る。
Examples of the present invention will be described in detail below.

(実施例 1) 基板結晶としてはGd3Sc2Ga3O12非磁性単結晶
ウエフアーを用いた。このウエフアーは、同じ組
成をもつ融液より回転引上法によつて〈111〉方
向に引上育成した原石より作製したもので、この
ウエフアーの格子定数は12.567Å、このウエフア
ーの面方位は{001}面、このウエフアーの直径
は25mmである。このウエフアーに対して、酸化ガ
ドリニウム(Gd2O3)0.4029モル%、酸化鉄
(Fe2O3)7.5971モル%、酸化鉛(PbO)65.7143
モル%、酸化ビスマス(Bi2O3)26.2857モル%の
組成の融液を用いて、深さ内径ともに50mmの白金
るつぼ中で680℃において過冷却温度30℃で液相
エピタキシヤル成長を35分行なつた。この結果、
ウエフアー上に厚さ40μmのBiを固溶した均質な
磁性ガーネツト単結晶膜(Gd3-xBixFe5O12)が
得られた。このガーネツト膜中の格子定数の測定
をX線回折ボンド法により行つた。この結果では
格子定数12.568Åであつた。Bi固溶量xをエツク
ス線マイクロアナライザーにより分析したところ
x=1.72であつた。
(Example 1) A Gd 3 Sc 2 Ga 3 O 12 nonmagnetic single crystal wafer was used as the substrate crystal. This wafer was fabricated from a raw stone that was pulled and grown in the <111> direction from a melt having the same composition by a rotational pulling method.The lattice constant of this wafer is 12.567 Å, and the plane orientation of this wafer is { 001} plane, the diameter of this wafer is 25 mm. For this wafer, gadolinium oxide (Gd 2 O 3 ) 0.4029 mol %, iron oxide (Fe 2 O 3 ) 7.5971 mol %, lead oxide (PbO) 65.7143 mol %
Using a melt with a composition of 26.2857 mol% bismuth oxide (Bi 2 O 3 ), liquid phase epitaxial growth was performed for 35 minutes at 680°C with a supercooling temperature of 30°C in a platinum crucible with a depth and inner diameter of 50 mm. Summer. As a result,
A homogeneous magnetic garnet single crystal film (Gd 3-x Bi x Fe 5 O 12 ) containing Bi as a solid solution with a thickness of 40 μm was obtained on the wafer. The lattice constant in this garnet film was measured by the X-ray diffraction bond method. In this result, the lattice constant was 12.568 Å. When the Bi solid solution amount x was analyzed using an X-ray microanalyzer, it was found that x=1.72.

(実施例 2) 基板結晶としてはNd3Ga4Mg0.5Zr0.5O12非磁性
単結晶ウエフアーを用いた。このウエフアーは、
組成としてNd3Ga4Mg0.6Zr0.4O12をもつ融液から
引上法により〈111〉方向に引上育成し、その一
部より切出して作製したものである。ウエフアー
の格子定数は12.603Å、面方位は{110}面直径
23mmである。このウエフアーを用い、組成として
Gd2O30.3525モル%、Fe2O36.6475モル%、
PbO66.4286モル%、Bi2O326.5714モル%の融液
を用い、深さ内径ともに50mmの白金るつぼ中で
640℃において過冷却温度80℃で液相エピタキシ
ヤル成長を行つた。成長時間20分で基板ウエフア
ー上に30μmの厚さのBiを固溶した均質な磁性ガ
ーネツト単結晶膜が得られた。この結晶膜につい
て格子定数を測定した結果12.602Åであり、Bi固
溶量を分析した結果x=2.5すなわち組成式にて
Gd0.5Bi2.5Fe5O12であつた。
(Example 2) A Nd 3 Ga 4 Mg 0.5 Zr 0.5 O 12 nonmagnetic single crystal wafer was used as the substrate crystal. This wafer is
It was produced by pulling and growing a melt having the composition Nd 3 Ga 4 Mg 0.6 Zr 0.4 O 12 in the <111> direction using the pulling method, and then cutting out a portion of the melt. The lattice constant of the wafer is 12.603 Å, and the plane orientation is {110} plane diameter.
It is 23mm. Using this wafer, the composition
Gd 2 O 3 0.3525 mol%, Fe 2 O 3 6.6475 mol%,
A melt containing 66.4286 mol% of PbO and 26.5714 mol% of Bi 2 O 3 was used in a platinum crucible with a depth and inner diameter of 50 mm.
Liquid phase epitaxial growth was performed at 640°C with a supercooling temperature of 80°C. In a growth time of 20 minutes, a homogeneous magnetic garnet single crystal film with a thickness of 30 μm containing Bi dissolved therein was obtained on the substrate wafer. As a result of measuring the lattice constant of this crystal film, it was 12.602 Å, and as a result of analyzing the amount of Bi solid solution, x = 2.5, that is, the composition formula
It was Gd 0.5 Bi 2.5 Fe 5 O 12 .

(実施例 3) 基板結晶としては格子定数が12.64ÅのSm3Sc2
Ga3O12非磁性ガーネツト単結晶ウエフアーで
{111}面に平行なものを用いた。直径は23mmであ
る。この基板上にGd2O30.0147モル%、Fe2O3
5.4386モル%、PbO59.5294モル%、Bi2O335.0173
モル%の融液を用い、深さ内径ともに50mmの白金
るつぼ中で610℃において過冷却温度130℃で液相
エピタキシヤル成長を行つた。成長時間20分で基
板ウエフアー上に70μmの厚さのBiを固溶した均
質な磁性ガーネツト単結晶膜が得られた。この結
晶膜の格子定数は12.635Å、Biの固溶量はx=
3.0すなわち組成式としてBi3Fe5O12が得られた。
(Example 3) The substrate crystal is Sm 3 Sc 2 with a lattice constant of 12.64 Å.
A Ga 3 O 12 nonmagnetic garnet single crystal wafer parallel to the {111} plane was used. The diameter is 23mm. Gd 2 O 3 0.0147 mol%, Fe 2 O 3 on this substrate
5.4386 mol%, PbO59.5294 mol%, Bi2O3 35.0173
Liquid phase epitaxial growth was performed using a mol % melt in a platinum crucible with a depth and inner diameter of 50 mm at 610°C and a supercooling temperature of 130°C. After a growth time of 20 minutes, a homogeneous magnetic garnet single crystal film with a thickness of 70 μm containing Bi dissolved therein was obtained on the substrate wafer. The lattice constant of this crystal film is 12.635 Å, and the amount of Bi solid solution is x =
3.0, that is, the compositional formula Bi 3 Fe 5 O 12 was obtained.

(実施例 4) 基板結晶としては、格子定数が12.530Åの
Gd0.39Tb2.61Sc2Ga3O12非磁性ガーネツト単結晶ウ
エフアーで{111}面に平行なものを用いた。直
径は23mmである。この基板上にGd2O30.3828モル
%、Fe2O37.2172モル%、PbO62.4286モル%、
Bi2O324.9714モル%、B2O35.0000モル%の融液を
用い深さ内径ともに50mmの白金るつぼ中で720℃
において過冷却温度60℃で液相エピタキシヤル成
長を行つた。成長時間15分、基板ウエフアー上に
40μmの厚さのBiを固溶した均質な磁性ガーネツ
ト単結晶膜が得られた。この結晶膜の格子定数
は、12.568Åであり、Bi固溶量はx=1.72であつ
た。
(Example 4) The substrate crystal has a lattice constant of 12.530 Å.
Gd 0.39 Tb 2.61 S c2 Ga 3 O 12 A nonmagnetic garnet single crystal wafer parallel to the {111} plane was used. The diameter is 23mm. On this substrate, Gd 2 O 3 0.3828 mol%, Fe 2 O 3 7.2172 mol%, PbO6 2.4286 mol%,
A melt containing 24.9714 mol% of Bi 2 O 3 and 5.0000 mol% of B 2 O 3 was heated at 720°C in a platinum crucible with a depth and inner diameter of 50 mm.
Liquid phase epitaxial growth was carried out at a supercooling temperature of 60℃. Growth time 15 minutes, on the substrate wafer
A homogeneous magnetic garnet single crystal film containing Bi as a solid solution with a thickness of 40 μm was obtained. The lattice constant of this crystal film was 12.568 Å, and the amount of Bi solid solution was x=1.72.

以上の実施例では、夫々得られたBiを固溶し
たガーネツト単結晶膜中のBi固溶量はいずれも、
従来得られたガーネツト単結晶中のBi固溶量よ
り大きく、その量は基板結晶の格子定数の大きさ
に対応している。なお、上記実施例においては4
種類の基板結晶について説明したが、12.53Å以
上12.64Å以下の格子定数値を有するガーネツト
単結晶であれば、他の組成のガーネツト単結晶で
あつても基板として使つて、組成式がGd3-xBix
Fe5O12(1.72≦x≦3)である液相エピタキシヤ
ル磁性ガーネツト単結晶を得ることができる。
In the above examples, the amount of Bi solid solution in each of the obtained garnet single crystal films containing Bi solid solution was as follows:
This amount is larger than the amount of Bi solid solution in the conventionally obtained garnet single crystal, and the amount corresponds to the size of the lattice constant of the substrate crystal. In addition, in the above example, 4
Although we have explained the types of substrate crystals, garnet single crystals with other compositions can be used as substrates as long as they have a lattice constant value of 12.53 Å or more and 12.64 Å or less, and the composition formula is Gd 3- x Bi x
A liquid phase epitaxial magnetic garnet single crystal with Fe 5 O 12 (1.72≦x≦3) can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、これまで
知られているBi固溶ガーネツト結晶よりもBi固
溶量を増すことが可能となり、従来のイツトリウ
ム−鉄−ガーネツトやこれまで知られているBi
固溶ガーネツト結晶よりも、更にすぐれた磁気光
学効果を有するBi固溶ガーネツト単結晶を得る
ことができる。
As explained above, according to the present invention, it is possible to increase the amount of Bi solid solution compared to the conventional yttrium-iron-garnet crystal and the previously known Bi solid solution garnet crystal.
It is possible to obtain a Bi solid solution garnet single crystal which has a magneto-optical effect that is even better than that of a solid solution garnet crystal.

Claims (1)

【特許請求の範囲】[Claims] 1 格子定数が12.53Å以上12.64Å以下の値を有
するガーネツト単結晶を基板として該基板上に液
相エピタキシヤル成長させた、組成式がGd3-x
BixFe5O12(1.72≦x≦3)である液相エピタキシ
ヤル磁性ガーネツト単結晶。
1 A garnet single crystal with a lattice constant of 12.53 Å or more and 12.64 Å or less is used as a substrate and is grown by liquid phase epitaxial growth on the substrate, and the composition formula is Gd 3-x.
Liquid phase epitaxial magnetic garnet single crystal with Bi x Fe 5 O 12 (1.72≦x≦3).
JP59001841A 1984-01-11 1984-01-11 Liquid-phase epitaxial magnetic garnet single crystal Granted JPS60145990A (en)

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Application Number Priority Date Filing Date Title
JP59001841A JPS60145990A (en) 1984-01-11 1984-01-11 Liquid-phase epitaxial magnetic garnet single crystal

Publications (2)

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JPS60145990A JPS60145990A (en) 1985-08-01
JPH0459280B2 true JPH0459280B2 (en) 1992-09-21

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US9771304B2 (en) 2015-06-15 2017-09-26 Skyworks Solutions, Inc. Ultra-high dielectric constant garnet

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