JPH0459452U - - Google Patents
Info
- Publication number
- JPH0459452U JPH0459452U JP10303490U JP10303490U JPH0459452U JP H0459452 U JPH0459452 U JP H0459452U JP 10303490 U JP10303490 U JP 10303490U JP 10303490 U JP10303490 U JP 10303490U JP H0459452 U JPH0459452 U JP H0459452U
- Authority
- JP
- Japan
- Prior art keywords
- storage tank
- liquid storage
- processing liquid
- sample
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 2
- 229910052731 fluorine Inorganic materials 0.000 claims 2
- 239000011737 fluorine Substances 0.000 claims 2
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
図面は本考案の実施例を示す縦断正面図である
。
１……ケーシング、２……試料搬出入室、３…
…試料熱処理室、５……処理液貯溜槽、６……洗
浄液貯溜槽、８……試料かご、９……昇降手段、
１０……加熱手段、１５……接続通路、１６……
凝縮用冷却手段。
The drawing is a longitudinal sectional front view showing an embodiment of the present invention. 1...Casing, 2...Sample loading/unloading chamber, 3...
... Sample heat treatment chamber, 5 ... Processing liquid storage tank, 6 ... Cleaning liquid storage tank, 8 ... Sample basket, 9 ... Lifting means,
10... Heating means, 15... Connection passage, 16...
Cooling means for condensation.
Claims (1)
室３とを上下に区画して形成し、試料熱処理室３
にフツ素系不活性液からなる処理液を貯溜する処
理液貯溜槽５とフツ素系不活性液からなる洗浄液
を貯溜する洗浄液貯溜槽６とを配置し、この処理
液貯溜槽５に加熱手段１０を配置して処理液貯溜
槽５内の処理液を加熱可能に構成し、試料搬出入
室２内に試料かご８を試料搬出入室２と各液貯溜
槽５，６と間で昇降させる昇降手段９を配置し、
この昇降手段９を処理液貯溜槽５の上側に対応す
る状態と洗浄液貯溜槽６の上側に対応する状態と
に切り替え移動可能に配置し、試料搬出入室２と
処理液貯溜槽５との接続通路１５部分に凝縮用冷
却手段１６を配置した半導体耐久試験用液槽式前
処理装置。 A sample loading/unloading chamber 2 and a sample heat treatment chamber 3 are vertically divided and formed in a casing 1.
A processing liquid storage tank 5 for storing a processing liquid made of a fluorine-based inert liquid and a cleaning liquid storage tank 6 for storing a cleaning liquid made of a fluorine-based inert liquid are arranged in the processing liquid storage tank 5, and a heating means is provided in the processing liquid storage tank 5. 10 is arranged to be able to heat the processing liquid in the processing liquid storage tank 5, and the lifting means moves the sample basket 8 up and down in the sample carrying-in/out chamber 2 between the sample carrying-in/out chamber 2 and each liquid storage tank 5, 6. Place 9,
This elevating means 9 is arranged so as to be movable and can be switched between a state corresponding to the upper side of the processing liquid storage tank 5 and a state corresponding to the upper side of the cleaning liquid storage tank 6, and a connecting passage between the sample carrying-in/out chamber 2 and the processing liquid storage tank 5. A liquid tank type pretreatment device for semiconductor durability testing in which a condensing cooling means 16 is arranged in a section 15.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990103034U JPH0749411Y2 (en) | 1990-09-27 | 1990-09-27 | Liquid tank type pretreatment device for semiconductor durability test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990103034U JPH0749411Y2 (en) | 1990-09-27 | 1990-09-27 | Liquid tank type pretreatment device for semiconductor durability test |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459452U true JPH0459452U (en) | 1992-05-21 |
| JPH0749411Y2 JPH0749411Y2 (en) | 1995-11-13 |
Family
ID=31847760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990103034U Expired - Lifetime JPH0749411Y2 (en) | 1990-09-27 | 1990-09-27 | Liquid tank type pretreatment device for semiconductor durability test |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749411Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0296634A (en) * | 1988-10-03 | 1990-04-09 | Tabai Espec Corp | Liquid tank type environment testing apparatus |
-
1990
- 1990-09-27 JP JP1990103034U patent/JPH0749411Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0296634A (en) * | 1988-10-03 | 1990-04-09 | Tabai Espec Corp | Liquid tank type environment testing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0749411Y2 (en) | 1995-11-13 |
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