JPH0459799B2 - - Google Patents

Info

Publication number
JPH0459799B2
JPH0459799B2 JP56128587A JP12858781A JPH0459799B2 JP H0459799 B2 JPH0459799 B2 JP H0459799B2 JP 56128587 A JP56128587 A JP 56128587A JP 12858781 A JP12858781 A JP 12858781A JP H0459799 B2 JPH0459799 B2 JP H0459799B2
Authority
JP
Japan
Prior art keywords
semiconductor laser
lens
optical component
optical
double heterojunction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56128587A
Other languages
Japanese (ja)
Other versions
JPS5830184A (en
Inventor
Yoshio Myake
Rumiko Suganuma
Toshio Takei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12858781A priority Critical patent/JPS5830184A/en
Publication of JPS5830184A publication Critical patent/JPS5830184A/en
Publication of JPH0459799B2 publication Critical patent/JPH0459799B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206Optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)

Description

【発明の詳細な説明】 この発明は、半導体レーザと光フアイバを光学
的に結合する半導体レーザ結合器に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor laser coupler that optically couples a semiconductor laser and an optical fiber.

従来のこの種装置は、第1図のように構成され
ていた。即ちダブルヘテロ接合21を有する半導
体レーザ1からの出射ビームは第1のレンズ2に
よつて平行光束11に変換され、半導体レーザパ
ツケージ窓等の光学部品3を経て第2のレンズ4
によつて集光され光フアイバ5へ結合される。半
導体レーザ1、第1のレンズ2、第2のレンズ4
は結合効率を最大に保つためすべての光軸を一致
させて配設されている。
A conventional device of this type was constructed as shown in FIG. That is, an emitted beam from a semiconductor laser 1 having a double heterojunction 21 is converted into a parallel light beam 11 by a first lens 2, and then passes through an optical component 3 such as a semiconductor laser package window to a second lens 4.
The light is focused and coupled to the optical fiber 5. Semiconductor laser 1, first lens 2, second lens 4
are arranged with all optical axes aligned to maximize coupling efficiency.

さて、ダブルヘテロ接合を有する半導体レーザ
の特性は半導体レーザ活性層近傍への外部からの
光の注入に対し、きわめて敏感に変化することは
良く知られている。第1図に示したような従来の
半導体レーザ結合器では、第1のレンズ1と第2
のレンズ2の間に挿入された光学部品3から生じ
るフレネル反射等による反射光束12が再び第1
のレンズに入射し半導体レーザ1の活性層に集光
されるため、半導体レーザ1の特性が不安定に変
化する欠点があつた。なお第1図では平行光束1
1は矢印付の実線で、また反射光束12は矢印付
の破線で示してある。
Now, it is well known that the characteristics of a semiconductor laser having a double heterojunction change extremely sensitively to the injection of external light into the vicinity of the semiconductor laser active layer. In a conventional semiconductor laser coupler as shown in FIG.
The reflected light beam 12 due to Fresnel reflection etc. generated from the optical component 3 inserted between the lenses 2 of
Since the light enters the lens and is focused on the active layer of the semiconductor laser 1, there is a drawback that the characteristics of the semiconductor laser 1 change unstablely. In Fig. 1, the parallel light beam 1
1 is shown by a solid line with an arrow, and the reflected light beam 12 is shown by a broken line with an arrow.

また、すべての素子、光学部品の同一が光軸上
にあることを示すため共通の光軸00′が一点鎖
線で示されている。
In addition, a common optical axis 00' is indicated by a dashed dotted line to indicate that all the same elements and optical parts are on the optical axis.

この発明は、この欠点を除去するため、第1の
レンズと第2のレンズの間に挿入された光学部品
の端面を半導体レーザビームの光軸に対し特定の
方向に傾むけたもので、その目的は、上記端面の
傾むきを最小に抑えて結合効率の低下を抑圧しな
がら半導体レーザへの反射光の影響を効果的に抑
圧することにある。
In order to eliminate this drawback, the present invention tilts the end face of the optical component inserted between the first lens and the second lens in a specific direction with respect to the optical axis of the semiconductor laser beam. The purpose is to effectively suppress the influence of reflected light on the semiconductor laser while suppressing a decrease in coupling efficiency by minimizing the inclination of the end face.

第2図はこの発明の一実施例で、ダブルヘテロ
接合12を有する半導体レーザ1、第1のレンズ
2、第2のレンズ4、第1のレンズ2と第2のレ
ンズ4との間に挿入されたレーザパツケージ窓3
および光フアイバ5から構成されており、レーザ
パツケージ窓3の法線AA′が半導体レーザ出射ビ
ーム、第1のレンズ2、第2のレンズ4及びフア
イバ5の共通の光軸00′に対して、x−z平面
内で△θの角をなすようレーザパツケージ窓3は
設置されている。ここでx−z平面とは、ダブル
ヘテロ接合面(y−z面)に垂直でかつ光軸0
0′を含む面内のことである。
FIG. 2 shows an embodiment of the present invention, which includes a semiconductor laser 1 having a double heterojunction 12, a first lens 2, a second lens 4, and a semiconductor laser 1 inserted between the first lens 2 and the second lens 4. Laser package window 3
and an optical fiber 5, and the normal AA' of the laser package window 3 is relative to the common optical axis 00' of the semiconductor laser output beam, the first lens 2, the second lens 4, and the fiber 5. The laser package window 3 is installed so as to form an angle of Δθ in the xz plane. Here, the x-z plane is perpendicular to the double heterojunction plane (y-z plane) and the optical axis is 0.
This is within the plane including 0'.

さて半導体レーザ1よりの出射ビームは、第1
のレンズ2により平行光束11に変換されレーザ
パツケージ窓3を経て第2のレンズ4により集光
され光フアイバ5へ伝送される。ところでレーザ
パツケージ窓3の入出射端面では、屈折率の不連
続によつて反射が生じる。この反射光束12は、
レーザパツケージ窓3が上述した方向に△θに傾
むけて設置されていることから第1のレンズ2へ
その光軸00′に対し2△θの角をなして再入射
する。
Now, the beam emitted from the semiconductor laser 1 is
The light is converted into a parallel beam 11 by the lens 2, passes through the laser package window 3, is focused by the second lens 4, and is transmitted to the optical fiber 5. Incidentally, reflection occurs at the entrance/exit end face of the laser package window 3 due to discontinuity in the refractive index. This reflected light flux 12 is
Since the laser package window 3 is installed with an angle of Δθ in the above-mentioned direction, the light enters the first lens 2 again at an angle of 2Δθ with respect to its optical axis 00'.

その結果、反射光束12は第1のレンズ2によ
つて再び集光されるが、その集光の位置は、半導
体レーザ活性層より△xだけ離れた位置となる。
△xは第1のレンズの焦点距離をfとすれば、 △x=f・tan 2△θ (1) で与えられる。さて半導体レーザへの反射光束1
2による半導体レーザ特性の影響を小さく抑える
には、必ずしも反射光束12をレーザチツプ外へ
逃す必要はなく、上述した反射光束12の集光位
置と半導体レーザ活性層との距離△xをある程度
以上大きくすることによつて達成されることが後
で述べる実験結果より明確にされた。このことは
式(1)よりレーザパツケージ窓3の傾き△θを大き
くすることによつて実現されるが、一方△θを余
り大きくとることはレーザパツケージ窓の反射率
を増やして透過率をそこない、また収着を大きく
して結合効率を悪くすること、第1のレンズと第
2のレンズの間の間隔を大きくとる必要が生じて
大形化するしてしまう等の点で好ましくない。こ
のため最小の傾むき角△θで反射光の影響の抑制
効果を最大にひきだすことが効率の高い小形のか
つ安定した半導体レーザ結合器の製作に必要不可
欠である。
As a result, the reflected light beam 12 is again focused by the first lens 2, but the focused position is a distance Δx from the semiconductor laser active layer.
Δx is given by Δx=f·tan 2Δθ (1) where f is the focal length of the first lens. Now, the reflected light flux 1 to the semiconductor laser
In order to minimize the influence of 2 on the semiconductor laser characteristics, it is not necessary to let the reflected light beam 12 escape to the outside of the laser chip, but rather to increase the distance Δx between the above-mentioned condensing position of the reflected light beam 12 and the semiconductor laser active layer to a certain extent. The experimental results described later clarified what was achieved by this method. This can be achieved by increasing the inclination △θ of the laser package window 3 according to equation (1), but on the other hand, making △θ too large increases the reflectance of the laser package window and lowers the transmittance. Moreover, it is not preferable because it increases sorption and deteriorates the coupling efficiency, and it becomes necessary to increase the distance between the first lens and the second lens, resulting in an increase in size. Therefore, it is essential to maximize the effect of suppressing the influence of reflected light with the minimum tilt angle Δθ in order to manufacture a highly efficient, compact and stable semiconductor laser coupler.

この発明は、ダブルヘテロ半導体レーザでは、
レーザパツケージ窓の傾むきの方向によつて、傾
むき角の大きさに対する反射光の影響の抑制効果
が大巾に異なるという実験的に得た知見に基づい
てなされたもので、次にこの実験結果について述
べる。
This invention is a double hetero semiconductor laser.
This was done based on the experimental knowledge that the effect of suppressing the influence of reflected light on the size of the tilt angle varies greatly depending on the direction in which the laser package window is tilted. We will discuss the results.

第3図は実験の測定系ブロツク図を示すもの
で、半導体レーザ1より入射ビーム11を第1の
レンズ2により平行光束に変換し、あらかじめ設
置された反射面3によつて反射せしめる。一方半
導体レーザ1よりの後側出射ビーム13を光検出
器7によつて検出し、反射面3の傾むき角△θに
よるレーザ後側出力の変化を測定する。反射光に
よつて半導体レーザ1の特性が変化すればレーザ
後側出力も変化するのでこの測定によつて反射光
の影響の有無が確認できる。
FIG. 3 shows a block diagram of the experimental measurement system, in which an incident beam 11 from a semiconductor laser 1 is converted into a parallel beam by a first lens 2, and reflected by a reflection surface 3 installed in advance. On the other hand, the rear emitted beam 13 from the semiconductor laser 1 is detected by the photodetector 7, and the change in the laser rear output due to the inclination angle Δθ of the reflecting surface 3 is measured. If the characteristics of the semiconductor laser 1 change due to the reflected light, the rear output of the laser will also change, so by this measurement it is possible to confirm whether there is an influence of the reflected light.

第4図はこの測定系による測定結果の一例であ
り、横軸は反射面3の傾むき角△θ、縦軸はレー
ザ後側出力を示す。なおレーザ後側出力は反射面
3がない場合の同出力で規格化して示している。
FIG. 4 shows an example of measurement results obtained by this measurement system, in which the horizontal axis shows the inclination angle Δθ of the reflecting surface 3, and the vertical axis shows the rear output of the laser. Note that the rear side output of the laser is shown normalized by the same output when the reflective surface 3 is not provided.

なお、ここで第1のレンズ2としては直径
800μmの球レンズを用いている。
In addition, here, the diameter of the first lens 2 is
An 800μm ball lens is used.

第4図の実線は、反射面3の法線の光軸00′
に対する傾むき△θを半導体レーザのダブルヘテ
ロ接合面に平行な面内(以下平行面内と呼ぶ)で
とつた場合を示し、また第4図の破線は上記傾む
き△θを、半導体レーザのダブルヘテロ接合面に
垂直で半導体レーザビームの光軸00′を含む面
内(以下垂直面内と呼ぶ)にとつた場合を示す。
いずれも傾むき△θが微小な範囲でレーザ後側出
力が反射面3がない場合に比し異常に増加してお
り、このことらこの範囲で反射面3により反射光
の半導体レーザへの影響が顕著であることがわか
る。さてこの測定結果より、平行平面内での反射
面の傾むき△θをとることによつて反射の影響を
抑制するには反射面を8〜9°以上傾けることが必
要であるのに対し、垂直面内で反射面の傾むき△
θをとる場合は反射面を3〜4°以上傾けるだけで
十分反射の影響が抑制できることが判明する。即
ち垂直面内で反射面の傾むきをとることによつて
最小の傾け角で最大の効果が得られるのである。
また、式(1)より傾むき△θを4°および9°としたと
きの△xを計算する。ここで一例とする単一モー
ド光フアイバ用半導体レーザ結合器では第1のレ
ンズの焦点距離は444μmであるので△xはそれ
ぞれ62μm、144μmとなる。このように反射面の
傾むきの方向によつて反射の影響の抑制効果が異
なるのは、ダブルヘテロ接合半導体レーザの活性
領域が垂直面内では高だか0.2〜0.3μmであるの
に対し平行面内では通常2〜3μmあることに起
因していると推定される。したがつてこの測定の
結果は単なる一例としてではなくダブルヘテロ接
合を有する半導体レーザを用いた場合の一般的特
性をあらわしていると考えられる。このことから
この発明はダブルヘテロ接合半導体レーザを用い
た半導体レーザ結合器一般に対して有効なもので
ある。
The solid line in FIG. 4 is the optical axis 00' normal to the reflecting surface 3.
The dashed line in Figure 4 shows the case where the tilt △θ is taken in a plane parallel to the double heterojunction surface of the semiconductor laser (hereinafter referred to as parallel plane). The case is shown in which the beam is directed in a plane (hereinafter referred to as vertical plane) that is perpendicular to the double heterojunction plane and includes the optical axis 00' of the semiconductor laser beam.
In both cases, the rear output of the laser increases abnormally in the range where the inclination △θ is minute compared to the case without the reflective surface 3. This shows that in this range, the influence of the reflected light by the reflective surface 3 on the semiconductor laser increases. It can be seen that this is remarkable. Now, from this measurement result, in order to suppress the influence of reflection by taking the inclination Δθ of the reflecting surface in a parallel plane, it is necessary to tilt the reflecting surface by 8 to 9 degrees or more. Inclination of reflective surface in vertical plane △
When θ is used, it is found that the influence of reflection can be sufficiently suppressed by tilting the reflecting surface by 3 to 4 degrees or more. That is, by tilting the reflecting surface within the vertical plane, the maximum effect can be obtained with the minimum angle of inclination.
In addition, Δx is calculated from equation (1) when the inclination Δθ is 4° and 9°. In the single mode optical fiber semiconductor laser coupler taken as an example here, the focal length of the first lens is 444 μm, so Δx is 62 μm and 144 μm, respectively. The reason why the effect of suppressing the influence of reflection differs depending on the direction of inclination of the reflecting surface is that the height of the active region of a double heterojunction semiconductor laser is at most 0.2 to 0.3 μm in the vertical plane, whereas it is It is estimated that this is due to the fact that the diameter is usually 2 to 3 μm. Therefore, the results of this measurement are considered not to be merely an example, but to represent general characteristics when using a semiconductor laser having a double heterojunction. Therefore, the present invention is effective for general semiconductor laser couplers using double heterojunction semiconductor lasers.

なお、以上は反射光の生じる原因としてレーザ
パツケージ窓3を考えこの窓を傾むける場合につ
いて述べたが、この発明はこれに限らずその他の
入射あるいは出射端面が平面から構成される光学
部品を第1のレンズと第2レンズの間に挿入する
場合についても適用できる。
In addition, although the case where the laser package window 3 is considered as the cause of reflected light and the window is tilted has been described above, the present invention is not limited to this, and can also be applied to other optical components whose input or output end faces are flat. It can also be applied to the case where the lens is inserted between the first lens and the second lens.

なお、また上述の実施例では光学部品3の端面
の法線A−A′が第2図中x−z面、すなわち、
ダブルヘテロ接合面に垂直でかつ出射ビームの光
軸を含む平面内で含まれておりy軸方向の成分が
ない場合について説明したが、上記法線A−
A′は必ずしもy軸方向の成分を持たない構成に
限定されるものではなく、若干のy軸方向の成分
を持つ構成でもよく、その成分の大きさは装置全
体の幾何学的寸法或いはフアイバー5への接合効
率等を考慮して適宜選定すればよい。
In addition, in the above-mentioned embodiment, the normal line A-A' of the end surface of the optical component 3 is the x-z plane in FIG. 2, that is,
Although we have explained the case where there is no component in the y-axis direction because the plane is perpendicular to the double heterojunction plane and includes the optical axis of the output beam, the above normal A-
A′ is not necessarily limited to a configuration that does not have a component in the y-axis direction, but may have a configuration that has a slight component in the y-axis direction, and the size of the component depends on the geometric dimensions of the entire device or the fiber 5. It may be selected as appropriate, taking into account the bonding efficiency, etc.

換言すれば、法線A−A′をダブルヘテロ接合
面に垂直でかつ出射ビームの光軸を含む平面に射
影して得られた射影線と、半導体レーザ1からの
射出ビームの光軸とのなす角度が鋭角であればよ
い。
In other words, the projection line obtained by projecting the normal line A-A' onto a plane perpendicular to the double heterojunction surface and including the optical axis of the emitted beam and the optical axis of the emitted beam from the semiconductor laser 1. It is sufficient if the angle formed is an acute angle.

以上のようにこの発明に係る半導体レーザ結合
器では、第1のレンズと第2のレンズの間に挿入
する光学部品の入出射平面を、その法線が半導体
レーザよりの出射ビームの光軸をその面に有する
半導体レーザのダブルヘテロ接合面に交差する面
に存在し、上記半導体レーザの出射ビームの光軸
と交わるように形成し、上記光学部品の入射ある
いは出射端面で反射され第1のレンズによつて再
び上記半導体レーザに戻される反射光の集光位置
を上記半導体レーザのダブルヘテロ接合面に垂直
な方向に変位させたので、光学部品の入射あるい
は出射端面で反射され第1のレンズによつて再び
半導体レーザに戻される反射光の集光位置を上記
半導体レーザのダブルヘテロ接合面に平行な方向
に変位させる場合に比べ、光学部品の入射あるい
は出射端面を最小限に傾けることで、光フアイバ
への結合効率の低下を最小限に抑圧して、この端
面よりのフレネル反射等による反射光が半導体レ
ーザの特性に及ぼす影響を除去でき、安定した特
性で結合効率が高くかつ小形の半導体レーザ結合
器を得られる効果がある。
As described above, in the semiconductor laser coupler according to the present invention, the entrance/exit plane of the optical component inserted between the first lens and the second lens is set such that the normal line thereof coincides with the optical axis of the output beam from the semiconductor laser. The first lens is located on a surface that intersects the double heterojunction surface of the semiconductor laser, and is formed so as to intersect with the optical axis of the output beam of the semiconductor laser, and is reflected by the incident or output end face of the optical component. Since the condensing position of the reflected light returned to the semiconductor laser is shifted in the direction perpendicular to the double heterojunction surface of the semiconductor laser, the light is reflected by the incident or output end face of the optical component and reaches the first lens. Therefore, compared to the case where the condensing position of the reflected light that is returned to the semiconductor laser is displaced in a direction parallel to the double heterojunction surface of the semiconductor laser, the light can be By minimizing the reduction in coupling efficiency to the fiber and eliminating the influence of reflected light such as Fresnel reflection from this end face on the semiconductor laser characteristics, we have created a compact semiconductor laser with stable characteristics and high coupling efficiency. This has the effect of providing a coupler.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の半導体レーザ結合器の配置を示
す斜視図、第2図はこの発明による半導体レーザ
結合器の配置を示す斜視図、第3図はこの発明の
効果を確認するため行なつた測定の測定系を示す
構成図、第4図はこの測定結果を示す図である。 図中1はダブルヘテロ接合を有する半導体レー
ザ、2は第1のレンズ、3は反射の原因となる光
学部品、4は第2のレンズ、5は光フアイバであ
る。なお図中同一あるいは相当部分には同一符号
を付して示してある。
Fig. 1 is a perspective view showing the arrangement of a conventional semiconductor laser coupler, Fig. 2 is a perspective view showing the arrangement of a semiconductor laser coupler according to the present invention, and Fig. 3 is a perspective view showing the arrangement of a semiconductor laser coupler according to the present invention. FIG. 4 is a block diagram showing the measurement system for measurement, and is a diagram showing the measurement results. In the figure, 1 is a semiconductor laser having a double heterojunction, 2 is a first lens, 3 is an optical component that causes reflection, 4 is a second lens, and 5 is an optical fiber. Note that the same or corresponding parts in the figures are indicated by the same reference numerals.

Claims (1)

【特許請求の範囲】 1 ダブルヘテロ接合を有する半導体レーザより
の出射ビームを第1のレンズによつてほぼ平行光
束に変換し、それを第2のレンズによつて再び集
光し光フアイバへ入射させる結合レンズ系を有
し、かつ上記第1のレンズと第2のレンズの間に
は光の入射あるいは出射端面が平面である光学部
品が挿入されている半導体レーザ結合器におい
て、 上記半導体レーザよりの出射ビームの光軸をそ
の面に有し、かつ、上記半導体レーザのダブルヘ
テロ接合面に交差する面に上記光学部品の入射あ
るいは出射端面の法線が存在し、上記法線が上記
半導体レーザの出射ビームの光軸と交わるように
上記光学部品の入射あるいは出射端面を形成し、 上記光学部品の入射あるいは出射端面で反射さ
れ、第1のレンズによつて再び上記半導体レーザ
側に戻される反射光の集光位置を上記半導体レー
ザのダブルヘテロ接合面に垂直な方向に変位させ
ることにより、 上記集光位置が上記半導体レーザの活性層をは
ずれた位置としたことを特徴とする半導体レーザ
結合器。
[Claims] 1. A beam emitted from a semiconductor laser having a double heterojunction is converted into a substantially parallel beam by a first lens, which is then condensed again by a second lens and enters an optical fiber. In the semiconductor laser coupler, the semiconductor laser coupler has a coupling lens system that allows the laser beam to pass through the semiconductor laser, and an optical component having a flat light input or output end face is inserted between the first lens and the second lens. has the optical axis of the emitted beam on its surface, and a normal line to the incident or output end face of the optical component exists on a plane that intersects the double heterojunction surface of the semiconductor laser, and the normal line is the optical axis of the output beam of the semiconductor laser. The input or output end face of the optical component is formed so as to intersect with the optical axis of the output beam of the optical component, and the reflection is reflected by the input or output end face of the optical component and returned to the semiconductor laser side by the first lens. A semiconductor laser coupler characterized in that the light condensing position is displaced from the active layer of the semiconductor laser by displacing the light condensing position in a direction perpendicular to the double heterojunction surface of the semiconductor laser. .
JP12858781A 1981-08-17 1981-08-17 Semiconductor laser coupling device Granted JPS5830184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12858781A JPS5830184A (en) 1981-08-17 1981-08-17 Semiconductor laser coupling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12858781A JPS5830184A (en) 1981-08-17 1981-08-17 Semiconductor laser coupling device

Publications (2)

Publication Number Publication Date
JPS5830184A JPS5830184A (en) 1983-02-22
JPH0459799B2 true JPH0459799B2 (en) 1992-09-24

Family

ID=14988435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12858781A Granted JPS5830184A (en) 1981-08-17 1981-08-17 Semiconductor laser coupling device

Country Status (1)

Country Link
JP (1) JPS5830184A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3626333C2 (en) * 1986-08-02 1996-01-18 Teves Gmbh Alfred Expansion tank for a hydraulic brake system
JP2016157863A (en) * 2015-02-25 2016-09-01 株式会社ミツトヨ Laser light source device and adjustment method therefor
JP7185867B2 (en) * 2018-05-18 2022-12-08 旭化成株式会社 laser diode

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916888Y2 (en) * 1979-02-23 1984-05-17 日本電気株式会社 optical coupling device
JPS584192Y2 (en) * 1979-07-09 1983-01-24 富士通株式会社 Optical semiconductor device

Also Published As

Publication number Publication date
JPS5830184A (en) 1983-02-22

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