JPH0461851U - - Google Patents
Info
- Publication number
- JPH0461851U JPH0461851U JP10422590U JP10422590U JPH0461851U JP H0461851 U JPH0461851 U JP H0461851U JP 10422590 U JP10422590 U JP 10422590U JP 10422590 U JP10422590 U JP 10422590U JP H0461851 U JPH0461851 U JP H0461851U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- section
- trajectory
- detection
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10422590U JPH0461851U (2) | 1990-10-03 | 1990-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10422590U JPH0461851U (2) | 1990-10-03 | 1990-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0461851U true JPH0461851U (2) | 1992-05-27 |
Family
ID=31849429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10422590U Pending JPH0461851U (2) | 1990-10-03 | 1990-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0461851U (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006041402A (ja) * | 2004-07-29 | 2006-02-09 | Sharp Corp | イオンビーム発生装置、イオンビーム発生方法および機能素子の製造方法 |
| JP2016501082A (ja) * | 2012-12-03 | 2016-01-18 | テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニムＴｅｔｒａ Ｌａｖａｌ Ｈｏｌｄｉｎｇｓ ＆ Ｆｉｎａｎｃｅ Ｓ．Ａ． | 複数の導体を有する電気センサを介して電子ビームを監視するためのデバイス |
-
1990
- 1990-10-03 JP JP10422590U patent/JPH0461851U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006041402A (ja) * | 2004-07-29 | 2006-02-09 | Sharp Corp | イオンビーム発生装置、イオンビーム発生方法および機能素子の製造方法 |
| JP2016501082A (ja) * | 2012-12-03 | 2016-01-18 | テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニムＴｅｔｒａ Ｌａｖａｌ Ｈｏｌｄｉｎｇｓ ＆ Ｆｉｎａｎｃｅ Ｓ．Ａ． | 複数の導体を有する電気センサを介して電子ビームを監視するためのデバイス |
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