JPH0462461B2 - - Google Patents

Info

Publication number: JPH0462461B2
Authority: JP; Japan
Prior art keywords: refrigerant; integrated circuit; liquid; tank; cooling
Prior art date: 1986-06-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP13182686A

Other languages

English (en)

Japanese (ja)

Other versions

JPS62290161A (ja

Inventor

Kenichi Kasai

Takahiro Ooguro

Noryuki Ashiwake

Shizuo Zushi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-06-09

Filing date

1986-06-09

Publication date

1992-10-06

1986-06-09 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1986-06-09 Priority to JP13182686A priority Critical patent/JPS62290161A/ja

1987-12-17 Publication of JPS62290161A publication Critical patent/JPS62290161A/ja

1992-10-06 Publication of JPH0462461B2 publication Critical patent/JPH0462461B2/ja

Status Granted legal-status Critical Current

Links

239000003507 refrigerant Substances 0.000 claims description 39
238000001816 cooling Methods 0.000 claims description 36
239000007788 liquid Substances 0.000 claims description 24
238000010926 purge Methods 0.000 claims description 13
239000000758 substrate Substances 0.000 claims description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
238000007689 inspection Methods 0.000 description 4
230000007797 corrosion Effects 0.000 description 3
238000005260 corrosion Methods 0.000 description 3
238000010586 diagram Methods 0.000 description 3
238000012423 maintenance Methods 0.000 description 3
239000002826 coolant Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000000034 method Methods 0.000 description 2
238000009825 accumulation Methods 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
238000007599 discharging Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000000605 extraction Methods 0.000 description 1
230000005484 gravity Effects 0.000 description 1
230000020169 heat generation Effects 0.000 description 1
230000010354 integration Effects 0.000 description 1
230000007774 longterm Effects 0.000 description 1
230000007257 malfunction Effects 0.000 description 1
239000007769 metal material Substances 0.000 description 1
238000004806 packaging method and process Methods 0.000 description 1
230000008961 swelling Effects 0.000 description 1

Landscapes

Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

JP13182686A 1986-06-09 1986-06-09 電子装置の冷却装置 Granted JPS62290161A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP13182686A JPS62290161A (ja)	1986-06-09	1986-06-09	電子装置の冷却装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP13182686A JPS62290161A (ja)	1986-06-09	1986-06-09	電子装置の冷却装置

Publications (2)

Publication Number	Publication Date
JPS62290161A JPS62290161A (ja)	1987-12-17
JPH0462461B2 true JPH0462461B2 (ko)	1992-10-06

Family

ID=15067003

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP13182686A Granted JPS62290161A (ja)	1986-06-09	1986-06-09	電子装置の冷却装置

Country Status (1)

Country	Link
JP (1)	JPS62290161A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4809134A (en) *	1988-04-18	1989-02-28	Unisys Corporation	Low stress liquid cooling assembly
JP2512783B2 (ja) *	1988-04-20	1996-07-03	株式会社日立製作所	プラズマエッチング方法及び装置
JP5837523B2 (ja)	2012-03-27	2015-12-24	富士フイルム株式会社	冷却システム、リザーバユニットおよびカートリッジ並びにそれらを備えた固体レーザ発振装置

1986
- 1986-06-09 JP JP13182686A patent/JPS62290161A/ja active Granted

Also Published As

Publication number	Publication date
JPS62290161A (ja)	1987-12-17

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