JPH0463553U - - Google Patents
Info
- Publication number
- JPH0463553U JPH0463553U JP10695990U JP10695990U JPH0463553U JP H0463553 U JPH0463553 U JP H0463553U JP 10695990 U JP10695990 U JP 10695990U JP 10695990 U JP10695990 U JP 10695990U JP H0463553 U JPH0463553 U JP H0463553U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- slit
- slits
- ion beam
- forming mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10695990U JPH0463553U (lt) | 1990-10-11 | 1990-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10695990U JPH0463553U (lt) | 1990-10-11 | 1990-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0463553U true JPH0463553U (lt) | 1992-05-29 |
Family
ID=31853259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10695990U Pending JPH0463553U (lt) | 1990-10-11 | 1990-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0463553U (lt) |
-
1990
- 1990-10-11 JP JP10695990U patent/JPH0463553U/ja active Pending
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