JPH0464760U - - Google Patents

Info

Publication number
JPH0464760U
JPH0464760U JP10874490U JP10874490U JPH0464760U JP H0464760 U JPH0464760 U JP H0464760U JP 10874490 U JP10874490 U JP 10874490U JP 10874490 U JP10874490 U JP 10874490U JP H0464760 U JPH0464760 U JP H0464760U
Authority
JP
Japan
Prior art keywords
inductively coupled
frequency inductively
coupled plasma
entrance slit
plasma emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10874490U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10874490U priority Critical patent/JPH0464760U/ja
Publication of JPH0464760U publication Critical patent/JPH0464760U/ja
Pending legal-status Critical Current

Links

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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の実施例の斜視図、第2図は本
実施例の側面図、第3図は本実施例の平面図、第
4図は従来例のブロツク図、第5図は本考案の実
施例の場合の入射スリツト上のプラズマの像ので
き方を示すブロツク図、第6図はレンズによる色
収差を示すブロツク図、第7図は球面鏡によるコ
マ収差を示すブロツク図である。 1……プラズマ、2……第1入射鏡、3……第
2入射鏡、4……入射スリツト、5……分光器、
6……光検出器、7……レンズ、8,9……平面
鏡、10……プラズマの像。
Fig. 1 is a perspective view of the embodiment of the present invention, Fig. 2 is a side view of the embodiment, Fig. 3 is a plan view of the embodiment, Fig. 4 is a block diagram of the conventional example, and Fig. 5 is the main body. FIG. 6 is a block diagram showing how a plasma image is formed on the entrance slit in the case of the embodiment of the invention, FIG. 6 is a block diagram showing chromatic aberration caused by a lens, and FIG. 7 is a block diagram showing coma aberration caused by a spherical mirror. 1...Plasma, 2...First incidence mirror, 3...Second incidence mirror, 4...Incidence slit, 5...Spectroscope,
6... Photodetector, 7... Lens, 8, 9... Plane mirror, 10... Plasma image.

Claims (1)

【実用新案登録請求の範囲】 (1) 鉛直方向に主たる光軸を持つ分光器を用い
た高周波誘導結合プラズマ発光分光分析装置にお
いて、 2枚の凹面円筒鏡を、 各々の曲率中心が直交するように配置して用い
ることにより、 入射スリツト上のプラズマの像の方向を任意に
設計し得る入射光学系を備えたことを特徴とする
高周波誘導結合プラズマ発光分光分析装置。 (2) 前記分光器と、 前記分光器と一対となる前記入射光学系とを、
各々2つ備えたことを特徴とする請求項1記載の
高周波誘導結合プラズマ発光分光分析装置。 (3) 前記2枚の凹面円筒鏡のうちの片方の鏡の
角度を変えて入射スリツト上のプラズマの像の縦
方向の位置を、 前記2枚の円筒鏡のうちのもう一方の鏡の角度
を変えて入射スリツト上のプラズマの像の横方向
の位置を、 各々調節できるように形成した入射光学系を備
えたことを特徴とする請求項1記載の高周波誘導
結合プラズマ発光分光分析装置。
[Claims for Utility Model Registration] (1) In a high-frequency inductively coupled plasma emission spectrometer using a spectroscope with its main optical axis in the vertical direction, two concave cylindrical mirrors are arranged so that their centers of curvature are perpendicular to each other. 1. A high-frequency inductively coupled plasma emission spectrometer characterized by comprising an entrance optical system that allows the direction of a plasma image on an entrance slit to be arbitrarily designed by being placed in the entrance slit. (2) The spectrometer and the input optical system paired with the spectrometer,
2. The high-frequency inductively coupled plasma emission spectrometer according to claim 1, characterized in that each device comprises two high-frequency inductively coupled plasma emission spectrometers. (3) Change the vertical position of the plasma image on the entrance slit by changing the angle of one of the two concave cylindrical mirrors, and change the angle of the other of the two cylindrical mirrors. 2. The high-frequency inductively coupled plasma emission spectrometer according to claim 1, further comprising an entrance optical system configured to adjust the lateral position of the plasma image on the entrance slit by changing the lateral position of the plasma image on the entrance slit.
JP10874490U 1990-10-17 1990-10-17 Pending JPH0464760U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10874490U JPH0464760U (en) 1990-10-17 1990-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10874490U JPH0464760U (en) 1990-10-17 1990-10-17

Publications (1)

Publication Number Publication Date
JPH0464760U true JPH0464760U (en) 1992-06-03

Family

ID=31855864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10874490U Pending JPH0464760U (en) 1990-10-17 1990-10-17

Country Status (1)

Country Link
JP (1) JPH0464760U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015184167A (en) * 2014-03-25 2015-10-22 株式会社日立ハイテクサイエンス ICP emission spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015184167A (en) * 2014-03-25 2015-10-22 株式会社日立ハイテクサイエンス ICP emission spectrometer

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