JPH046590U - - Google Patents
Info
- Publication number
- JPH046590U JPH046590U JP4247590U JP4247590U JPH046590U JP H046590 U JPH046590 U JP H046590U JP 4247590 U JP4247590 U JP 4247590U JP 4247590 U JP4247590 U JP 4247590U JP H046590 U JPH046590 U JP H046590U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- rotor
- engagement portion
- threaded engagement
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２，３図はその作用
説明図、第４図は従来のターボ分子ポンプの縦断
側面図、第５図はそのすべり軸受部分を拡大して
示す縦断側面図である。
１……ケーシング、２……吸気口、３……排気
口、４……静翼、５……動翼、６……ロータ、７
，１１……回転軸、８……モータステータ側部材
、９……すべり軸受、１５……軸受保持体、１５
ｃ……軸受保持体１５のねじ係合部、１９……モ
ータステータ側部材８のねじ係合部。
Fig. 1 is a vertical side view showing an embodiment of the turbomolecular pump according to the present invention, Figs. 2 and 3 are explanatory diagrams of its operation, Fig. 4 is a longitudinal side view of a conventional turbomolecular pump, and Fig. 5 is FIG. 3 is a vertical sectional side view showing an enlarged view of the sliding bearing portion. 1... Casing, 2... Intake port, 3... Exhaust port, 4... Stationary blade, 5... Moving blade, 6... Rotor, 7
, 11...Rotating shaft, 8...Motor stator side member, 9...Sliding bearing, 15...Bearing holder, 15
c... Threaded engagement portion of bearing holder 15, 19... Threaded engagement portion of motor stator side member 8.
Claims (1)
とをロータ軸方向に交互に配列し、ロータの回転
軸の上部を磁気軸受により、同回転軸の下部をす
べり軸受により、それぞれ回転可能に支持したタ
ーボ分子ポンプにおいて、前記すべり軸受を保持
する軸受保持体の外周部と同外周部に係合するモ
ータステータ側部材の内周部とにねじ係合部を設
けて、同ねじ係合部のねじ込みにより、すべり軸
受位置を軸方向に変位可能にしたことを特徴とす
るターボ分子ポンプの軸受退避機構。 The moving blades provided on the rotor and the stationary blades provided on the casing are arranged alternately in the rotor axis direction, and the upper part of the rotor's rotating shaft is rotatably supported by a magnetic bearing, and the lower part of the rotating shaft is rotatably supported by a sliding bearing. In the turbo molecular pump, a threaded engagement portion is provided on the outer circumference of the bearing holder that holds the slide bearing and on the inner circumference of the motor stator side member that engages with the outer circumference, and the threaded engagement portion is A bearing retraction mechanism for a turbo-molecular pump characterized in that the sliding bearing position can be displaced in the axial direction by screwing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4247590U JPH046590U (en) | 1990-04-23 | 1990-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4247590U JPH046590U (en) | 1990-04-23 | 1990-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH046590U true JPH046590U (en) | 1992-01-21 |
Family
ID=31554055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4247590U Pending JPH046590U (en) | 1990-04-23 | 1990-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH046590U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023149220A (en) * | 2022-03-30 | 2023-10-13 | 株式会社島津製作所 | Vacuum pump and magnetic bearing |
-
1990
- 1990-04-23 JP JP4247590U patent/JPH046590U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023149220A (en) * | 2022-03-30 | 2023-10-13 | 株式会社島津製作所 | Vacuum pump and magnetic bearing |