JPH046591U - - Google Patents

Info

Publication number
JPH046591U
JPH046591U JP4299590U JP4299590U JPH046591U JP H046591 U JPH046591 U JP H046591U JP 4299590 U JP4299590 U JP 4299590U JP 4299590 U JP4299590 U JP 4299590U JP H046591 U JPH046591 U JP H046591U
Authority
JP
Japan
Prior art keywords
vacuum pump
black body
blades
subjected
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4299590U
Other languages
English (en)
Other versions
JPH0754638Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990042995U priority Critical patent/JPH0754638Y2/ja
Publication of JPH046591U publication Critical patent/JPH046591U/ja
Application granted granted Critical
Publication of JPH0754638Y2 publication Critical patent/JPH0754638Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る真空ポンプの一実施例を
示す縦断面図、第２図はスパイラル溝を具えた翼
片の平面図、第３図は従来の真空ポンプの縦断面
図である。 １……動翼、５……静翼、９……黒体化処理面
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 大気圧近傍から高真空まで排気する真空ポンプ
    において、動翼と静翼の対向面に夫々黒体化処理
    が施されてなることを特徴とする真空ポンプ。
JP1990042995U 1990-04-24 1990-04-24 真空ポンプ Expired - Lifetime JPH0754638Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990042995U JPH0754638Y2 (ja) 1990-04-24 1990-04-24 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990042995U JPH0754638Y2 (ja) 1990-04-24 1990-04-24 真空ポンプ

Publications (2)

Publication Number Publication Date
JPH046591U true JPH046591U (ja) 1992-01-21
JPH0754638Y2 JPH0754638Y2 (ja) 1995-12-18

Family

ID=31555029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990042995U Expired - Lifetime JPH0754638Y2 (ja) 1990-04-24 1990-04-24 真空ポンプ

Country Status (1)

Country Link
JP (1) JPH0754638Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015098275A1 (ja) * 2013-12-26 2015-07-02 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP2024080600A (ja) * 2022-12-01 2024-06-13 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト 真空ポンプ及び真空ポンプのステータ用のステータ部分を製造する方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128287U (ja) * 1987-02-16 1988-08-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128287U (ja) * 1987-02-16 1988-08-22

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015098275A1 (ja) * 2013-12-26 2015-07-02 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP2015124656A (ja) * 2013-12-26 2015-07-06 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP2024080600A (ja) * 2022-12-01 2024-06-13 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト 真空ポンプ及び真空ポンプのステータ用のステータ部分を製造する方法

Also Published As

Publication number Publication date
JPH0754638Y2 (ja) 1995-12-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term