JPH046592U - - Google Patents

Info

Publication number
JPH046592U
JPH046592U JP4247490U JP4247490U JPH046592U JP H046592 U JPH046592 U JP H046592U JP 4247490 U JP4247490 U JP 4247490U JP 4247490 U JP4247490 U JP 4247490U JP H046592 U JPH046592 U JP H046592U
Authority
JP
Japan
Prior art keywords
rotor
casing
rotating shaft
molecular pump
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4247490U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4247490U priority Critical patent/JPH046592U/ja
Publication of JPH046592U publication Critical patent/JPH046592U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図はそのバランス
試験、バランス調節の状態を示す縦断側面図、第
３図は従来のターボ分子ポンプを示す縦断側面図
、第４図はその一部を示す縦断側面図、第５図は
そのバランス試験、バランス調節の状態を示す縦
断側面図である。 １，４……ケーシング、３……ガス吸入口、５
……ガス吐出口、６……静翼、７……動翼、８…
…ロータ、８ａ……ロータデイスク、９……回転
軸、９ｄ……延長部。 Fig. 1 is a longitudinal side view showing an embodiment of the turbomolecular pump according to the present invention, Fig. 2 is a longitudinal side view showing its balance test and balance adjustment status, and Fig. 3 is a conventional turbomolecular pump. FIG. 4 is a longitudinal side view showing a part thereof, and FIG. 5 is a longitudinal side view showing the state of the balance test and balance adjustment. 1, 4...Casing, 3...Gas inlet, 5
...Gas discharge port, 6... Stator blade, 7... Moving blade, 8...
...Rotor, 8a...Rotor disk, 9...Rotating shaft, 9d...Extension part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ガス吸入口とガス吐出口とをケーシングに設け
、静翼を同ケーシングの内壁面側に取付け、動翼
を有するロータと同ロータの回転軸とを同ケーシ
ング内に配設したターボ分子ポンプにおいて、前
記回転軸の上部側を延長して、この延長部を前記
ロータ上部のロータデイスクから上方へ突出させ
たことを特徴とするターボ分子ポンプ。 A turbo molecular pump in which a gas inlet and a gas outlet are provided in a casing, stator blades are attached to the inner wall side of the casing, and a rotor having moving blades and a rotating shaft of the rotor are arranged in the casing, A turbo-molecular pump characterized in that an upper side of the rotating shaft is extended so that this extended portion projects upward from a rotor disk at the upper part of the rotor.
JP4247490U 1990-04-23 1990-04-23 Pending JPH046592U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4247490U JPH046592U (en) 1990-04-23 1990-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4247490U JPH046592U (en) 1990-04-23 1990-04-23

Publications (1)

Publication Number Publication Date
JPH046592U true JPH046592U (en) 1992-01-21

Family

ID=31554053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4247490U Pending JPH046592U (en) 1990-04-23 1990-04-23

Country Status (1)

Country Link
JP (1) JPH046592U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5270409A (en) * 1975-12-06 1977-06-11 Pfeiffer Vakuumtechnik Turbomolecular pumps
JPS61215495A (en) * 1985-03-22 1986-09-25 Mitsubishi Heavy Ind Ltd Turbo molecular pump
JPS62135743A (en) * 1985-12-10 1987-06-18 Mitsubishi Heavy Ind Ltd Balancing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5270409A (en) * 1975-12-06 1977-06-11 Pfeiffer Vakuumtechnik Turbomolecular pumps
JPS61215495A (en) * 1985-03-22 1986-09-25 Mitsubishi Heavy Ind Ltd Turbo molecular pump
JPS62135743A (en) * 1985-12-10 1987-06-18 Mitsubishi Heavy Ind Ltd Balancing method

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