JPH0469461U - - Google Patents
Info
- Publication number
- JPH0469461U JPH0469461U JP11173990U JP11173990U JPH0469461U JP H0469461 U JPH0469461 U JP H0469461U JP 11173990 U JP11173990 U JP 11173990U JP 11173990 U JP11173990 U JP 11173990U JP H0469461 U JPH0469461 U JP H0469461U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic material
- target
- electrode part
- composite
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
第１図はこの考案にかかるターゲツトの説明図
、第２図は従来のターゲツトの説明図である。 １，２……磁石、５，１５……電極部、７……
ターゲツト材、１１−ａ……磁性材、１１−ｂ…
…磁性材、１１−ｃ……非磁性材、１１−ｄ……
非磁性材。
、第２図は従来のターゲツトの説明図である。 １，２……磁石、５，１５……電極部、７……
ターゲツト材、１１−ａ……磁性材、１１−ｂ…
…磁性材、１１−ｃ……非磁性材、１１−ｄ……
非磁性材。
Claims (1)
- スパツタ装置等の半導体製造装置において、電
極部を非磁性材と磁性材の接合体とすることを特
徴としたターゲツト。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173990U JPH0469461U (ja) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173990U JPH0469461U (ja) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469461U true JPH0469461U (ja) | 1992-06-19 |
Family
ID=31859210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11173990U Pending JPH0469461U (ja) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469461U (ja) |
-
1990
- 1990-10-25 JP JP11173990U patent/JPH0469461U/ja active Pending