JPH0469830B2 - - Google Patents
Info
- Publication number
- JPH0469830B2 JPH0469830B2 JP21430386A JP21430386A JPH0469830B2 JP H0469830 B2 JPH0469830 B2 JP H0469830B2 JP 21430386 A JP21430386 A JP 21430386A JP 21430386 A JP21430386 A JP 21430386A JP H0469830 B2 JPH0469830 B2 JP H0469830B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- opening
- adjustment device
- mirror holder
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はレーザ共振器において共振ミラーの
角度調整を行う共振器ミラー調整装置に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a resonator mirror adjusting device for adjusting the angle of a resonant mirror in a laser resonator.
第２図は一般的な安定型共振器の原理図であ
る。図において、１はレーザ媒質、２は全反射
鏡、３は部分反射鏡、４はレーザ媒質１を格納す
ると共に、各反射鏡２，３を開口部へ設置してい
る筐体である。第３図ａはミラーホルダを介して
部分反射鏡３を、筐体４の開口部へ取付けた状態
を示す図であり、図において１１は部分反射鏡３
を支持するミラーホルダであり、該ミラーホルダ
１１は開口部内周面に対して密着状態を保ちなが
ら、且つ遊嵌状態にする為、その形状を円筒形と
し、更に周側面にＯリング１２を捲着し開口部と
の密着状態を保つ。又、上記円筒の全周面端部に
は角形の鍔を設け、該鍔上には一対のマイクロメ
ータ１３，１３、ミラーホルダ１１を支持する支
点棒１４、及び押さえ板１５により固設された部
分反射鏡３が載置されている。
FIG. 2 is a diagram showing the principle of a general stable resonator. In the figure, 1 is a laser medium, 2 is a total reflection mirror, 3 is a partial reflection mirror, and 4 is a housing in which the laser medium 1 is stored and each of the reflection mirrors 2 and 3 are installed in an opening. FIG. 3a is a diagram showing a state in which the partial reflecting mirror 3 is attached to the opening of the housing 4 via a mirror holder, and in the figure, 11 is the partially reflecting mirror 3
The mirror holder 11 has a cylindrical shape and an O-ring 12 is wrapped around the circumferential surface in order to maintain a close contact with the inner circumferential surface of the opening and to loosely fit the mirror holder 11 into the opening. Keep it in close contact with the opening. Further, a square flange is provided at the end of the entire circumferential surface of the cylinder, and a pair of micrometers 13, 13, a fulcrum rod 14 supporting the mirror holder 11, and a holding plate 15 are fixedly mounted on the flange. A partially reflecting mirror 3 is mounted.
以上のように構成されたミラーホルダ１１にお
ける、各マイクロメータ１３，１３と支点棒１４
との位置関係を第３図ｂに基づいて説明する。各
マイクロメータ１３，１３は部分反射鏡３を中心
として等間隔に各鍔部端部に配置され、又支点棒
１４は各マイクロメータ１３，１３より直交する
ように引かれた線の直交地点に据えられている。
尚、支点棒１４の筐体面に対する先端部は第３図
ｃに示す如く球形状を成しており、該先端部は筐
体面に設けた円錐状の窪の受け部１６ａに支持さ
れている。 In the mirror holder 11 configured as described above, each micrometer 13, 13 and the fulcrum rod 14
The positional relationship between the two will be explained based on FIG. 3b. The micrometers 13, 13 are arranged at equal intervals at each end of the collar with the partial reflecting mirror 3 as the center, and the fulcrum rod 14 is located at the orthogonal point of the line drawn perpendicularly from the micrometers 13, 13. It is installed.
The tip of the fulcrum rod 14 relative to the casing surface has a spherical shape as shown in FIG. 3c, and is supported by a conical recess 16a provided on the casing surface.
次に部分反射鏡取付けミラーホルダの角度調整
について説明する。ミラーホルダ１１の角度調整
は、マイクロメータ１３，１３の調整により決ま
る。すなわち、鍔部上のマイクロメータ１３，１
３のヘツドが回転させられると、マイクロメータ
のスピンドル１３ａは筐体面を押し付ける方向に
延びる。その結果、筐体面の抗力によつて、ミラ
ーホルダ１１は、鍔部上の受け部１６ａによつて
支持された支点棒１４を支点としてＯリング１２
により開口部内面を上方に摺動し、マイクロメー
タ１３，１３の調整量だけ上方に傾斜する。この
傾斜角度により部分反射鏡３の角度は決まり、ま
た傾斜方向は各マイクロメータの調整量により決
まる。 Next, the angle adjustment of the partially reflecting mirror-attached mirror holder will be explained. The angle adjustment of the mirror holder 11 is determined by the adjustment of the micrometers 13, 13. That is, the micrometers 13,1 on the flange
When the head No. 3 is rotated, the spindle 13a of the micrometer extends in a direction that presses against the housing surface. As a result, due to the drag force on the casing surface, the mirror holder 11 is moved around the O-ring 12 using the fulcrum rod 14 supported by the receiving part 16a on the flange as a fulcrum.
slides upward on the inner surface of the opening and tilts upward by the adjustment amount of the micrometers 13, 13. The angle of the partial reflecting mirror 3 is determined by this inclination angle, and the inclination direction is determined by the amount of adjustment of each micrometer.
従来の共振器ミラー調整装置によれば、ミラー
ホルダを支持する支点棒の受部は円錐形状である
為、支点棒の支点位置は受部以外に移動させるこ
とができず、従つてミラーホルダ全体を大きく傾
斜させ、共振ミラーの調整角度を大きくとろうと
した場合、受部付近でのＯリングと開口部内周面
の密着度が過多となり、また、開口部を介して受
部に対向するＯリングと開口部受部内周面の密着
度が過少となつてＯリングに不均一な圧迫力が加
わり密着状態をくずす惧れがある。その結果、レ
ーザ媒質と大気との分離は保持し得ず、大気のレ
ーザ媒質側へ混入により、レーザ媒質が変化し正
常なレーザ発振が不能となる問題点があつた。
According to the conventional resonator mirror adjustment device, since the receiving part of the fulcrum rod that supports the mirror holder is conical, the fulcrum position of the fulcrum rod cannot be moved to any place other than the receiving part, and therefore the entire mirror holder If you try to increase the adjustment angle of the resonant mirror by tilting the resonator mirror greatly, the close contact between the O-ring near the receiving part and the inner peripheral surface of the opening will be excessive, and the O-ring facing the receiving part through the opening will become too tight. There is a risk that the degree of adhesion between the inner circumferential surface of the opening portion and the receiving portion will be too low, and that uneven compressive force will be applied to the O-ring, thereby breaking the adhesion state. As a result, the separation between the laser medium and the atmosphere cannot be maintained, and the laser medium changes due to the atmosphere mixing into the laser medium, making normal laser oscillation impossible.
この発明は上記のような問題点を解決するため
になされたもので、ミラーホルダの傾斜角度によ
りシール材に不均一な圧迫力が加わらないような
支点棒受部を形成した共振器ミラー調整装置を提
供することを目的とする。 This invention was made to solve the above-mentioned problems, and provides a resonator mirror adjustment device in which a fulcrum rod receiving part is formed so that uneven compressive force is not applied to the sealing material due to the inclination angle of the mirror holder. The purpose is to provide
この発明に係る共振器ミラー調整装置の支点棒
受部を長溝形状とし、その溝方向を筐体のレーザ
光通過部位に形成された開口部の中心方向に向け
たものである。
The fulcrum rod receiving portion of the resonator mirror adjustment device according to the present invention has a long groove shape, and the direction of the groove is directed toward the center of the opening formed in the laser beam passage portion of the housing.
この発明においては、支点棒受部を筐体のレー
ザ光通過部位に形成された開口部の中心方向に向
かつて彫つた長溝形状とした為、ミラーホルダの
傾斜に応じてこのミラーホルダを支持する支持棒
の支点位置が変化するので、支持棒の受部周囲
と、開口部を介して受部に対向する部位での各開
口部内周面とミラーホルダ間のシール材圧迫力が
均一となる。
In this invention, the fulcrum rod receiving portion is formed into a long groove shape that is carved toward the center of the opening formed in the laser beam passage portion of the housing, so that the mirror holder is supported according to the inclination of the mirror holder. Since the fulcrum position of the support rod changes, the pressing force of the sealing material between the mirror holder and the inner peripheral surface of each opening becomes uniform around the receiving portion of the supporting rod and at a portion facing the receiving portion via the opening.
第１図ａ〜ｂはこの発明の一実施例による共振
器ミラー調整装置の構成図である。第３図に示し
た従来装置と同一又は相当部分には同一符号を付
して、この発明の特徴を中心に説明する。第１図
ａにおける１６は長溝形状の支点受け部であり、
その溝方向は第１図ｂに示す如く、ミラーホルダ
１１の移動方向である筐体４のレーザ光通過部位
に形成される開口部の中心部へ向かつている。又
長溝の断面形状は第１図ｃに示す如くＶ字形状を
成す。このような形状の支点受け部１６を有した
ミラーホルダ１１の調節機構によりミラーホルダ
１１が傾斜された場合、支点棒１４は長溝中を部
分反射鏡３の中心部に向かつてスライドする為、
支点受け部１６周囲におけるＯリング開口部内周
面における密着度は過多とならず、しかも開口部
を介して支点受け部１６に対向する位置のＯリン
グと開口部内周面における密着度は過少とならな
い。従つてＯリング１２はシール効果を損なうよ
うな変形はしないため、Ｏリングによりレーザ媒
質と大気との分離状態を保持することができる。
FIGS. 1a to 1b are block diagrams of a resonator mirror adjusting device according to an embodiment of the present invention. Components that are the same or corresponding to those of the conventional device shown in FIG. 3 are denoted by the same reference numerals, and the features of the present invention will be mainly described. 16 in FIG. 1a is a long groove-shaped fulcrum receiving part;
As shown in FIG. 1B, the direction of the groove is toward the center of the opening formed in the laser beam passage portion of the housing 4, which is the moving direction of the mirror holder 11. Further, the cross-sectional shape of the long groove is V-shaped as shown in FIG. 1c. When the mirror holder 11 is tilted by the adjustment mechanism of the mirror holder 11 having the fulcrum receiving part 16 having such a shape, the fulcrum rod 14 slides in the long groove toward the center of the partial reflecting mirror 3.
The degree of adhesion on the inner circumferential surface of the O-ring opening around the fulcrum receiving part 16 is not excessive, and the degree of adhesion between the O-ring at a position facing the fulcrum receiving part 16 through the opening and the inner circumferential surface of the opening is not too small. . Therefore, the O-ring 12 is not deformed to the extent that the sealing effect is impaired, so that the O-ring can maintain the state of separation between the laser medium and the atmosphere.
この発明は以上説明したとおり、ミラーホルダ
を筐体面に支持する支点棒の受け部を長溝形状に
したという簡単な構造により、ミラーホルダを傾
斜させ共振ミラーの角度調整を行う時に、ミラー
ホルダと筐体開口部の密着性を保つシール材に異
常外圧が加わり変形するのが阻止できるのでレー
ザ媒質と大気との分離状態を保持し得、よつて純
粋なレーザ媒質で正常なレーザ発振を行える効果
がある。
As explained above, this invention has a simple structure in which the receiving part of the fulcrum rod that supports the mirror holder on the casing surface has a long groove shape, so that when the mirror holder is tilted and the angle of the resonant mirror is adjusted, the mirror holder and the casing can be adjusted. Since the sealing material that maintains the tightness of the body opening can be prevented from being deformed by the application of abnormal external pressure, it is possible to maintain a state of separation between the laser medium and the atmosphere, which has the effect of allowing normal laser oscillation with a pure laser medium. be.
第１図ａは共振器ミラー調整装置の断面図、第
１図ｂは第１図ａの正面図、第１図ｃは支点棒受
け部の拡大図、第２図は安定型共振器の原理図、
第３図ａ〜ｃは従来の共振器ミラー調整装置を示
す図であり、第１図ａ〜ｃ相当図である。
図において、１はレーザ媒質、２は全反射鏡、
３は部分反射鏡、４は筐体、１１はミラーホル
ダ、１２はＯリング、１３，１３はマイクロメー
タ、１４は支点棒、１６は支点受け部。なお、各
図中、同一符号は同一又は相当部分を示す。
Figure 1a is a sectional view of the resonator mirror adjustment device, Figure 1b is a front view of Figure 1a, Figure 1c is an enlarged view of the fulcrum rod receiver, and Figure 2 is the principle of a stable resonator. figure,
FIGS. 3a to 3c are diagrams showing a conventional resonator mirror adjustment device, and correspond to FIGS. 1a to 3c. In the figure, 1 is a laser medium, 2 is a total reflection mirror,
3 is a partial reflecting mirror, 4 is a housing, 11 is a mirror holder, 12 is an O-ring, 13 is a micrometer, 14 is a fulcrum rod, and 16 is a fulcrum receiving part. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
通過部位に開口部を設けた筐体と、該開口部内に
遊嵌するように形成され且つシール材が捲着され
た筒体の外周面に共振ミラー載置用の鍔部を設け
て形成したミラーホルダとを備え、該鍔部上に筐
体面と鍔部底面間の間隙を調節する複数の調節機
構を共振ミラーを介して対向配置し、且つ該各調
節機構と共にミラーホルダを支持する支点軸を設
けると共に、支点軸に対する受部を筐体面に設け
て構成した共振器ミラー調整装置において、上記
受部を長溝とし、そその溝方向を、上記開口部の
中心部方向とすることを特徴とする共振器ミラー
調整装置。 ２ 上記シール材はＯリングであることを特徴と
する特許請求の範囲第１項記載の共振器ミラー調
整装置。 ３ 上記受部を断面Ｖ字形状の長溝としたことを
特徴とする特許請求の範囲第１項又は第２項記載
の共振器ミラー調整装置。[Scope of Claims] 1. A housing that houses a laser excitation device and has an opening at a laser beam passage portion, and a cylinder that is formed to fit loosely into the opening and is wrapped with a sealing material. a mirror holder formed by providing a flange for mounting a resonant mirror on the outer peripheral surface of the mirror holder, and a plurality of adjustment mechanisms for adjusting the gap between the casing surface and the bottom surface of the flange on the flange via the resonant mirror. In a resonator mirror adjustment device, a resonator mirror adjustment device is provided with a fulcrum shaft that is arranged facing each other and supports a mirror holder together with each of the adjustment mechanisms, and a receiving portion for the fulcrum shaft is provided on a housing surface. A resonator mirror adjustment device characterized in that the groove direction is directed toward the center of the opening. 2. The resonator mirror adjustment device according to claim 1, wherein the sealing material is an O-ring. 3. The resonator mirror adjustment device according to claim 1 or 2, wherein the receiving portion is a long groove having a V-shaped cross section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21430386A JPS6370469A (en) | 1986-09-11 | 1986-09-11 | Adjusting device for resonator mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21430386A JPS6370469A (en) | 1986-09-11 | 1986-09-11 | Adjusting device for resonator mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370469A JPS6370469A (en) | 1988-03-30 |
| JPH0469830B2 true JPH0469830B2 (en) | 1992-11-09 |
Family
ID=16653500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21430386A Granted JPS6370469A (en) | 1986-09-11 | 1986-09-11 | Adjusting device for resonator mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370469A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5596404A (en) * | 1994-12-30 | 1997-01-21 | Albion Instruments, Inc. | Raman gas analysis system with flexible web and differential thread for precision optical alignment |
| US5703683A (en) * | 1996-05-28 | 1997-12-30 | Ohmeda Inc. | Extruded wobble plate optical alignment device |
-
1986
- 1986-09-11 JP JP21430386A patent/JPS6370469A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6370469A (en) | 1988-03-30 |
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