JPH0470747U - - Google Patents
Info
- Publication number
- JPH0470747U JPH0470747U JP11444690U JP11444690U JPH0470747U JP H0470747 U JPH0470747 U JP H0470747U JP 11444690 U JP11444690 U JP 11444690U JP 11444690 U JP11444690 U JP 11444690U JP H0470747 U JPH0470747 U JP H0470747U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- fixing plate
- card fixing
- attachment
- detachment mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案のプローブカード固定板の取
付部の平面図、第２図はプローブカード固定板の
クランプ機構の断面図、第３図はプローブカード
固定板用ガイドピン部の断面図、第４図は従来の
プローブカード固定板の取付部の平面図、第５図
は従来のプローブカード固定板Ａ１−Ａ２断面図
、第６図は従来のプローブカード固定板１の長穴
溝１０の断面図である。
１……プローブカード固定板、２……プローブ
カード固定板用ガイドピン、３……プローブカー
ド位置決めピン、４……プローブカード、５……
クランパ（クランプ爪）、６……ベアリング、７
……圧縮バネ。
Figure 1 is a plan view of the attachment part of the probe card fixing plate of this invention, Figure 2 is a sectional view of the clamping mechanism of the probe card fixing plate, Figure 3 is a sectional view of the guide pin part for the probe card fixing plate, and Figure 3 is a sectional view of the probe card fixing plate guide pin part. 4 is a plan view of the mounting portion of a conventional probe card fixing plate, FIG. 5 is a sectional view of the conventional probe card fixing plate A1 - A2 , and FIG. 6 is a long hole groove 10 of the conventional probe card fixing plate 1. FIG. 1... Probe card fixing plate, 2... Guide pin for probe card fixing plate, 3... Probe card positioning pin, 4... Probe card, 5...
Clamper (clamp claw), 6...Bearing, 7
...compression spring.
Claims (1)
プローブカード固定板用ガイドピンおよびプロー
ブカード位置決めピンからなるプローブカードの
脱着機構部において、 前記プローブカード固定板をクランパ機構にて
固定することを特徴とするプローブカードの脱着
機構。[Scope of Claim for Utility Model Registration] In a probe card attachment/detachment mechanism section of a prober device that includes a probe card fixing plate, a guide pin for the probe card fixing plate, and a probe card positioning pin, the probe card fixing plate is fixed by a clamper mechanism. A probe card attachment/detachment mechanism characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444690U JPH0470747U (en) | 1990-10-30 | 1990-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444690U JPH0470747U (en) | 1990-10-30 | 1990-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0470747U true JPH0470747U (en) | 1992-06-23 |
Family
ID=31862125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11444690U Pending JPH0470747U (en) | 1990-10-30 | 1990-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0470747U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009200390A (en) * | 2008-02-25 | 2009-09-03 | Kyodo:Kk | Probe card transfer apparatus |
-
1990
- 1990-10-30 JP JP11444690U patent/JPH0470747U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009200390A (en) * | 2008-02-25 | 2009-09-03 | Kyodo:Kk | Probe card transfer apparatus |
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