JPH0472599U - - Google Patents
Info
- Publication number
- JPH0472599U JPH0472599U JP11682890U JP11682890U JPH0472599U JP H0472599 U JPH0472599 U JP H0472599U JP 11682890 U JP11682890 U JP 11682890U JP 11682890 U JP11682890 U JP 11682890U JP H0472599 U JPH0472599 U JP H0472599U
- Authority
- JP
- Japan
- Prior art keywords
- high frequency
- section
- level
- signal
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例を示すブロツク図、
第２図は従来のプラズマ発生装置の一例を示すブ
ロツク図である。
１，１Ａ……高周波発振器、２，２Ａ……高周
波出力検出部、３……処理部、４……高周波出力
表示部、５……高周波出力設定部、６……比較判
断処理部、７……高周波出力制御部、８……高周
波出力調整用可変抵抗器。
FIG. 1 is a block diagram showing an embodiment of the present invention.
FIG. 2 is a block diagram showing an example of a conventional plasma generator. 1, 1A... High frequency oscillator, 2, 2A... High frequency output detection section, 3... Processing section, 4... High frequency output display section, 5... High frequency output setting section, 6... Comparison judgment processing section, 7... ...High frequency output control section, 8...Variable resistor for high frequency output adjustment.
Claims (1)
生する高周波発振器と、この高周波発振器からの
高周波信号のレベルを検出する高周波出力検出部
と、前記高周波発振器からの高周波信号を入力し
所定の処理を行う処理部と、前記高周波発振器で
発生する高周波信号のレベルをデイジタル値によ
り設定する高周波出力設定部と、この高周波出力
設定部で設定されたレベルと前記高周波出力検出
部で検出された高周波信号のレベルとを比較し比
較処理信号を出力する比較判断処理部と、この比
較判断処理部からの比較処理信号と対応した前記
出力制御信号を出力する高周波出力制御部とを有
することを特徴とするプラズマ発生装置。 A high frequency oscillator that generates a high frequency signal at a level corresponding to an output control signal, a high frequency output detection section that detects the level of the high frequency signal from the high frequency oscillator, and a high frequency signal input from the high frequency oscillator to perform predetermined processing. a processing section, a high frequency output setting section for setting the level of the high frequency signal generated by the high frequency oscillator using a digital value, the level set by the high frequency output setting section and the level of the high frequency signal detected by the high frequency output detection section; and a high-frequency output control section that outputs the output control signal corresponding to the comparison processing signal from the comparison and judgment processing section. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11682890U JPH0472599U (en) | 1990-11-07 | 1990-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11682890U JPH0472599U (en) | 1990-11-07 | 1990-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472599U true JPH0472599U (en) | 1992-06-25 |
Family
ID=31864674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11682890U Pending JPH0472599U (en) | 1990-11-07 | 1990-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472599U (en) |
-
1990
- 1990-11-07 JP JP11682890U patent/JPH0472599U/ja active Pending
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