JPH04734U - - Google Patents
Info
- Publication number
- JPH04734U JPH04734U JP4003390U JP4003390U JPH04734U JP H04734 U JPH04734 U JP H04734U JP 4003390 U JP4003390 U JP 4003390U JP 4003390 U JP4003390 U JP 4003390U JP H04734 U JPH04734 U JP H04734U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- pump connected
- pump
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000002904 solvent Substances 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の一例を示した正面図、第２図
〜第４図は溶剤を供給する過程を段階的に示す正
面図である。
１……ノズル、２……サツクバツクポンプ、３
……レジスト主ポンプ、４……溶剤。
FIG. 1 is a front view showing an example of the present invention, and FIGS. 2 to 4 are front views showing step-by-step the process of supplying the solvent. 1...Nozzle, 2...Suckback pump, 3
...Resist main pump, 4...Solvent.
Claims (1)
しているサツクバツクポンプと、このサツクバツ
クポンプと接続されているレジスト主ポンプとを
具備するフオトレジスト除去装置。 A photoresist removal apparatus comprising a nozzle made of a transparent member, a back-up pump connected to the nozzle, and a resist main pump connected to the back-up pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4003390U JPH04734U (en) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4003390U JPH04734U (en) | 1990-04-13 | 1990-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04734U true JPH04734U (en) | 1992-01-07 |
Family
ID=31549470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4003390U Pending JPH04734U (en) | 1990-04-13 | 1990-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04734U (en) |
-
1990
- 1990-04-13 JP JP4003390U patent/JPH04734U/ja active Pending