JPH0473809U - - Google Patents
Info
- Publication number
- JPH0473809U JPH0473809U JP11736090U JP11736090U JPH0473809U JP H0473809 U JPH0473809 U JP H0473809U JP 11736090 U JP11736090 U JP 11736090U JP 11736090 U JP11736090 U JP 11736090U JP H0473809 U JPH0473809 U JP H0473809U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- sample
- cantilever
- light
- critical angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
第１図は本考案の探針走査型顕微鏡の一実施例
を示す構成図、第２図は従来例である。
１……レーザ光源、２……カンチレバー状の探
針、３……試料、５……変位検出部、１１……レ
ーザダイオード、１２……レンズ、５１……臨界
角プリズム、５２……第１のフオトダイオード、
５３……第２のフオトダイオード。
FIG. 1 is a configuration diagram showing one embodiment of a probe scanning microscope according to the present invention, and FIG. 2 is a conventional example. DESCRIPTION OF SYMBOLS 1... Laser light source, 2... Cantilever-shaped probe, 3... Sample, 5... Displacement detection unit, 11... Laser diode, 12... Lens, 51... Critical angle prism, 52... First photodiode,
53...Second photodiode.
Claims (1)
まで近づけ、探針と試料の間に作用する原子間力
や磁気力などを探針の変位として検出し、探針を
試料表面上を走査させることにより、試料の形状
や表面の物性などを測定するようにした探針走査
型顕微鏡において、 レーザダイオードとこのレーザダイオードの出
力光を集光するためのレンズを備えたレーザ光源
と、 このレーザ光源からの出射光をその背面にて反
射できるカンチレバー状の探針と、 この探針からの反射光路上であつて、プリズム
の一辺が反射光に対して臨界角となるように設置
された臨界角プリズムとこの臨界角プリズムから
の透過光と反射光をそれぞれ受光する第１、第２
の受光素子を備えた変位検出部を設けた構成とし
たことを特徴とする探針走査型顕微鏡。[Claim for Utility Model Registration] A cantilever-shaped probe is brought close to the sample at a very small distance, and the atomic force or magnetic force that acts between the probe and the sample is detected as the displacement of the probe. A probe scanning microscope is designed to measure the shape and physical properties of a sample by scanning it over the sample surface, and is equipped with a laser diode and a lens to focus the output light of the laser diode. A laser light source, a cantilever-shaped probe that can reflect the light emitted from the laser light source on its back surface, and one side of the prism on the reflected light path from the probe that forms a critical angle with respect to the reflected light. A critical angle prism is installed as shown in FIG.
What is claimed is: 1. A probe scanning microscope characterized in that it is configured to include a displacement detection section equipped with a light receiving element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11736090U JPH0752618Y2 (en) | 1990-11-08 | 1990-11-08 | Scanning probe microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11736090U JPH0752618Y2 (en) | 1990-11-08 | 1990-11-08 | Scanning probe microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0473809U true JPH0473809U (en) | 1992-06-29 |
| JPH0752618Y2 JPH0752618Y2 (en) | 1995-11-29 |
Family
ID=31865259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11736090U Expired - Lifetime JPH0752618Y2 (en) | 1990-11-08 | 1990-11-08 | Scanning probe microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0752618Y2 (en) |
-
1990
- 1990-11-08 JP JP11736090U patent/JPH0752618Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0752618Y2 (en) | 1995-11-29 |
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