JPH0474422U - - Google Patents
Info
- Publication number
- JPH0474422U JPH0474422U JP11812390U JP11812390U JPH0474422U JP H0474422 U JPH0474422 U JP H0474422U JP 11812390 U JP11812390 U JP 11812390U JP 11812390 U JP11812390 U JP 11812390U JP H0474422 U JPH0474422 U JP H0474422U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- container
- hydroacid
- holes
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Description
第１図は本考案の一実施例の斜視図、第２図ａ
，ｂは石英治具の一例の上面図及び断面図である
。 １……石英治具、２……芯出用穴、３……容器
、４……ふた、５……穴、６……切欠き、７……
洗浄液、８……石英板、９……支持棒、１０……
ウエーハ。
，ｂは石英治具の一例の上面図及び断面図である
。 １……石英治具、２……芯出用穴、３……容器
、４……ふた、５……穴、６……切欠き、７……
洗浄液、８……石英板、９……支持棒、１０……
ウエーハ。
Claims (1)
- 耐フツ酸性材料からなり、複数の穴を有する容
器とふたとから構成されていることを特徴とする
石英治具洗浄篭。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11812390U JPH0474422U (ja) | 1990-11-09 | 1990-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11812390U JPH0474422U (ja) | 1990-11-09 | 1990-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474422U true JPH0474422U (ja) | 1992-06-30 |
Family
ID=31866031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11812390U Pending JPH0474422U (ja) | 1990-11-09 | 1990-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474422U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017209596A (ja) * | 2016-05-23 | 2017-11-30 | 大陽日酸株式会社 | 気相成長装置用部品の洗浄装置 |
-
1990
- 1990-11-09 JP JP11812390U patent/JPH0474422U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017209596A (ja) * | 2016-05-23 | 2017-11-30 | 大陽日酸株式会社 | 気相成長装置用部品の洗浄装置 |