JPH0474538U - - Google Patents

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Publication number
JPH0474538U
JPH0474538U JP11720890U JP11720890U JPH0474538U JP H0474538 U JPH0474538 U JP H0474538U JP 11720890 U JP11720890 U JP 11720890U JP 11720890 U JP11720890 U JP 11720890U JP H0474538 U JPH0474538 U JP H0474538U
Authority
JP
Japan
Prior art keywords
gas introduction
vaporization
vaporization section
phase chemical
introduction pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11720890U
Other languages
English (en)
Other versions
JP2533811Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11720890U priority Critical patent/JP2533811Y2/ja
Publication of JPH0474538U publication Critical patent/JPH0474538U/ja
Application granted granted Critical
Publication of JP2533811Y2 publication Critical patent/JP2533811Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す模式図、第２
図及び第３図は本考案の他の実施例を示す模式図
、第４図及び第５図は従来例を示す模式図である
。 １，２０，３０，４０……気相化学反応装置、
２……予熱部、３……予熱装置、４……気化部、
５……反応部、６……外部加熱装置、７……冷却
部、８……易気化性金属化合物投入口、９……キ
ヤリアガス導入管、１０……気化るつぼ、１１…
…反応ガス導入管。

Claims (1)

    【実用新案登録請求の範囲】
  1. 易気化性金属化合物の投入管及びキヤリアガス
    導入管を備え、気化用るつぼを内蔵してなる気化
    部と、気化部のほぼ中央部を上下に貫通し気化部
    底下に開口部を有する反応ガス導入管を備えてな
    る反応部とを有し、かつ気化部とその下に位置す
    る反応部とを包囲する加熱装置を有する気相化学
    反応装置において、キヤリアガス導入管及び反応
    ガス導入管を気化部の内側部において予熱装置で
    包囲したことを特徴とする微粉、超微粉製造用気
    相化学反応装置。
JP11720890U 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置 Expired - Fee Related JP2533811Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11720890U JP2533811Y2 (ja) 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11720890U JP2533811Y2 (ja) 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置

Publications (2)

Publication Number Publication Date
JPH0474538U true JPH0474538U (ja) 1992-06-30
JP2533811Y2 JP2533811Y2 (ja) 1997-04-23

Family

ID=31865090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11720890U Expired - Fee Related JP2533811Y2 (ja) 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置

Country Status (1)

Country Link
JP (1) JP2533811Y2 (ja)

Also Published As

Publication number Publication date
JP2533811Y2 (ja) 1997-04-23

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