JPH0474902A - Automatic inner diameter measuring apparatus and setting method for zero point thereof - Google Patents

Abstract

PURPOSE:To make an automatic inner diameter measuring apparatus applicable to the in line measurement and to quickly measure a zero point of a gauge by constituting the apparatus so that it can measure only the inner diameter of a hole independently. CONSTITUTION:An automatic measuring apparatus 1 for measuring the inner diameter is provided with a base frame 11. A gate-like column 12 erects at either side of the base frame 11. Two horizontal beams 13A, 13B are fixedly provided with a predetermined distance above between the columns 12. These horizontal beams are extended in an X direction which is one of the horizontal directions. Moreover, X sliders 14A, 14B of the same structure as the beams 13A, 13B are movably supported in the X direction over the beams. The X sliders are driven forward and backward in the X direction by X motors 22A, 22B provided at one end of the respective horizontal beams and feed screw shafts 23A, 23B held along the horizontal beams in the X direction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an automatic inner diameter measuring device for measuring dimensions such as the diameter of a hole formed in an object to be measured.

[Background technology]

Conventionally, a three-dimensional measuring machine has been known as a device that can measure a wide variety of measurement points with a single device by involving a contact probe three-dimensionally in the object to be measured, and can also comprehensively collect measurement data. ing.

Various types of three-dimensional measuring machines have been developed, and they can be classified into manual types, motor drive types, CNC (computer numerical control) types, etc. when classified by operation method.

[Problem to be solved by the invention]

By the way, in order to maintain high accuracy, conventional coordinate measuring machines are generally installed in a special measurement room with constant temperature and humidity, which is separate from the production line of the object to be measured. . For this reason, when performing measurements, the object to be measured is taken out from the production line, transported into a measurement chamber, and measured there.

However, with the current demand for highly efficient manufacturing, there is a need for so-called in-line measurement, in which a three-dimensional measuring machine is incorporated into a manufacturing line. In this inline measurement,
In order not to slow down the production line, rapid measurements are required, and automation is also required.

However, with current three-dimensional measuring machines, when measuring the diameter of a hole, for example, the tip of the probe is brought into contact with three locations on the inner surface of the hole, and the inner diameter is determined by calculation. Although this three-point contact measurement allows measurement of the hole center position in addition to the inner diameter dimension, there is a problem in that it is extremely inefficient because it is not a one-time measurement. Furthermore, since the hole diameter is determined by calculation from an extremely long dimension (compared to the hole diameter) from the measurement origin, there is also the problem that dimensional accuracy is inevitably reduced.

Furthermore, when measuring an object in-line, there are many cases where only the inner diameter of the hole is measured. In such a case, if you try to measure the hole inner diameter with the above-mentioned coordinate measuring machine, the above-mentioned problems will have a greater weight because the functions of the coordinate measuring machine, such as measuring the hole center position, are not used. That will happen.

On the other hand, as a measuring device for the inner diameter of a hole, there are measuring devices such as a manual hole tester (Japanese Patent Publication No. 63-4641, Japanese Utility Model Publication No. 60-41811, etc.). However, these methods are manually operated, which makes them difficult to work with, and when measuring multiple holes with different inner diameters,
Not practical.

Incidentally, according to the research conducted by the present inventors, in an object to be measured in which a large number of holes are formed, the majority of the holes, for example, 7 to 7 holes.
It has been found that for 80% of the holes, only the value of the diameter dimension is required, and the center position of the hole or the dimension between each hole is not required.

Therefore, there is a need for an apparatus that can separately measure only the inner diameter of the hole and that can quickly perform such measurements.

An object of the present invention is to provide an automatic inner diameter measuring device that can quickly measure the inner diameter of a hole and can also be applied to in-line measurements.

Another object of the present invention is to provide a method that can quickly set the zero point of a gauge used in an automatic inner diameter measuring device.

[Means to solve the problem]

The automatic inner diameter measuring device according to the present invention has an inner diameter measuring gauge head capable of measuring the inner diameter of a hole in one go, which is removably attached to a three-dimensional moving means similar to a general three-dimensional measuring machine, and only measures the inner diameter dimension. The purpose is to achieve the above objective by using this inner diameter measuring gauge head to measure holes that require .

Specifically, the device of the present invention includes an inner diameter measuring gauge head that is insertable into a hole formed in an object to be measured and has at least one contact that is displaceable in the radial direction of the hole; A stocker capable of supporting a plurality of inner diameter measuring gauge heads corresponding to hole diameters, and a stocker movable relative to the object to be measured and the inner diameter measuring gauge head in two orthogonal directions in a horizontal plane and in one direction in a vertical direction. As a result, the three-dimensional moving means is movable in three-dimensional directions and the inner diameter measuring gauge head can be attached and detached, the driving means for each direction of the three-dimensional moving means, and the plurality of inner diameter measuring gauge heads are provided. This is an automatic inner diameter measuring device characterized by comprising a plurality of master ring gauges for setting each of the master ring gauges to a zero point, and a ring gauge stand on which these master ring gauges are placed.

In the apparatus of the present invention, the ring gauge stand is installed in the stocker so that the center axis of each master ring gauge substantially coincides with the center axis of each inner diameter measuring gauge head placed on the stocker. It is preferable that

Moreover, the zero point setting method of the automatic inner diameter measuring machine according to the present invention is as follows:
An inner diameter measuring gauge head that can be inserted into a hole formed in a measured object and has at least one contact that can be displaced in the radial direction of the hole, and a plurality of inner diameter measuring gauge heads corresponding to different hole diameters. a supportable stocker;
As a result of being made movable relative to the object to be measured and the inner diameter measuring cage head in two orthogonal directions in a horizontal plane and one direction in a vertical direction, the inner diameter measuring gauge head is movable in three dimensions. a three-dimensional moving means that is detachable, a driving means for driving the three-dimensional moving means in each direction, a plurality of master ring gauges for setting the zero point of each of the plurality of inner diameter measuring gauge heads, and these master ring gauges. a ring gauge mounting stand installed on the stocker so that the center axis of each master ring gauge substantially coincides with the center axis of each inner diameter measuring gauge head placed on the stocker; Equipped with
When a predetermined inner diameter measuring gauge head is attached by the three-dimensional moving means, the contact of the inner diameter measuring gauge head is passed through the corresponding ring gauge, and when this contact passes through the ring gauge, the inner diameter is automatically adjusted. This is a zero point setting method for an automatic inner diameter measuring device, characterized in that the measured value of a measurement gauge head is set to a zero point.

In the method of the present invention, when each inner diameter measuring gauge head is placed on the stocker, the contacts of each inner diameter measuring gauge head are respectively protruded by a fixed dimension from the corresponding master link cage, and each inner diameter measuring cage head is moved three-dimensionally. Preferably, the measurement value of the inner diameter measuring gauge head is set to zero at a position where the inner diameter measuring gauge head is pulled up by the predetermined dimension after being attached to the means.

[Effect]

In the present invention, when measuring the inner diameter of a hole formed in an object to be measured, the three-dimensional moving means is moved three-dimensionally relative to the stocker, and the three-dimensional moving means is adjusted to the diameter of the hole to be measured. Attach an inner diameter measuring gauge head of the corresponding size.

Next, the three-dimensional moving means is moved three-dimensionally relative to the object to be measured, the attached gauge head is inserted into a predetermined hole of the object to be measured, and the contactor is moved relative to the gauge head whose zero point has been set in advance. The inner diameter measurement of the hole is completed by detecting the amount. At this time, holes that can be measured with the same gauge head are
Measure the pore diameter one by one. In addition, when measuring different hole diameters, the inner diameter measuring gauge head is replaced.

After completing the measurement, the gauge head moves the three-dimensional moving means and the stocker relative to each other in the same manner as described above, and returns the inner diameter measuring gauge head attached to the three-dimensional moving means to its original position.

Thereafter, a predetermined inner diameter measuring gauge head is used to measure all the hole inner diameters at predetermined locations on the object to be measured, and the measurement is completed.

To set the zero point of the throat for each inner diameter measuring gauge during measurement, insert the contact of the specified inner diameter measuring gauge head into a master ring gauge that has an inner diameter that corresponds to the gauge head, and in this state This is done by setting the output value of the head to zero.

At this time, if the ring gauge stand on which the master ring gauge is placed is placed in the stocker, the contact of the gauge head can be inserted into the master ring gauge when the gauge head is mounted by the three-dimensional moving means, and the zero point can be set. This will speed up the process.

Further, when the inner diameter measuring gauge head is placed on the stocker, if the contact portion of the gauge head is inserted into the mastering gauge by a predetermined distance, the zero point setting becomes easier.

〔Example〕

Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 1 shows the overall configuration of an automatic inner diameter measuring device 1 according to this embodiment with a portion cut away.

The automatic inner diameter measuring device 1 of this embodiment is capable of measuring not only the inner diameter of the hole but also the dimensions of each part as necessary.

The automatic inner diameter measuring device l includes a base frame 11, and gate-shaped columns 1 are provided on both left and right sides of the base frame 11.
Two of them are erected.

Between the upper portions of the left and right columns 12, two first and second cross beams 13A and 13B are mounted and fixed at a predetermined interval. These cross beams 13A and 13B extend along the X direction, which is one horizontal direction.

First and second X sliders 14A and 14B having the same structure are respectively supported on the two cross beams 13A and 13B so as to be movable in the X direction. These X sliders 14A, 1
4B is a first section provided at one end of each crossbeam 13A, 13B.
1 Second X motor 22A, 22B and each crossbeam 13A, 1
The hook is driven forward and backward in the X direction by first and second X direction feed screw shafts 23A and 23B extending along the line 3B.

Here, the first X-direction drive means 21A is driven by the first X-motor 22A and the first X-direction feed screw shaft 23A, and the first X-direction drive means 21A is driven by the second X-motor 22B and the second
3B constitute a second X-direction driving means 21B.

Note that the first and second X-direction feed screw shafts 23A.

23B is provided exposed on the front surface of the cross beams 13A, 13B for convenience of illustration, but in reality, the cross beams 13A, 13
It is stored in a box on the rear side of B.

The amount of displacement in the first and second X sliders 14A, 14BOX direction is the amount of displacement between each crossbeam 13A, 13B and the X slider 14A, 14
The detection signal is detected by first and second X-direction displacement detection means 31A and 31B provided between the X-axis and the X-direction displacement amount detection means 31A and 31B, respectively, and the detection signal is generated by a device such as a computer (not shown).

Each of the X-direction displacement detection means 31A, 31B is composed of a glass scale, a magnetic scale, a capacitance scale, etc., and a detector corresponding to these scales, like a general three-dimensional measuring machine.

Each X slider 14A. 14B, shaft-shaped eleventh and second Z sliders 15A and 15B are supported so as to be movable in the Z direction, which is the vertical direction. Each Z slider 15A, 15B
are driven by the first and second Z-direction drive means 24A and 24B provided on each X slider 14A and 14B, respectively.
It is designed to be driven forward and backward in the direction. Each Z direction driving means 24A, 24B includes first and second Z motors 25A, 25B protruding from each X slider 14A, 14B,
It is composed of a Z-direction feed screw shaft (not shown), etc.

The amount of displacement in the Z direction of each Z slider 15A, 15B is
First and second Z direction displacement detection means 3 provided between the sliders 14A, 14B and the Z sliders 15A, 15B
Detected by 4A and 34B. These Z-direction displacement amount detection means 34A, 34B also correspond to the X-direction displacement amount detection means 31.
It has the same structure as A and 31B, and its detection signal is input to a control device (not shown).

An inner diameter measuring gauge head 70 or a contact probe 90, which will be described in detail later, can be removably attached to each Z slider 15A, 15B.

As shown in FIGS. 2 and 3, the inner diameter measuring gauge head 70 has a gauge body 71 having a substantially cylindrical shape with a bottom. A rectangular flange portion 72 formed on the opening side of the gauge body 71 is connected to a square plate-shaped connecting plate 75 via a pair of flat parallel springs 74 having reinforcing plates 73 on both sides.
are connected. This connecting plate 75 has a parallel spring 74
A flange portion 79 of the shank 78 is connected via a pair of flat parallel springs 77 arranged in a direction perpendicular to the shank 78 and having reinforcing plates 76 on both sides.

Thereby, the shank 78 is movable in the radial direction with respect to the axis of the gauge body 71, that is, connected in a floating state, and is held at a predetermined position by the two pairs of parallel springs 74 and 77 as biasing means, that is, The gauge body 71 is biased and connected so that its central axis substantially coincides with the gauge body 71.

The shank 78 has a tapered engagement part 81 integrally projecting from the center of the flange part 79, and has an ear-shaped pull stud 82 at the tip of the tapered engagement part 81.

A fixed arm 83 formed in a cylindrical shape with a predetermined outer diameter is fixed to the bottom side of the gauge body 71. A groove 84 along the axial direction is formed on one side of the fixed arm 83, and a gauge body 71 is disposed in the groove 84.
The distal end side of a movable arm 85 is disposed at the bottom of the movable arm 85, which is swingably supported in the middle.

As shown in FIG. 3, three contactors 86 made of steel balls or the like are partially protruded from the same circumference on the distal end side of the fixed arm 83 and the movable arm 85 at a 120 degree angle. Fixed at equal positions. These three contacts 86 are
Two are fixed to the fixed arm 83 and one is fixed to the movable arm 85.

The contact 86 fixed to the movable arm 85 can be displaced in the radial direction of the fixed arm 83 as the movable arm 85 swings, that is, in the radial direction of the hole into which the fixed arm 83 is inserted and the inner diameter is measured. is being used.

The inner end of the movable arm 85 is in contact with one end of a swinging piece 87 that is swingably supported within the gauge body 71 and has an oval-shaped side surface. A detector 89 of a displacement detector 88 such as a differential transformer mounted within the gauge body 71 is in contact with the other end of the swing piece 87 . This pressure sensor 89 is always biased in the protruding direction by a spring or the like (not shown), and this biasing force biases the tip of the movable arm 85 in the protruding direction via the swinging piece 87.

At this time, whether the urging force in the protruding direction of the movable arm 85 or the detector 8
If the biasing force of 9 is insufficient, a compression coil spring,
A torsion coil spring or the like may be provided.

Note that the shape, dimensions, etc. of the inner diameter measuring gauge head 70 change depending on the shape of the hole to be measured, but since all the constituent parts are the same, all the parts that are different in appearance are indicated by the same reference numerals. There is.

Further, in the contact type probe 90, as shown in FIG. 4, a shank 93 is integrally provided at the top of a round shaft-shaped probe body 91 via a flange portion 92. This shank 93 is composed of a tapered engaging portion 94 and a pull stud 95, and these tapered engaging portion 94 and pull stud 95 are the same as the tapered engaging portion 81 and pull stud 82 of the inner diameter measuring gauge head 70. It is formed to the shape and dimensions of.

A spherical contactor 96 is integrally fixed to the lower end of the probe body 91.

Note that the shape and dimensions of the contact type probe 90 vary depending on the part of the object to be measured, but the shape etc. of the contact probe 90 may vary depending on the type of probe conventionally used in a general three-dimensional measuring machine, such as a touch probe. A shank having the same shape as the shank 93 shown in FIG. 4 is attached to a signal probe, a partially bendable universal probe, or the like.

The inner diameter measuring gauge head 70 and the contact type probe 90 are
For the structure for attaching and detaching the sliders 15A and 15B, a known structure described in, for example, Japanese Patent Laid-Open No. 61-213623 is used.

That is, as shown in FIG.
, 15B, an attachment/detachment mechanism 50 is provided.

The attachment/detachment mechanism 50 includes a hollow central shaft 5 supported by the Z sliders 15A and 15B so as to be rotatable and immovable in the axial direction.
1. A drive shaft 53 having a ball holder 52 at the lower end is housed in the center shaft 51 so as to be movable in the axial direction. is energized by

A plurality of balls 55 are supported by the ball holder 52 so as to be movable in the radial direction of the ball holder 52. These balls 55 are retracted into the ball holder 52 when the drive shaft 53 is pulled up by the compression coil spring 54 and the ball holder 52 is positioned within the storage hole 56 of the central shaft 51.

As a result, the ball 55 is engaged with the lower neck of the pull stud 82 or 95 of the inner diameter measurement gauge head 70 or the contact probe 90 located in the ball holder 52, and It is pulled in and prevented from falling off.

Further, a storage hole 56 is provided below the storage hole 56 of the central shaft 51.
A large diameter hole 57 and a tapered hole 58 having a larger diameter are arranged in series. This tapered hole 58 is shaped so that when the pull stud 82.95 is pulled up by the ball 55 and drive shaft 53, the tapered engagement portion 81 or 94 of each shank 78 or 93 just engages.

On the other hand, in the large diameter hole 57, the drive shaft 53 is connected to the compression coil spring 54.
This is a hole through which each ball 55 is moved radially outward of the ball holder 52 when the ball 55 is moved downward against the force. By moving the ball 55 into the large diameter hole 57, the pull stud 82.95 whose neck portion is held by the ball 55 can be removed from the ball holder 52 or inserted into the ball holder 52.

The tip of a piston rod 62 of a cylinder 61 is in contact with the upper end of the drive shaft 53 via a ball 59 . The cylinder 61 is the Z slider 15A.

15B and is housed in the cylinder 61, the piston rod 62 is moved downward, causing the drive shaft 53 to move against the compression coil spring 54. It can be pushed down.

A center shaft rotation mechanism 65 for rotating the center shaft 51 is also provided in the Z sliders 15A and 15B. This central shaft rotation mechanism 65 is meshed with a motor 66 supported by the Z sliders 15A and 15B, a small gear 67 fixed to the output shaft of this motor 66, and the small gear 67.
It is configured to include a large gear 6.8 fixed to the central shaft 51.

When the center shaft 51 is rotated by the center shaft rotation mechanism 65,
A contact probe 90 attached to the central shaft 51 via a ball holder 52 of a drive shaft 53 can be rotated. Therefore, when the contact type probe 90 is a universal probe, the inclination direction of the support shaft of the contactor 96 that is bent and attached to the probe center axis can be changed, and surfaces and holes with different inclination directions can be changed. etc. can be measured.

In FIG. 1, a table 17 is supported on the base frame 11 via two rails 16 so as to be movable in the other direction perpendicular to the X direction, which is one direction in the horizontal plane, that is, the Y direction. . Therefore, the table 17 functions as a Y-direction slider.

Here, an X
Sliders 14A, 14B, this X slider 14A, 14
A three-dimensional moving means 1O is constituted by X sliders 15A and 15B that can be displaced in the Z direction in B and a table 17 as a Y direction slider that can be displaced in the Y direction on the base frame 11 via a rail 16. Therefore, the inner diameter measuring gauge head 7 is detachable from the X sliders 15A and 15B.
．． 0 or the contact type probe 90 is the three-dimensional moving means 1
When mounted on the zero X sliders 15A and 15B, it is movable in three-dimensional directions relative to the object W to be measured.

The table 17 is driven in the Y direction by a Y motor 28 provided on the base frame 11 and a Y direction feed screw shaft 29 driven by the Y motor 28 and running along the Y direction. These Y motor 28 and Y direction feed gear shaft 29
The Y-direction driving means 27 includes the following.

The amount of displacement of the table 17 in the Y direction is detected by a Y direction displacement amount detection means 37 provided between the table 17 and one rail 16 of the base frame 11. This Y-direction displacement amount detection means 37 also includes the X-direction displacement amount detection means 31A.
, 31B, and its detection signal is input to a control device (not shown).

On the table 17, an upwardly U-shaped swinging table 18 can be indexed at a predetermined angle in the direction of arrow Q with respect to the horizontal axis via a pair of brackets h17P, which is actually an angle of 360 degrees or more. It is supported in a swingable state.

On the swing table 18, when the swing table 18 is in the horizontal state shown in FIG.
A turning table 19 is supported so as to be able to turn in the direction of arrow R in a state where it can be indexed to a predetermined angle, in fact, an angle of 360 degrees or more. At this time, when the swing table 18 is swung at a predetermined angle, the swivel table 1
9 no longer rotates with respect to the vertical axis, or for convenience of explanation, in the standard state where the swing table 18 is in a horizontal position, the center axis of rotation is vertical; 19 is described as rotating around a vertical axis.

An object W to be measured, which has a plurality of holes formed therein, is installed and fixed on the turning table 19 .

The swing table 18 and the turning table 19 are swung or turned by driving means such as a motor (not shown), so that the orientation of the object W placed on the turning table 19 can be changed.

Therefore, the surface of the object W to be measured facing the inner diameter measuring gauge head 70 or the contact probe 90 attached to the lower surface of each Z slider 15A, 15B and its orientation can be changed.

Near the front and rear ends of the column 12 on the left side of the base plate 11, there are two first and second stockers 40, one each.
A and 40B are installed so that they face each other.

These stockers 40A and 40B basically have the same structure, so either the first stocker 40A will be explained and the explanation of the other second stocker 40B will be omitted, or the structure of each part may be different. The first stocker 40A side is shown with a symbol A, and the second stocker 40B side is shown with a symbol B.

The first stocker 40A includes a box-shaped casing 41A with the minus side open, and this caisson casing 41. The main component is a mounting frame 42A that can be stored and pulled out in the direction of arrow Y by a drive mechanism (not shown).

As shown in FIGS. 6 and 7, the mounting frame 42A includes a support base 43A with an inverted side surface, and a plurality of U-shaped grooves 44A are formed at predetermined intervals on the support base 43A. has been done. A gauge body 71 of an inner diameter measuring gauge head 70 of various shapes or a probe body 91 of a contact type probe 90 is engaged with these U-shaped grooves 44A.
Each flange portion 72 or 92 is a support base 43A.
Each gauge head 7
0 or probe 90 is supported.

U-shaped groove 44A in which Rad 70 is supported for each inner diameter measurement gauge
A ring gauge mounting stand 45A in the form of a reclining plate is fixed at the lower position of each of the two. This ring gauge stand 4
5A is formed with a hole 46A that is substantially concentric with the fixed arm 83 of the inner diameter measuring gauge head 70 supported on the support base 43A.

A ring-shaped gauge holder 47A is fixed on each ring gauge stand 45A approximately concentrically with the hole 46A. On the inner periphery of this gauge holder 47A, a gauge locking means 48 consisting of a partially protruding ball, a compression spring, etc.
A is provided at a plurality of locations, and master ring gauges 49A of various sizes to be mounted in the gauge holder 47A can be mounted to the gauge holder 47A with a single touch, and are prevented from falling off.

In addition, in FIG. 6, with the inner diameter measuring gauge head 70 placed on the support stand 43A, the tip of the fixed arm 83 of each gauge head 70 is connected to the mask-ring gauge 49A.
The ring gauge mounting stand 45 protrudes downward through the
The position of A is set. At this time, the dimension between the center in the thickness direction of the master ring gauge 49A and the top of the contactor 86 provided on the fixed arm 83 and the movable arm 85 is the same even in the case of the inner diameter measuring gauge head 70 having a different shape. They are always set to be approximately equal.

In addition, in FIG. 1, as a result of the placement frames 42A and 42B of the stockers 40A and 40B being able to advance and retreat in the Y direction, the two sliders 15A and 15B of the three-dimensional moving means IO are placed on the placement frames 42A and 43A. It is movable in three-dimensional directions relative to the inner diameter measuring gauge head 70 and the contact type probe 90.

Furthermore, in FIG. 2, the diameter of the circumscribed circle of each contactor 86 in a natural state with no external force applied is determined by the master ring gauge 49A corresponding to the radius measuring gauge 70.
The dimensions are slightly larger than the inner diameter of the

The automatic inner diameter measuring device 1 according to this embodiment is basically configured as described above, and its operation will be explained next.

Before starting measurement using the automatic inner diameter measuring device 1, a predetermined object W to be measured is mounted on the turning table 19 of the automatic inner diameter measuring device 1. On the other hand, inner diameter measuring gauge heads 70 and contact probes 90 corresponding to holes of various diameters and shapes formed in this object W to be measured are placed in stockers 40A and 40A.
Set it in the specified position of 0B.

When setting the inner diameter measuring gauge head 90, a master ring gauge 49 corresponding to the shape of each gauge head 90 is used.
A is attached to the gauge holder 48A, and the tip of the fixed arm 83 of each gauge head 90 is inserted into the ring gauge 49A.

Next, in order to measure the diameter of a predetermined hole in the object to be measured W according to a program installed in a control device (not shown), etc.,
An inner diameter measuring gauge head 70 suitable for measuring the hole is attached to a predetermined Z slider, for example, the first Z slider 15A.

This mounting is first carried out by attaching the X-direction drive means 21A of the first X slider 14A, the Z-direction drive means 24A of the first Z slider 15A, and the mounting frame 42 of the first stocker 40A.
A driving means (not shown) is driven to align the axis of the first Z slider 15A with the axis of the inner diameter measuring gauge head 70.

Next, pressurized fluid is supplied to the cylinder 61 of the attachment/detachment mechanism 50 provided in the first Z slider 15A to lower the piston rod 62, and the drive shaft 53 is connected to the compression coil spring 54.
Let it descend against the

In this state, the Z slider 15A is lowered to insert the pull stud 82 of the gauge head 70 into the ball holder 52.

Next, when the supply of pressure fluid to the cylinder 61 is released, the drive shaft 53 is raised by the compression coil spring 54, and the pull stud 82 is retracted into the center shaft 51, so that the center shaft 51 of the gauge head 70, that is, the Z slider 1
Installation to 5A is completed.

When attachment of the gauge head 70 to the Z slider 15A is completed, the Z slider 15A is raised.

As a result, the contact 86 of the gauge head 70 passes through the master ring gauge 49A while contacting the inner diameter thereof. At this time, to be more precise, when the Z-axis slider 15A rises by a certain amount after the gauge head 70 is attached, the output value of the displacement detector 88 provided in the gauge body 71 is controlled by a control means (not shown). Automatically set to zero.

At this time, when the inner diameter measuring gauge head 70 is attached to the Z slider 15A, the displacement detector 88 is automatically electrically connected to the control means through a contact point (not shown) or the like. Furthermore, when the contact 86 passes through the master ring gauge 49A, since the diameter of the circumscribed circle of the contact 86 is set larger than the inner diameter of the ring gauge 49A, the contact 86 always passes through the ring due to the rise of the Z slider 15A. Since it comes into contact with the inner diameter of the gauge 49A, zero setting is always performed.

The Z slider 15A equipped with the inner diameter measuring gauge head 70 that has been set to zero in this way is driven again by the X direction drive means 21A, the Z direction drive means 24A, and the Y direction drive means 27 of the table 17, so that the Z slider 15A is three-dimensionally moved. and inserted into a predetermined hole of the object W to be measured. When inserting into this hole, check the center position of the hole and the inner diameter measuring gauge head 7.
Even if there is some misalignment between the center position of Since the fixed arm 83 and the movable arm 85 are connected in a biased manner, the fixed arm 83 and the movable arm 85 can be smoothly inserted into the hole.

By inserting the fixed arm 83 and the movable arm 85 into the hole, the contact 86 provided on the movable arm 85 is moved inward in the radial direction of the hole, and this movement is detected as a displacement via the swing piece 87. The signal is transmitted to the detector 89 of the device 88 . If the output value of the detector 88 at this time is read by the control means, the inner diameter of the hole is measured as the amount of relative displacement with respect to the inner diameter of the master ring gauge 49A.

Hereinafter, the holes whose inner diameters can be measured with the inner diameter measuring gauge head 70 are sequentially measured with the gauge head 7o,
The information is stored in the control device and output to an output device (not shown) such as a display device or a printer.

After completing the measurement using one inner diameter measuring gauge head 70 in this way, the inner diameter measuring gauge head 70 of a different diameter
0 to the first Z slider 15A in the same manner as described above.
Attach it to the hole to measure the hole diameter.

After completing the inner diameter measurement of all required holes, move the 2 slider 1
A contact probe 90 is attached to 5A to measure the required dimensions. At this time, measurement using the contact probe 90 may be performed before or during the measurement of the hole diameter using the inner diameter measuring gauge head 70. In short, the measurement procedure should be set so that the measurement can be carried out efficiently. Bye.

In addition, it is not necessary to perform the measurement only on the first Z slider 15A side, and in consideration of time loss due to attachment and detachment of various inner diameter measurement gauge heads 70 and contact probes 90,
It may be used alternately with the Z slider 15B or in a predetermined order.

When all the measurements of one surface to be measured of the object W to be measured are completed in the above manner, the swing table 18 and/or the rotating table 19 are driven at a predetermined angle, generally 90 degrees in a predetermined direction, and a different surface to be measured is moved. the first and second Z sliders 15A, 1
5B and measure the pore diameter etc. again.

When the measurement of all the surfaces to be measured is completed, the object to be measured W is replaced and measurements are sequentially performed.

According to this embodiment as described above, there are the following effects.

That is, among the many holes formed in the object W to be measured, most of the holes that require only the diameter of the hole are measured using the inner diameter measuring gauge head 70, which can be measured by inserting it 19 times. It can save you a lot of time. Moreover, since measurements can be made using one gauge head 7° for holes of the same diameter without replacing the gauge head 70, time can be further reduced. Therefore, it becomes possible to measure the object W to be measured in-line, which has been difficult in the past.

In addition, since the measurement of the inner diameter measurement gauge head 7o is a comparative measurement with the mastering gauge 49A, the measurement accuracy is higher than that of the inner diameter measurement using a general coordinate measuring machine that requires long distance movement from the measurement origin. I can do it.

Furthermore, the inner diameter measuring gauge head 70 has a gauge body 71.
On the other hand, since the shank 78 is connected via two pairs of parallel springs 74 and 77, there is high flexibility against errors in the hole position, and smooth insertion of the gauge head 70 into the hole is possible.

In addition, the zero point setting for the inner diameter measurement gauge 70 is as follows:
Z spindle 15A of gauge head 70.

Since this is done automatically when the gauge head 15B is installed, it is efficient, and since it is always done every time the gauge head 70 is replaced, high measurement accuracy can be maintained at all times.

Furthermore, since the stockers 40A and 40B are equipped with an inner diameter measuring gauge head 70 and a contact probe 90, it is possible to measure not only the hole diameter but also a wide variety of shapes and dimensions, such as hole-to-hole dimensions and face-to-face dimensions. is possible.

Further, since the table 17 is provided with a swing table 18 and a rotating table 19, it is possible to measure many surfaces of the object W to be measured without having to reinstall the object W to be measured. Measurement time can also be shortened.

Although the present invention has been described above with reference to preferred embodiments, the present invention is not limited to these embodiments, and various improvements and changes in design can be made without departing from the gist of the present invention. Of course.

For example, in the present invention, it is sufficient to be able to measure at least the inner diameter of the hole, so the contact probe 90 does not need to be provided at all. In this case, the movement of the inner diameter measuring gauge head 70 does not necessarily have to be carried out with high precision;
6 can be inserted, the driving means 21 in each direction is sufficient.
A, 21B.

24A, 25A, 27 and displacement amount detection means 31A.

31B, 34A, 34B, and 37 do not require high precision and can be made inexpensive.

Further, the ring gauge mounting stand 45A on which the master ring gauge 49A is placed is not necessarily fixed to the support stand 43A of the mounting frame 42A in the stocker 40A, but is fixed to a support stand provided separately from the stocker 40A. It may be. However, if it is provided in the stocker 40A as in the embodiment described above, there is an advantage that the zero point can be set using the mounting operation of the gauge head 70.

At this time, even if the ring gauge mounting stand 45A is installed on the support stand 43A of the stocker 40A, the gauge head 70 is not necessarily attached to the support stand 43A with the contact 86 of the gauge head 70 inserted into the ring gauge 49A. It doesn't have to be supported. For example, the gauge head 70 is
A mastering gauge 49A is set slightly below the gauge head 70 while elastically supporting the mastering gauge 3A by floating it slightly via a coil spring or the like, and when the gauge head 70 is attached to the Z sliders 15A and 15B, By pushing the gauge head 70 against the coil spring, the contact 86 may be inserted into the ring gauge 49A to set the zero point.

Furthermore, X sliders 14A, 14B and Z slider 15A
, 15B and stockers 40A, 40B are not necessarily 2
There is no need to provide two (at least one is sufficient. However, providing two has the advantage of increasing measurement speed.

Further, the movement of the inner diameter measuring gauge head 70 or the contact probe 90 with respect to the object W to be measured is controlled by the X slider 14A.
, 14B and Z slider 15A.

15B in the X and Z directions and the table 17 in the Y direction.
B may be provided so as to be movable in the Y direction with respect to the pair of columns (in short, it is sufficient that the gauge head 70 etc. can be relatively three-dimensionally involved in the object W to be measured).

Similarly, stocker 4 for Z sliders 15A and 15B
The movement of the mounting frames 42A and 42B of 0A and 40B is also
The Z slider 15A is not limited to one in which the stockers 40A and 40B move in the Y direction.

The 15B side may move in the Y direction.

Further, a Z slider 15A is provided for the column 12.

15B is supported via the X sliders 14A, 14B, but the structure is not necessarily limited to this, and the crossbeams 13A, 1
3B is provided movably in the Z direction with respect to the column 12 to have the function of a Z slider, and X sliders 14A and 14B are provided on the crossbeam that moves up and down in the Z direction so as to be movable in the X direction. 15A and 15B may be omitted.

Further, the order in which the swing table 18 and the swing table 19 are installed with respect to the table 17 is that the swing table 19 is provided on the table 17, and the swing table 1 is placed on the swing table 19.
8 may be provided.

Furthermore, only one of the swing table 18 and the rotation table 19, or none at all, may be provided.

Further, the shank 78 of the inner diameter measuring gauge head 70 has two
The connection between the parallel springs 74 and 77 and the connecting plate 75 is not limited to the connection, but the center position of the gauge body 71 and the shank 78 can be adjusted using an Oldham joint or the like so that they can be freely displaced in the radial direction. Alternatively, the gauge body 71 and the shank 78 may be arranged so as to be non-displaceable in the axial direction but movable in the radial direction, and the two may be connected by a cylindrical rubber band or the like. In addition, it is not necessary to connect them in a floating structure, but to provide them in a fixed manner, so that the deviation of the center position can be prevented by using the X sliders 15A and 15B.
You may respond by moving.

Furthermore, the attachment/detachment mechanism 50 may be another mechanism such as one that utilizes the attraction force of an electromagnet.

In addition, the shape, dimensions, etc. of each part can be changed as appropriate.

〔Effect of the invention〕

As described above, according to the present invention, the inner diameter of the hole in the object to be measured can be measured extremely quickly, and the present invention can also be applied to in-line measurement.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway perspective view showing the overall configuration of an embodiment of an automatic inner diameter measuring device according to the present invention, and FIG. 2 is a perspective view showing an example of an inner diameter measuring gauge head used in this embodiment.
A partial cross-sectional view along the line ■-■ in the figure, Figure 3 is the ■-■ of Figure 2.
■An enlarged sectional view taken along the line; Figure 4 is a front view showing an example of the contact type probe used in this example; Figure 5 is a diagram showing the attachment/detachment mechanism of the inner diameter measuring gauge head and contact type probe used in this example. A cross-sectional view showing an example, and FIGS. 6 and 7 are a cross-sectional view and a perspective view, respectively, showing an example of essential parts of a stocker used in this embodiment. l... Automatic inner diameter measuring device, 10... Three-dimensional moving means, 14A, 14B... First and second X sliders, 15
A, 15B... 11th second Y slider, 17...
Table as Y slider, 18... Swing table, 19... Swivel table, 21A, 21B... First
, second X-direction driving means, 24A, 24B...first,
Second Z-direction driving means, 27...Y-direction driving means, 3
IA, 31B...X-direction displacement detection means, 34A. 34B...Z direction displacement detection means, 37...Y direction displacement detection means, 40A, 40B...first and second stockers, 43A...support stand, 45A...ring gauge stand , 49A... Mastering gauge, 50...
・Detachable mechanism, 70...Inner diameter measurement gauge head, 71・
... Gauge body 74.77 ... Parallel spring as biasing means, 78 ... Shank, 83 ... Fixed arm, 85 ... Movable arm, 86 ... Contact, 90 ...
・Contact type probe, 91... Probe body, 93...
・Shank, W...Object to be measured.

Claims (4)

[Claims] (1) An inner diameter measurement gauge head that can be inserted into a hole formed in a measured object and has at least one contact that can be displaced in the radial direction of the hole, and a plurality of inner diameter measurements corresponding to different hole diameters. A stocker capable of supporting a gauge head; and a stocker capable of moving in two orthogonal directions in a horizontal plane and in one direction in a vertical direction relative to the object to be measured and the inner diameter measuring gauge head, so that the stocker can move in a three-dimensional direction. a three-dimensional moving means capable of attaching and detaching an inner diameter measuring gauge head; a driving means for driving the three-dimensional moving means in each direction; and a plurality of means for zeroing each of the plurality of inner diameter measuring gauge heads. An automatic inner diameter measuring device comprising: a master ring gauge; and a ring gauge stand on which the master ring gauge is placed. (2) In the automatic inner diameter measuring device according to claim 1, the ring gauge mounting base has a center axis line of each master ring gauge that substantially coincides with a center axis line of each inner diameter measuring gauge head placed on the stocker. An automatic inner diameter measuring device characterized in that it is installed in a stocker so as to be at the same position. (3) An inner diameter measurement gauge head that can be inserted into a hole formed in the object to be measured and has at least one contact that can be displaced in the radial direction of the hole, and a plurality of inner diameter measurement units corresponding to different hole diameters. A stocker capable of supporting a gauge head, and the object to be measured and the inner diameter measuring gauge head are made movable relative to each other in two orthogonal directions in a horizontal plane and in one direction in a vertical direction, resulting in movement in a three-dimensional direction. a three-dimensional moving means capable of attaching and detaching an inner diameter measuring gauge head; a driving means for driving the three-dimensional moving means in each direction; and a plurality of means for zeroing each of the plurality of inner diameter measuring gauge heads. Master ring gauges and these master ring gauges are placed so that the central axis of each master ring gauge is approximately aligned with the central axis of each inner diameter measuring gauge head placed on the stocker. and a ring gauge mounting stand installed in the stocker, and when a predetermined inner diameter measuring gauge head is mounted by the three-dimensional moving means, the contact of the inner diameter measuring gauge head is passed through the corresponding ring gauge, and this A zero point setting method for an automatic inner diameter measuring device, characterized in that when a contact passes through a ring gauge, the measured value of the inner diameter measuring gauge head is automatically set to the zero point. (4) In the zero point setting method for an automatic inner diameter measuring device according to claim 3, when each inner diameter measuring gauge head is placed on the stocker, the contact of each inner diameter measuring gauge head is
Each inner diameter measuring gauge head is protruded by a fixed dimension from the corresponding master ring gauge, and after each inner diameter measuring gauge head is attached to the three-dimensional moving means, the measured value of the inner diameter measuring gauge head is set to zero at the position where the inner diameter measuring gauge head is raised by the fixed dimension. A method for setting the zero point of an automatic inner diameter measuring device.