JPH0475620U - - Google Patents
Info
- Publication number
- JPH0475620U JPH0475620U JP11975590U JP11975590U JPH0475620U JP H0475620 U JPH0475620 U JP H0475620U JP 11975590 U JP11975590 U JP 11975590U JP 11975590 U JP11975590 U JP 11975590U JP H0475620 U JPH0475620 U JP H0475620U
- Authority
- JP
- Japan
- Prior art keywords
- coil pattern
- reflecting mirror
- movable part
- spring
- spring part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Description
第1図は本考案に係わる光偏向素子の一実施例
を示す構成図、第2図は第1図のばね部30の拡
大断面構成図、第3図は固定位置と共振周波数に
ついて説明するための図、第4図は共振周波数の
調整方法を説明するための図、第5図は従来例を
示す構成斜視図である。
1……フルーム、2……可動部、3……ばね部
、4……反射鏡、5……コイルパターン、11…
…基部、30…ばね部、31……巾広部、32…
…巾細部。
Fig. 1 is a block diagram showing an embodiment of the optical deflection element according to the present invention, Fig. 2 is an enlarged cross-sectional block diagram of the spring portion 30 in Fig. 1, and Fig. 3 is for explaining the fixing position and resonance frequency. , FIG. 4 is a diagram for explaining the method of adjusting the resonance frequency, and FIG. 5 is a perspective view of the configuration of a conventional example. DESCRIPTION OF SYMBOLS 1... Flume, 2... Movable part, 3... Spring part, 4... Reflector, 5... Coil pattern, 11...
...Base, 30...Spring part, 31...Wide part, 32...
...width details.
Claims (1)
てなる可動部をばね部を介して片持ち梁として支
持し、このコイルパターンに流す電流によつて前
記可動部に形成した反射鏡を変位させるようにし
た光偏向素子において、前記ばね部を巾広部と巾
細部よりなる段付き構造としたことを特徴とする
光偏向素子。 A movable part formed by forming a coil pattern and a reflecting mirror on an insulating substrate is supported as a cantilever via a spring part, and the reflecting mirror formed in the movable part is displaced by a current flowing through the coil pattern. An optical deflection element characterized in that the spring part has a stepped structure consisting of a wide part and a narrow part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11975590U JPH0475620U (en) | 1990-11-14 | 1990-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11975590U JPH0475620U (en) | 1990-11-14 | 1990-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0475620U true JPH0475620U (en) | 1992-07-02 |
Family
ID=31867691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11975590U Pending JPH0475620U (en) | 1990-11-14 | 1990-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0475620U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013035002A (en) * | 2011-08-04 | 2013-02-21 | Toyota Auto Body Co Ltd | Press die |
| WO2018168311A1 (en) * | 2017-03-17 | 2018-09-20 | 株式会社ヒロテック | Drawing device |
-
1990
- 1990-11-14 JP JP11975590U patent/JPH0475620U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013035002A (en) * | 2011-08-04 | 2013-02-21 | Toyota Auto Body Co Ltd | Press die |
| WO2018168311A1 (en) * | 2017-03-17 | 2018-09-20 | 株式会社ヒロテック | Drawing device |