JPH0478935U - - Google Patents
Info
- Publication number
- JPH0478935U JPH0478935U JP12155990U JP12155990U JPH0478935U JP H0478935 U JPH0478935 U JP H0478935U JP 12155990 U JP12155990 U JP 12155990U JP 12155990 U JP12155990 U JP 12155990U JP H0478935 U JPH0478935 U JP H0478935U
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- piping
- ozone generator
- generator
- branch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図はこの考案の一実施例によるオゾン注入
装置を示すブロツク接続図、第２図乃至第４図は
この考案のオゾン注入装置の動作態様を示すブロ
ツク接続図、第５図は従来のオゾン注入装置を示
すブロツク接続図である。
１，３……オゾン発生装置、２，４はオゾン反
応装置、５，６は配管、７は切換バルブ、８，９
はバルブ、１０は分岐配管。なお、図中、同一符
号は同一または相当部分を示す。
FIG. 1 is a block connection diagram showing an ozone injection device according to an embodiment of this invention, FIGS. 2 to 4 are block connection diagrams showing the operation mode of the ozone injection device of this invention, and FIG. FIG. 3 is a block connection diagram showing the injection device. 1, 3... ozone generator, 2, 4 ozone reaction device, 5, 6 piping, 7 switching valve, 8, 9
is a valve, and 10 is a branch pipe. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
とに接続する配管と、該各系統ごとの配管の途中
に設けられたバルブと、上記各系統ごとの配管間
に接続された分岐配管と、該各分岐配管の途中に
設けられ、故障した上記オゾン発生装置側の系統
の上記オゾン反応装置に対し、正常な他系統のオ
ゾン発生装置からオゾンを分岐して供給する切換
バルブとを備えたオゾン注入装置。 Piping that connects the ozone generator and ozone reactor to each system, valves installed in the middle of the piping for each system, branch piping connected between the piping for each system, and each branch piping an ozone injection device, which is provided in the middle of the ozone generator, and includes a switching valve that branches and supplies ozone from a normal ozone generator in another system to the ozone reaction device in the system on the side of the malfunctioning ozone generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12155990U JPH0478935U (en) | 1990-11-20 | 1990-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12155990U JPH0478935U (en) | 1990-11-20 | 1990-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478935U true JPH0478935U (en) | 1992-07-09 |
Family
ID=31869410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12155990U Pending JPH0478935U (en) | 1990-11-20 | 1990-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478935U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022526453A (en) * | 2019-04-16 | 2022-05-24 | 北京北方華創微電子装備有限公司 | Reaction gas supply system and its control method |
-
1990
- 1990-11-20 JP JP12155990U patent/JPH0478935U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022526453A (en) * | 2019-04-16 | 2022-05-24 | 北京北方華創微電子装備有限公司 | Reaction gas supply system and its control method |
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