JPH0480304A - Manufacture of rare earth metal sintered body - Google Patents

Manufacture of rare earth metal sintered body

Info

Publication number
JPH0480304A
JPH0480304A JP2194386A JP19438690A JPH0480304A JP H0480304 A JPH0480304 A JP H0480304A JP 2194386 A JP2194386 A JP 2194386A JP 19438690 A JP19438690 A JP 19438690A JP H0480304 A JPH0480304 A JP H0480304A
Authority
JP
Japan
Prior art keywords
hot
rare earth
sintered body
earth metal
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2194386A
Other languages
Japanese (ja)
Inventor
Masanobu Uchida
内田 政伸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP2194386A priority Critical patent/JPH0480304A/en
Publication of JPH0480304A publication Critical patent/JPH0480304A/en
Pending legal-status Critical Current

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  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Hard Magnetic Materials (AREA)

Abstract

PURPOSE:To restrain increase of impurities of oxygen, nitrogen, carbon, etc., by inserting a thin plate composed of transition metal at interface between a material to be hot-pressed and a die for hot-pressing and executing the whole press of the hot pressing under reduced pressure or inert gas atmosphere. CONSTITUTION:In the manufacturing method for rare earth metal sintered body, where alloy composed of the rare earth metal and the transion metal under powder state or once pre-formed material is heated and compacted with the hot-pressing, the thin plate composed of the transition metal is inserted at interface between the material to be hot-pressed and the die for hot pressing. This is hot-pressed under reduced pressure or inert gas atmosphere. The inserted thin plate uses metal or alloy composed of one or more kinds of elements selected from Fe, Ti, V, Cr, Mn, Co, Ni, etc., belonging to the transition metal as the raw material. By this method, high purity sintered body composed of the rare earth metal and the transition metal can be easily manufactured.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は磁石やスパッタリング用ターゲットとして有用
な希土類金属焼結体の製造方法におけるホットプレスの
改良に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an improvement in hot pressing in a method for manufacturing rare earth metal sintered bodies useful as magnets and sputtering targets.

(従来の技術) 磁石あるいはスパッタリング用ターゲット等の製造方法
の一方法として、粉末冶金法が広く知られており、その
焼結方法としては常圧焼結、ホットプレス、HIP等の
方法が挙げられるが、比較的低コストで高密度の焼結体
の製造にはホットプレスが最適とされいる。このホット
プレス法は、金属粉を粉末の状態のまま、あるいは一旦
予備成形したものを加熱成形する方法で、型には黒鉛を
使用するのが一般的である。得られた焼結体は高密度で
、寸法精度が良(、機械加工も少な(てすむという利点
がある。
(Prior Art) Powder metallurgy is widely known as a method for manufacturing magnets, sputtering targets, etc., and sintering methods include atmospheric sintering, hot pressing, HIP, etc. However, hot pressing is considered optimal for producing high-density sintered bodies at relatively low cost. This hot press method is a method in which metal powder is heat-molded either in powder form or after it has been preformed, and graphite is generally used for the mold. The obtained sintered body has the advantages of high density, good dimensional accuracy (and requires little machining).

(発明が解決しようとする課題) しかしながら、被ホットプレス材が希土類金属を含むよ
うな非常に活性な合金の場合には、ホットプレス用型の
材質が問題となり、ホットプレス時に黒鉛型から酸素、
窒素あるいは炭酸ガス等のガスが放出され、これが型に
直接接触している被ホットプレス材の表面に吸着され、
拡散、浸透し、希土類金属等と反応して酸化物、窒化物
、水酸化物等を生成し1、これが不純物として作用する
ため、磁気特性が低下したり、ターゲツト材として不適
当になる。酸素は酸化物、水酸化物を生成して保磁力、
磁気特性を低下させ、窒素は窒化物を生成して磁気特性
を低下させる。
(Problem to be Solved by the Invention) However, when the material to be hot-pressed is a highly active alloy containing rare earth metals, the material of the hot-pressing mold becomes a problem, and oxygen is removed from the graphite mold during hot-pressing.
Gases such as nitrogen or carbon dioxide are released, and this is adsorbed on the surface of the hot pressed material that is in direct contact with the mold.
It diffuses and permeates, reacts with rare earth metals, etc., and produces oxides, nitrides, hydroxides, etc. 1, which act as impurities, resulting in decreased magnetic properties and becoming unsuitable as a target material. Oxygen forms oxides and hydroxides, which increases coercive force,
Nitrogen forms nitrides that reduce magnetic properties.

本発明はホットプレス方法を改良してこれらの不利、欠
点を解決し、不純物の少ない焼結体を提供しようとする
ものである。
The present invention aims to solve these disadvantages and shortcomings by improving the hot pressing method, and to provide a sintered body with less impurities.

(課題を解決するための手段) 本発明者等は、上記不利、欠点を解決するために被ホッ
トプレス材とホットプレス用型との界面に遷移金属より
なる薄板を介在させ、ホットプレスの全工程を減圧また
は不活性ガス雰囲気下に実施することで、酸素、窒素、
炭素等の不純物の増加を抑えられることを見出し、関連
する諸条件を詳細に検討して本発明を完成させた。
(Means for Solving the Problems) In order to solve the above-mentioned disadvantages and shortcomings, the present inventors have provided a thin plate made of a transition metal at the interface between the hot-pressed material and the hot-pressing die, and the hot-pressing method By carrying out the process under reduced pressure or an inert gas atmosphere, oxygen, nitrogen,
They discovered that the increase in impurities such as carbon can be suppressed, and after studying the related conditions in detail, they completed the present invention.

すなわち、本発明はホットプレスにより希土類金属と遷
移金属よりなる合金を粉末状態のまま、あるいは一旦予
備成形したものを加熱成形する希土類金属焼結体の製造
方法において、被ホットプレス材とホットプレス金型と
の界面に遷移金属からなる薄板を介在させ、減圧または
不活性ガス雰囲気下にホットプレスすることを特徴とす
る希土類金属焼結体の製造方法を要旨とするものである
。
That is, the present invention provides a method for producing a rare earth metal sintered body in which an alloy consisting of a rare earth metal and a transition metal is heat-formed in powder form or once preformed by hot pressing. The gist of the present invention is a method for producing a rare earth metal sintered body, which is characterized in that a thin plate made of a transition metal is interposed at the interface with the mold, and hot pressing is carried out under reduced pressure or an inert gas atmosphere.

以下、本発明の詳細な説明する。The present invention will be explained in detail below.

本発明の最大の特徴である被ホットプレス材とホットプ
レス金型との界面に挿入する薄板は、まず材質としては
遷移金属に属するFe、Ti、 V 、Cr、Mn、 
Co、 Ni等から選択される1種または2種以上の元
素からなる金属または合金を素材とする薄板で、具体的
には、鉄板、チタン板、鉄−ニッケル合金板等が例示さ
れるが、被ホットプレス材質、ホットプレス用型材質、
および温度、圧力、時間、雰囲気等のホットプレス条件
等によって適宜選択される。薄板の厚さとしては10〜
100μm程度のもので良く、ホットプレス型に合わせ
てプレス成形してお(。さらに、ホットプレスの条件と
しては1、OX 10−’〜0.ITorrの減圧下ま
たはArガス雰囲気下に行なうことが必要で、ホットプ
レスの全工程を減圧または不活性ガス雰囲気とすること
で酸素、窒素、炭素等の不純物の増加を抑えることがで
きる。減圧度が0. ITorrを越えると雰囲気中の
脱ガスが不充分で窒化物、炭化物等を生成する。
The main feature of the present invention is that the thin plate inserted at the interface between the hot-pressed material and the hot-pressed mold is made of transition metals such as Fe, Ti, V, Cr, Mn,
A thin plate made of a metal or alloy made of one or more elements selected from Co, Ni, etc. Specific examples include iron plates, titanium plates, iron-nickel alloy plates, etc. Hot press material, hot press mold material,
The temperature, pressure, time, atmosphere, and other hot pressing conditions are selected as appropriate. The thickness of the thin plate is 10~
It is sufficient to have a thickness of about 100 μm, and it is press-molded according to the hot press mold (.Furthermore, the hot press conditions are 1.OX 10-' to 0.ITorr under reduced pressure or Ar gas atmosphere The increase in impurities such as oxygen, nitrogen, carbon, etc. can be suppressed by reducing pressure or creating an inert gas atmosphere during the entire hot pressing process.If the degree of reduced pressure exceeds 0.ITorr, degassing in the atmosphere will occur. If insufficient, nitrides, carbides, etc. will be generated.

また、被ホットプレス材の使用温度での蒸気圧と該雰囲
気の減圧度とを適宜に選択しないと、蒸気圧の高い成分
が選択的に蒸発し、得られる焼結体の成分が原料配合組
成とずれることがある。例えば、Yb、 Sm、 Tm
、 Ho、 Dy等は蒸発量を考慮する必要がある。さ
らに成形圧力、焼結温度によっては、被ホットプレス材
と遷移金属よりなる薄板との成分がお互いに拡散、接合
することがあるので、被ホットプレス材と該薄板との共
融点以下の焼結温度で成形するのが望ましい。例えば被
ホットプレス材がTb2゜Fes。合金粉末で、鉄薄板
を使用する場合にはこの両者の液相線温度である1、2
76℃未満の焼結温度で成形するのが良い。
In addition, if the vapor pressure at the working temperature of the hot-pressed material and the degree of depressurization of the atmosphere are not appropriately selected, components with high vapor pressure will selectively evaporate, and the components of the resulting sintered body will differ from the raw material composition. There may be deviations. For example, Yb, Sm, Tm
, Ho, Dy, etc., it is necessary to consider the amount of evaporation. Furthermore, depending on the molding pressure and sintering temperature, the components of the hot-pressed material and the thin plate made of a transition metal may diffuse and bond with each other. It is preferable to mold at high temperature. For example, the material to be hot pressed is Tb2°Fes. When using alloy powder and a thin iron plate, the liquidus temperature of both is 1 or 2.
It is preferable to form at a sintering temperature of less than 76°C.

本発明の適用領域は、希土類金属と遷移金属からなる合
金で、希土類金属としては、Yを含むLa、 Ce、 
Pr、 Nd、 PIII、 St、 Eu、 Gc、
 Tb、 Dy、 Ho、 Er、 Tm、 Ybおよ
びLυ等から選択される1種または2種以上の元素、遷
移金属としてはFe、 Ti、 V 、 Cr、 Mn
、 Co、 Ni等から選択される1種または2種以上
の元素からなる合金で、具体的には、Sm−Go、 N
d−Fe−B、 La−Ni、 Tb−Fe等が例示さ
れ、永久磁石合金、スパッタリング用ターゲット等に有
用とされる。
The application area of the present invention is an alloy consisting of a rare earth metal and a transition metal, and the rare earth metal includes Y-containing La, Ce,
Pr, Nd, PIII, St, Eu, Gc,
One or more elements selected from Tb, Dy, Ho, Er, Tm, Yb, Lυ, etc., transition metals include Fe, Ti, V, Cr, Mn
An alloy consisting of one or more elements selected from , Co, Ni, etc., specifically, Sm-Go, N
Examples include d-Fe-B, La-Ni, and Tb-Fe, which are useful for permanent magnet alloys, sputtering targets, and the like.

以下、本発明の具体的態様を実施例を挙げて説明するが
、本発明はこれらに限定されるものではない。
Hereinafter, specific embodiments of the present invention will be explained with reference to Examples, but the present invention is not limited thereto.

(実施例1) SmCos (Sm:16.7.Co:83.3各原子
%)合金インゴットなN2雰囲気中で機械的に10μm
以下に粉砕しこれを被ホットプレス材とした。ダイス径
60mmの黒鉛製ホットプレス用型に型に合わせた厚さ
80μmの鉄−ニッケル合金薄板をセットし、前記合金
粉末を135 gr仕込み、Arガス雰囲気下にて15
0Kg/cm” X 1.050℃に加圧、加熱しホッ
トプレスした。成形焼結体の寸法は実施例1〜3のいず
れも60φx5.Stmmであった。得られた成形焼結
体の物性を第1表に示した°。
(Example 1) SmCos (Sm: 16.7. Co: 83.3 atomic% each) alloy ingot mechanically reduced to 10 μm in N2 atmosphere
The powder was pulverized and used as a material to be hot pressed. An iron-nickel alloy thin plate with a thickness of 80 μm that matched the mold was set in a graphite hot press mold with a die diameter of 60 mm, 135 gr of the alloy powder was charged, and 15 gr of the alloy powder was charged in an Ar gas atmosphere.
0Kg/cm" x 1.050°C and hot pressed. The dimensions of the shaped sintered bodies were 60φ x 5.Stmm in all of Examples 1 to 3. Physical properties of the obtained shaped sintered bodies ° is shown in Table 1.

(実施例2) LaNis (La:16.7.Ni:83.3各原子
%、粒度300μm以下)合金粉末を厚さ60μmのチ
タン薄板をセットした黒鉛製ホットプレス型に充填し、
1.OX 10−”Torrの減圧度にて150Kg/
cm” x 1.150℃でホットプレスした以外は実
施例1と同様に処理した。得られた成形焼結体の物性を
第1表に併記した。
(Example 2) LaNis (La: 16.7, Ni: 83.3 atomic % each, particle size 300 μm or less) alloy powder was filled into a graphite hot press mold set with a 60 μm thick titanium thin plate,
1. 150Kg/at OX 10-”Torr vacuum degree
cm" x 1. The same process as in Example 1 was carried out except that hot pressing was carried out at 150°C. The physical properties of the obtained shaped sintered body are also listed in Table 1.

(実施例3) TbzoFeso (Tb:20.Fe:80各原子%
、粒度250μm以下)合金粉末を厚さ80μmの鉄薄
板をセットした黒鉛製ホットプレス型に充填し、 15
0kg/cm”Xi、150℃でホットプレスした以外
は実施例1と同様に処理した。得られた成形焼結体の物
性を第1表に併記した。
(Example 3) TbzoFeso (Tb: 20. Fe: 80 each atomic %
, particle size of 250 μm or less) was filled into a graphite hot press mold set with a thin iron plate with a thickness of 80 μm.
The process was carried out in the same manner as in Example 1 except that hot pressing was carried out at 0 kg/cm"Xi and 150°C. The physical properties of the obtained shaped sintered body are also listed in Table 1.

(比較例1) SmCos  (Sm:16.7.Co:83.3各原
子%、粒度:10μm以下)合金粉末を直接黒鉛製ホッ
トプレス型に充填した以外は、実施例1と同様に処理し
た。
(Comparative Example 1) Processed in the same manner as in Example 1 except that SmCos (Sm: 16.7, Co: 83.3 atomic %, particle size: 10 μm or less) alloy powder was directly filled into a graphite hot press mold. .

得られた焼結体の物性を第1表に併記した。The physical properties of the obtained sintered body are also listed in Table 1.

(比較例2) laNi、  ([a;16.7.Ni:83.3各原
子%、粒度300μm以下)合金粉末を直接黒鉛製ホッ
トプレス型に充填した以外は、実施例2と同様に処理し
た。
(Comparative Example 2) Processed in the same manner as in Example 2, except that laNi ([a; 16.7.Ni: 83.3 atomic % of each, particle size 300 μm or less] alloy powder was directly filled into a graphite hot press mold. did.

得られた焼結体の物性を第1表に併記した。The physical properties of the obtained sintered body are also listed in Table 1.

(比較例3) TbaoFeao (Tb:20.Fe:80各原子%
、粒度250μm以下)合金粉末を直接黒鉛製ホットプ
レス型に充填した以外は、実施例3と同様に処理した。
(Comparative Example 3) TbaoFeao (Tb: 20. Fe: 80 each atomic %
, particle size of 250 μm or less) was processed in the same manner as in Example 3, except that the alloy powder was directly filled into a graphite hot press mold.

得られた焼結体の物性を第1表に併記した。The physical properties of the obtained sintered body are also listed in Table 1.

第1表 (発明の効果) 本発明によれば、被ホットプレス材とホットプレス用型
との界面に遷移金属よりなる薄板を挿入することで、焼
結体中の酸素、窒素、炭素等の不純物の増加を抑えるこ
とができた。さらに、ホットプレス用型の黒鉛と被ホッ
トプレス材との直接接触を絶ったことで、黒鉛型の耐久
性が増し、型費を安くすることができ、希土類金属と遷
移金属よりなる高純度焼結体を容易に製造することがで
きる。
Table 1 (Effects of the Invention) According to the present invention, by inserting a thin plate made of a transition metal at the interface between the hot-pressed material and the hot-pressing mold, oxygen, nitrogen, carbon, etc. in the sintered body are removed. We were able to suppress the increase in impurities. Furthermore, by eliminating direct contact between the graphite in the hot pressing mold and the material to be hot pressed, the durability of the graphite mold is increased, mold costs are reduced, and high-purity sintered materials made of rare earth metals and transition metals are used. Aggregates can be easily produced.

Claims (1)

【特許請求の範囲】[Claims]  ホットプレスにより希土類金属と遷移金属よりなる合
金を粉末状態のまま、あるいは一旦予備成形したものを
加熱成形する希土類金属焼結体の製造方法において、被
ホットプレス材とホットプレス金型との界面に遷移金属
からなる薄板を介在させ、減圧または不活性ガス雰囲気
下にホットプレスすることを特徴とする希土類金属焼結
体の製造方法。
In a method for producing a rare earth metal sintered body, in which an alloy consisting of a rare earth metal and a transition metal is heat-formed in a powder state or once preformed by hot pressing, the interface between the hot-pressed material and the hot-press mold is A method for producing a rare earth metal sintered body, which comprises hot pressing under reduced pressure or an inert gas atmosphere with a thin plate made of a transition metal interposed therebetween.
JP2194386A 1990-07-23 1990-07-23 Manufacture of rare earth metal sintered body Pending JPH0480304A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2194386A JPH0480304A (en) 1990-07-23 1990-07-23 Manufacture of rare earth metal sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2194386A JPH0480304A (en) 1990-07-23 1990-07-23 Manufacture of rare earth metal sintered body

Publications (1)

Publication Number Publication Date
JPH0480304A true JPH0480304A (en) 1992-03-13

Family

ID=16323738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2194386A Pending JPH0480304A (en) 1990-07-23 1990-07-23 Manufacture of rare earth metal sintered body

Country Status (1)

Country Link
JP (1) JPH0480304A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000038662A (en) * 1998-07-24 2000-02-08 Tosoh Corp Sputtering target
JP2014237894A (en) * 2010-04-14 2014-12-18 プランゼー エスエー Coating source and manufacturing method of the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000038662A (en) * 1998-07-24 2000-02-08 Tosoh Corp Sputtering target
JP2014237894A (en) * 2010-04-14 2014-12-18 プランゼー エスエー Coating source and manufacturing method of the same

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