JPH0483555U - - Google Patents
Info
- Publication number
- JPH0483555U JPH0483555U JP12619490U JP12619490U JPH0483555U JP H0483555 U JPH0483555 U JP H0483555U JP 12619490 U JP12619490 U JP 12619490U JP 12619490 U JP12619490 U JP 12619490U JP H0483555 U JPH0483555 U JP H0483555U
- Authority
- JP
- Japan
- Prior art keywords
- base
- sensors
- scale
- sensor
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Machine Tool Units (AREA)
Description
第１図は本考案のＸＹテーブルの一実施例を示
す主要正面図。第２図は本考案のＸＹテーブルの
構成要素であるＸＹスケール板の正面図。第３図
は本考案のＸＹテーブルの構成要素であるＸＹス
ケール板の部品側面図。第４図は従来のＸＹテー
ブルを示す主要正面図。第５図はＸＹテーブルと
コントローラーのシステム構成図。
１……土台、２……Ｘテーブル、３……Ｙテー
ブル、４……支持棒、５……ＸＹスケール板、６
……Ｘセンサー、７……Ｙセンサー、８……セン
サー支持台、１０……吸光板、１１……反射スリ
ツト、２１……土台、２２……Ｘテーブル、２３
……Ｙテーブル、２６……Ｘセンサー、２７……
Ｙセンサー、２８……Ｘスケール、２９……Ｙス
ケール、３０……ＸＹテーブル、３１……センサ
ーコントローラ、３２……モータドライバー、３
３……テーブルコントローラー、３４……コンピ
ユーター。
FIG. 1 is a main front view showing an embodiment of the XY table of the present invention. FIG. 2 is a front view of the XY scale plate, which is a component of the XY table of the present invention. FIG. 3 is a side view of the XY scale plate, which is a component of the XY table of the present invention. FIG. 4 is a main front view showing a conventional XY table. Figure 5 is a system configuration diagram of the XY table and controller. 1...Foundation, 2...X table, 3...Y table, 4...Support rod, 5...XY scale plate, 6
...X sensor, 7...Y sensor, 8...sensor support stand, 10...light absorbing plate, 11...reflection slit, 21...base, 22...X table, 23
...Y table, 26...X sensor, 27...
Y sensor, 28...X scale, 29...Y scale, 30...XY table, 31...sensor controller, 32...motor driver, 3
3...table controller, 34...computer.
Claims (1)
Ｙ方向テーブルを配置したＸＹテーブルにおいて
、土台より支持棒によりＸＹスケール板をＸＹテ
ーブルと平行に配置し、，ＸＹテーブル上にＸセ
ンサー、Ｙセンサーを配置し、ＸＹスケール板の
表裏に縞を書いておき、Ｘセンサー、Ｙセンサー
にて読みとる事を特徴とするＸＹテーブル。 In an XY table with an X-direction table placed on the base and a Y-direction table placed above it, the XY scale board is placed parallel to the XY table from the base using a support rod, This is an XY table that is characterized by arranging sensors and writing stripes on the front and back of the XY scale plate, which are read by the X and Y sensors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12619490U JPH0483555U (en) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12619490U JPH0483555U (en) | 1990-11-28 | 1990-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0483555U true JPH0483555U (en) | 1992-07-21 |
Family
ID=31873760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12619490U Pending JPH0483555U (en) | 1990-11-28 | 1990-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0483555U (en) |
-
1990
- 1990-11-28 JP JP12619490U patent/JPH0483555U/ja active Pending
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