JPH0485146U - - Google Patents

Info

Publication number
JPH0485146U
JPH0485146U JP12889290U JP12889290U JPH0485146U JP H0485146 U JPH0485146 U JP H0485146U JP 12889290 U JP12889290 U JP 12889290U JP 12889290 U JP12889290 U JP 12889290U JP H0485146 U JPH0485146 U JP H0485146U
Authority
JP
Japan
Prior art keywords
light receiving
light
receiving element
filter
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12889290U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12889290U priority Critical patent/JPH0485146U/ja
Publication of JPH0485146U publication Critical patent/JPH0485146U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例である光測定治具
の側部分断面図、第２図は第１図の光測定治具の
展開斜視図、第３図は従来の光測定治具の斜視図
である。 図において、１は光源、４は受光部４ａ〜４ｄ
を有する受光素子、５は電気特性測定用導電針、
１０は測定基板、１１は波長選択フイルタ１１ａ
〜１１ｄを有するターレツト、１２は回転軸、１
３は干渉フイルタ１３ａ〜１３ｄを有するフイル
タ枠、１４は受光素子ウエハ、１５はウエハ固定
台を示す。なお、図中、同一符号は同一、又は相
当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 複数の受光素子を有する半導体に光を照射する
    光源装置において、光を各々の受光素子に分割照
    射できるように、光源と受光素子間に波長を選択
    できるフイルタと、個々の受光素子上にそれぞれ
    波長の異なる干渉フイルタを備えたことを特徴と
    する光測定治具。
JP12889290U 1990-11-29 1990-11-29 Pending JPH0485146U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12889290U JPH0485146U (ja) 1990-11-29 1990-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12889290U JPH0485146U (ja) 1990-11-29 1990-11-29

Publications (1)

Publication Number Publication Date
JPH0485146U true JPH0485146U (ja) 1992-07-23

Family

ID=31876330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12889290U Pending JPH0485146U (ja) 1990-11-29 1990-11-29

Country Status (1)

Country Link
JP (1) JPH0485146U (ja)

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