JPH0485560U - - Google Patents

Info

Publication number
JPH0485560U
JPH0485560U JP12637890U JP12637890U JPH0485560U JP H0485560 U JPH0485560 U JP H0485560U JP 12637890 U JP12637890 U JP 12637890U JP 12637890 U JP12637890 U JP 12637890U JP H0485560 U JPH0485560 U JP H0485560U
Authority
JP
Japan
Prior art keywords
magnetic path
excitation coil
vacuum
space
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12637890U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12637890U priority Critical patent/JPH0485560U/ja
Publication of JPH0485560U publication Critical patent/JPH0485560U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を説明するための透
過形電子顕微鏡の対物レンズの縦断面図、第2図
は対物レンズの半断面図である。 1……上磁路、2……下磁路、3……励磁コイ
ル、4……コイル枠、14……真空の空間。
FIG. 1 is a longitudinal sectional view of an objective lens of a transmission electron microscope for explaining an embodiment of the present invention, and FIG. 2 is a half sectional view of the objective lens. 1... Upper magnetic path, 2... Lower magnetic path, 3... Excitation coil, 4... Coil frame, 14... Vacuum space.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 磁路を2個以上に分割し、その内部にコイル枠
より成る、励磁コイルを設け、該励磁コイルのほ
ぼ全周を真空の空間で覆うように成した。電子レ
ンズに於て、該磁路と励磁コイルの間に一切の真
空遮断壁を用いず、上下に組合わせて成る磁路の
空間そのものを真空容器としたことを特徴とする
電子顕微鏡等の電子レンズ。
The magnetic path is divided into two or more parts, and an excitation coil made of a coil frame is provided inside the magnetic path, so that almost the entire circumference of the excitation coil is covered with a vacuum space. An electron microscope, etc., characterized in that the electron lens does not use any vacuum shielding wall between the magnetic path and the excitation coil, and the space of the magnetic path formed by combining the upper and lower magnetic paths itself is a vacuum container. lens.
JP12637890U 1990-11-30 1990-11-30 Pending JPH0485560U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12637890U JPH0485560U (en) 1990-11-30 1990-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12637890U JPH0485560U (en) 1990-11-30 1990-11-30

Publications (1)

Publication Number Publication Date
JPH0485560U true JPH0485560U (en) 1992-07-24

Family

ID=31873937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12637890U Pending JPH0485560U (en) 1990-11-30 1990-11-30

Country Status (1)

Country Link
JP (1) JPH0485560U (en)

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