JPH0485565U - - Google Patents
Info
- Publication number
- JPH0485565U JPH0485565U JP12638590U JP12638590U JPH0485565U JP H0485565 U JPH0485565 U JP H0485565U JP 12638590 U JP12638590 U JP 12638590U JP 12638590 U JP12638590 U JP 12638590U JP H0485565 U JPH0485565 U JP H0485565U
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- plasma
- oil
- usage time
- predetermined value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000004949 mass spectrometry Methods 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 5
- 238000005259 measurement Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案は一実施例を示す装置構成図で
ある。
２２……サンプル、２４……ネブライザ、２５
……プラズマ生成部、２６……プラズマ、２８…
…ガス制御部、３０……高周波電源、３２……サ
ンプリングコーン、３３……スキマーコーン、３
６……イオンレンズ、３８，４４……ロータリー
ポンプ、４０，４２……油拡散ポンプ、４５……
不揮発性メモリ、４６……制御用コンピユータ、
４８……質量分析部、５２……電子増倍管、１０
０……操作部。
FIG. 1 is a block diagram of an apparatus showing one embodiment of the present invention. 22...sample, 24...nebulizer, 25
...Plasma generation section, 26...Plasma, 28...
... Gas control unit, 30 ... High frequency power supply, 32 ... Sampling cone, 33 ... Skimmer cone, 3
6... Ion lens, 38, 44... Rotary pump, 40, 42... Oil diffusion pump, 45...
Non-volatile memory, 46...control computer,
48... Mass spectrometry section, 52... Electron multiplier, 10
0...Operation unit.
Claims (1)
プラズマによるサンプルを導入するための試料導
入系、イオンを質量別に分別するための質量分析
系を備えたプラズマイオン源極微量元素質量分析
装置において、前記質量分析計の耐久消費部品で
あるサンプリングコーン、スキマーコーン、高周
波電源、ロータリーポンプ内オイル、油拡散ポン
プ内オイル、電子増倍管の使用時間を監視する手
段を有し、前記使用時間が所定値を越えた場合、
部品の交換時期であることを使用者に通知する手
段を備えたことを特徴とするプラズマイオン源極
微量元素質量分析装置。 ２ 請求項１記載において、前記質量分析計の耐
久消費部品毎の使用時間と比較するための所定値
を、実測値をもとに装置毎に登録できる手段を備
えたことを特徴とするプラズマイオン源極微量元
素質量分析装置。[Claims for Utility Model Registration] 1. At least an ion generation system using plasma,
In a plasma ion source ultratrace element mass spectrometer equipped with a sample introduction system for introducing a sample by plasma and a mass spectrometry system for separating ions by mass, a sampling cone that is a durable consumable part of the mass spectrometer; It has means for monitoring the usage time of the skimmer cone, high frequency power supply, oil in the rotary pump, oil in the oil diffusion pump, and electron multiplier tube, and if the usage time exceeds a predetermined value,
A plasma ion source ultratrace element mass spectrometer characterized by comprising means for notifying a user that it is time to replace parts. 2. The plasma ion according to claim 1, further comprising means for registering a predetermined value for each device based on actual measurement values for comparison with the usage time of each durable consumable part of the mass spectrometer. Source ultratrace element mass spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12638590U JPH0485565U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12638590U JPH0485565U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485565U true JPH0485565U (en) | 1992-07-24 |
Family
ID=31873944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12638590U Pending JPH0485565U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485565U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008139809A1 (en) * | 2007-05-15 | 2008-11-20 | Ulvac, Inc. | Mass spectrometry unit |
-
1990
- 1990-11-30 JP JP12638590U patent/JPH0485565U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008139809A1 (en) * | 2007-05-15 | 2008-11-20 | Ulvac, Inc. | Mass spectrometry unit |
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